About Me
Senior Vice President Technology - ASML
Honary professor "NNV leerstoel industriele Natuurkunde"
Expertise
Blisters
Thin Films
Hydrogen
Hydrogen
Multilayers
Hydrogen
Ions
Residual Stress
Thin Films
Multilayers
Fluxes
Photolithography
Thin Films
Residual Stresses
Residual Stresses
Ions
Protons
Hydrogen Ions
Lithography
Organizations
Ancillary Activities
-
AWTI
advise dutch government on science, technology and innovation -
ACTI (dutch academy technology and innovation)
member
Publications
Recent
Van Den Bos, R. A. J. M., Reinink, J., Lopaev, D. V., Lee, C. J., Benschop, J. P. H., & Bijkerk, F. (2018). Influence of internal stress and layer thickness on the formation of hydrogen induced thin film blisters in Mo/Si multilayers. Journal of physics D: applied physics, 51(11), [115302]. DOI: 10.1088/1361-6463/aaad86
Van Den Bos, R. A. J. M., Lee, C. J., Benschop, J. P. H., & Bijkerk, F. (2017). Blister formation in Mo/Si multilayered structures induced by hydrogen ions. Journal of physics D: applied physics, 50(26), [265302]. DOI: 10.1088/1361-6463/aa7323
Benschop, J. P. H. (2016). How Lithography Enables Moore's Law. In S. Luryi, J. Xu, & A. Zaslavsky (Eds.), Future Trends in Microelectronics: Journey into the Unknown (pp. 23-34). Wiley. DOI: 10.1002/9781119069225.ch1-2
van den Bos, R. A. J. M., Reshetniak, V., Lee, C. J., Benschop, J. P. H., & Bijkerk, F. (2016). A model for pressurized hydrogen induced thin film blisters. Journal of applied physics, 120(23), 235304-. [235304]. DOI: 10.1063/1.4972221
UT Research Information System
Affiliated Study Programmes
Bachelor
Courses
Contact Details
Visiting Address
University of Twente
Faculty of Science and Technology
Carré
(building no. 15), room 2023
Hallenweg 23
7522NH Enschede
The Netherlands
Mailing Address
University of Twente
Faculty of Science and Technology
Carré
2023
P.O. Box 217
7500 AE Enschede
The Netherlands