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dr. M. Berdova (Maria)

Expertise

Lists
Atomic Layer Epitaxy
Atomic Layer Deposition
Histories
Atomic Layer Deposition

Publications

Recent
Ahvenniemi, E., Akbashev, A. R., Ali, S., Bechelany, M., Berdova, M., Boyadjiev, S., ... Yurkevich, O. (2016). Review article: Recommended reading list of early publications on atomic layer deposition-outcome of the "virtual project on the history of ALD". Journal of vacuum science and technology A: vacuum, surfaces, and films, 35(1), -. [010801]. DOI: 10.1116/1.4971389

Contact Details

Visiting Address

University of Twente
Drienerlolaan 5
7522 NB Enschede
The Netherlands

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Mailing Address

University of Twente
P.O. Box 217
7500 AE Enschede
The Netherlands