About Me
Senior Vice President Technology - ASML
Honary professor "NNV leerstoel industriele Natuurkunde"
Expertise
Engineering & Materials Science
# Extreme Ultraviolet Lithography
# Hydrogen
# Lithography
# Thin Films
Physics & Astronomy
# Blisters
# Lithography
# Scanners
Chemistry
# Fracture Strength
Organisations
Publications
Recent
Shafikov, A.
, van de Kruijs, R. W. E.
, Benschop, J. P. H.
, Schurink, B.
, van den Beld, W. T. E.
, Houweling, Z. S.
, Kooi, B. J.
, Ahmadi, M., de Graaf, S.
, & Bijkerk, F. (2022).
Relation between composition and fracture strength in off-stoichiometric metal silicide free-standing membranes.
Intermetallics,
144, [107531].
https://doi.org/10.1016/j.intermet.2022.107531
Kizir, S. (2022).
Nucleation, growth and hydrogen resistance of multi-layer graphene. University of Twente.
https://doi.org/10.3990/1.9789036552820
Shafikov, A.
, van de Kruijs, R. W. E.
, Benschop, J. P. H.
, van den Beld, W.
, Houweling, S.
, & Bijkerk, F. (2022).
Fracture Toughness of Free-Standing ZrSiₓ Thin Films Measured Using Crack-on-a-Chip Method.
Journal of microelectromechanical systems,
31(1), 63-73.
https://doi.org/10.1109/JMEMS.2021.3128760
Shafikov, A.
, Schurink, B.
, van de Kruijs, R. W. E.
, Benschop, J. P. H.
, van den Beld, W.
, Houweling, S.
, & Bijkerk, F. (2021).
Strengthening ultrathin Si3N4 membranes by compressive surface stress.
Sensors and actuators. A: Physical,
317, [112456].
https://doi.org/10.1016/j.sna.2020.112456
Kizir, S.
, van den Beld, W. T. E.
, Verbakel, J. D.
, Pushkarev, R.
, Houweling, Z. S.
, van de Kruijs, R. W. E.
, Benschop, J. P. H.
, & Bijkerk, F. (2021).
Hydrogen etch resistance of aluminium oxide passivated graphitic layers.
Journal of physics D: applied physics,
54(50), [505304].
https://doi.org/10.1088/1361-6463/ac2200
Kizir, S.
, van den Beld, W.
, Schurink, B.
, van de Kruijs, R. W. E.
, Benschop, J. P. H.
, & Bijkerk, F. (2020).
The role of pinhole structures in Mo thin films on multi-layer graphene synthesis.
Journal of Physics : Materials,
3(2), [025004].
https://doi.org/10.1088/2515-7639/ab6fd1
Shafikov, A.
, van de Kruijs, R. W. E.
, Schurink, B.
, Benschop, J. P. H.
, & Bijkerk, F. (2020).
Mechanical properties of polycrystalline metal silicide thin films. Poster session presented at Physics@Veldhoven 2020, veldhoven, Netherlands.
Kizir, S.
, van den Beld, W.
, van de Kruijs, R. W. E.
, Benschop, J. P. H.
, & Bijkerk, F. (2020).
Increasing the catalytic activity of molybdenum carbide for graphene growth via molybdenum layer properties. Poster session presented at Physics@Veldhoven 2020, veldhoven, Netherlands.
Kizir, S.
, van den Beld, W.
, van de Kruijs, R. W. E.
, Benschop, J. P. H.
, & Bijkerk, F. (2019).
Increasing the catalytic activity of molybdenum carbide for graphene growth via molybdenum layer properties. Poster session presented at 9th Largest European Conference & Exhibition in Graphene and 2D Materials, Graphene 2019, Rome, Italy.
Affiliated Study Programmes
Bachelor
Contact Details
Visiting Address
University of Twente
Faculty of Science and Technology
Carré
(building no. 15), room C2023
Hallenweg 23
7522NH Enschede
The Netherlands
Mailing Address
University of Twente
Faculty of Science and Technology
Carré
C2023
P.O. Box 217
7500 AE Enschede
The Netherlands