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B.Y. van der Wel MSc (Bernhard)

Expertise

Engineering & Materials Science
Fabrication
Nanoelectronics
Nanofluidics
Nanowires
Silicon
Physics & Astronomy
Fabrication
Silicon
Wafers

Research

Atomic layer deposition (ALD) is a thin-film deposition technique widely used in the semiconductor industry to deposit very thin layers of materials with high uniformity and high conformality. Currently several techniques have been developed and a great variety of materials can be deposited, however for many materials an ALD recipe remains unchartered. In our research the aim is to develop new recipes and use novel techniques to facilitate the ALD of these materials.

 

Publications

Recent
Kooijman, L. J., Pordeli, Y. , van der Wel, B. Y. , Berenschot, J. W. , Eijkel, J. C. T. , & Tas, N. R. (2020). High-performance ceramic EOF pump realized by massively parallel sacrificial silicon nano-pillar moulding. In 23rd International Conference on Miniaturized Systems for Chemistry and Life Sicences: uTAS 2019 (pp. 1188-1189). The Chemical and Biological Microsystems Society.
Pordeli, Y. , Borgelink, B. T. H. , van der Wel, B. Y. , Berenschot, E. J. W. , Dogan, T. , de Boer, M. J. , Bruinink, C. M. , Zandvliet, H. J. W. , Gardeniers, H. J. G. E. , & Tas, N. R. (2019). Wafer-Scale Self-Aligned Fabrication of Nanometric Curved Tunneling Junctions. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII (pp. 2376-2379). Article 8808559 IEEE. https://doi.org/10.1109/TRANSDUCERS.2019.8808559

Affiliated Study Programmes

Bachelor

Contact Details

Visiting Address

University of Twente
Drienerlolaan 5
7522 NB Enschede
The Netherlands

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Mailing Address

University of Twente
P.O. Box 217
7500 AE Enschede
The Netherlands

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