prof.dr.ir. J.P.H. Benschop (Jos) | University of Twente

Senior Vice President Technology - ASML
Honary professor "NNV leerstoel industriele Natuurkunde"

Engineering & Materials Science

# Extreme Ultraviolet Lithography
# Hydrogen
# Lithography
# Thin Films

Physics & Astronomy

# Blisters
# Lithography
# Scanners

Chemistry

# Fracture Strength

Faculty of Science and Technology (TNW), XUV Optics (XUV)

Shafikov, A. (2022). Fracture behavior and characterization of free-standing metal silicide thin films. University of Twente. https://doi.org/10.3990/1.9789036554251

Shafikov, A. , van de Kruijs, R. W. E. , Benschop, J. P. H. , Schurink, B. , van den Beld, W. T. E. , Houweling, Z. S. , Kooi, B. J. , Ahmadi, M., de Graaf, S. , & Bijkerk, F. (2022). Relation between composition and fracture strength in off-stoichiometric metal silicide free-standing membranes. Intermetallics, 144, [107531]. https://doi.org/10.1016/j.intermet.2022.107531

Kizir, S. (2022). Nucleation, growth and hydrogen resistance of multi-layer graphene. University of Twente. https://doi.org/10.3990/1.9789036552820

Shafikov, A. , van de Kruijs, R. W. E. , Benschop, J. P. H. , van den Beld, W. , Houweling, S. , & Bijkerk, F. (2022). Fracture Toughness of Free-Standing ZrSiₓ Thin Films Measured Using Crack-on-a-Chip Method. Journal of microelectromechanical systems, 31(1), 63-73. https://doi.org/10.1109/JMEMS.2021.3128760

Kizir, S. , van den Beld, W. T. E. , Verbakel, J. D. , Pushkarev, R. , Houweling, Z. S. , van de Kruijs, R. W. E. , Benschop, J. P. H. , & Bijkerk, F. (2021). Hydrogen etch resistance of aluminium oxide passivated graphitic layers. Journal of physics D: applied physics, 54(50), [505304]. https://doi.org/10.1088/1361-6463/ac2200

Kizir, S. , van den Beld, W. T. E. , Schurink, B. , van de Kruijs, R. W. E. , Benschop, J. P. H. , & Bijkerk, F. (2021). Bifunctional catalytic effect of Mo₂C/oxide interface on multi-layer graphene growth. Scientific reports, 11(1), [15377]. https://doi.org/10.1038/s41598-021-94694-4

Shafikov, A. , Schurink, B. , van de Kruijs, R. W. E. , Benschop, J. P. H. , van den Beld, W. , Houweling, S. , & Bijkerk, F. (2021). Strengthening ultrathin Si₃N₄membranes by compressive surface stress. Sensors and actuators. A: Physical, 317, [112456]. https://doi.org/10.1016/j.sna.2020.112456

Shafikov, A. , van de Kruijs, R. W. E. , Schurink, B. , Benschop, J. P. H. , & Bijkerk, F. (2020). Mechanical properties of polycrystalline metal silicide thin films. Poster session presented at Physics@Veldhoven 2020, veldhoven, Netherlands.

Kizir, S. , van den Beld, W. , Schurink, B. , van de Kruijs, R. W. E. , Benschop, J. P. H. , & Bijkerk, F. (2020). The role of pinhole structures in Mo thin films on multi-layer graphene synthesis. Journal of Physics : Materials, 3(2), [025004]. https://doi.org/10.1088/2515-7639/ab6fd1

Kizir, S. , van den Beld, W. , van de Kruijs, R. W. E. , Benschop, J. P. H. , & Bijkerk, F. (2020). Increasing the catalytic activity of molybdenum carbide for graphene growth via molybdenum layer properties. Poster session presented at Physics@Veldhoven 2020, veldhoven, Netherlands.

Bachelor

Advanced Technology

+31534892863 (secretary)

j.p.h.benschop@utwente.nl

jos.benschop@asml.com

Visiting Address

University of Twente
Faculty of Science and Technology
Carré (building no. 15), room C2023
Hallenweg 23
7522NH Enschede
The Netherlands

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Mailing Address

University of Twente
Faculty of Science and Technology
Carré C2023
P.O. Box 217
7500 AE Enschede
The Netherlands

Faculty of Science and Technology (TNW), XUV Optics (XUV)

University of Twente Drienerlolaan 5
7522 NB Enschede

+31 (0)53 489 9111
info@utwente.nl
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