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dr. M. Berdova (Maria)

Expertise

Atomic Layer Deposition
History

Publications

Recent Articles
Ahvenniemi, E., Akbashev, A. R., Ali, S., Bechelany, M., Berdova, M., Boyadjiev, S., ... Yurkevich, O. (2016). Review article: Recommended reading list of early publications on atomic layer deposition-outcome of the "virtual project on the history of ALD". Journal of vacuum science and technology A: vacuum, surfaces, and films, 35(1), -. [010801]. DOI: 10.1116/1.4971389

UT Research Information System

Contact Details

Visiting Address

University of Twente
Drienerlolaan 5
7522 NB Enschede
The Netherlands

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Mailing Address

University of Twente
P.O. Box 217
7500 AE Enschede
The Netherlands