Welcome...

prof.dr. M.C. Elwenspoek (Miko)

Scientific Staff

Expertise

Silicon
Fabrication
Temperature
Etching
Actuators
Glass
Masks
Liquids

Publications

Recent Articles
Yagubizade, H., Darvishi, M., Elwenspoek, M. C., & Tas, N. R. (2014). A UHF 4th-order band-pass filter based on contour-mode PZT-on-silicon resonators. In The 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2014) (pp. 1237-1240). USA: IEEE. DOI: 10.1109/MEMSYS.2014.6765872

UT Research Information System

Contact Details

Visiting Address

University of Twente
University College Twente
Citadel (building no. 9), room H207
Hallenweg 15
7522NH  Enschede
The Netherlands

Navigate to location

Mailing Address

University of Twente
University College Twente
Citadel  H207
P.O. Box 217
7500 AE Enschede
The Netherlands