Expertise
Physics
- Targets
- Magnetron
- Oxidation
- Quality
Material Science
- Al2O3
- Material
- Oxidation Reaction
- Oxide
Organisations
Publications
2020
Relative oxidation state of the target as guideline for depositing optical quality RF reactive magnetron sputtered Al2O3 layers (2020)Optical materials express, 10(6), 1451-1462. van Emmerik, C. I., Hendriks, W. A. P. M., Stok, M. L., de Goede, M., Chang, L., Dijkstra, M., Segerink, F., Post, D., Keim, E. G., Dikkers, M. J. & García-Blanco, S. M.https://doi.org/10.1364/ome.393058
Research profiles
Address
University of Twente
Carré (building no. 15), room C3221
Hallenweg 23
7522 NH Enschede
Netherlands
University of Twente
Carré C3221
P.O. Box 217
7500 AE Enschede
Netherlands
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