A.A.I. Aarnink (Tom) | University of Twente

Engineering & Materials Science

# Atomic Layer Deposition
# Spectroscopic Ellipsometry
# Tungsten
# Wire

Chemistry

# Atomic Layer Epitaxy
# Liquid Film
# Tungsten

Physics & Astronomy

# Atomic Layer Epitaxy

Faculty of Electrical Engineering, Mathematics and Computer Science (EEMCS), Integrated Devices and Systems (IDS)

van der Zouw, K. , van der Wel, B. Y. , Aarnink, A. A. I. , Wolters, R. A. M. , Gravesteijn, D. J. , & Kovalgin, A. Y. (2023). Low-resistivity molybdenum obtained by atomic layer deposition. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 41(5), Article 052402. https://doi.org/10.1116/6.0002804

Apaydin, R. O. , Aarnink, A. A. I. , Gravesteijn, D. J. , De Jong, M. P. , & Kovalgin, A. Y. (2023). Thin-film (Al)BCN materials synthesized by sequential precursor pulses to mimic atomic layer deposition. AIP advances, 13(2), Article 025237. https://doi.org/10.1063/6.0002331

Thammaiah, S. D. , Liu, X., Knežević, T. , Batenburg, K. M. , Aarnink, A. A. I. , & Nanver, L. K. (2021). PureB diode fabrication using physical or chemical vapor deposition methods for increased back-end-of-line accessibility. Solid-state electronics, 177, Article 107938. Advance online publication. https://doi.org/10.1016/j.sse.2020.107938

Apaydin, R. O. , Onnink, A. J. , Liu, X. , Aarnink, A. A. I. , de Jong, M. P. , Gravesteijn, D. J. , & Kovalgin, A. Y. (2020). Comparative study of thermal and radical-enhanced methods for growing boron nitride films from diborane and ammonia. Journal of vacuum science and technology A: vacuum, surfaces, and films, 38(3), Article 033411. https://doi.org/10.1116/6.0000132

Onnink, A. J. , Apaydin, R. O. , Aarnink, A. A. I. , de Jong, M. P. , Gravesteijn, D. J. , & Kovalgin, A. Y. (2020). Study of the phase nature of boron- and nitrogen-containing films by optical and photoelectron spectroscopy. Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics, 38(4), Article 044009. https://doi.org/10.1116/6.0000193

van der Zouw, K. , Aarnink, A. A. I. , Schmitz, J. , & Kovalgin, A. Y. (2020). Conduction and electric field effect in ultra-thin tungsten films. IEEE Transactions on Semiconductor Manufacturing, 33(2), 202-209. Article 9016070. Advance online publication. https://doi.org/10.1109/TSM.2020.2976886

Banerjee, S. , Aarnink, A. , & Kovalgin, A. (2020). Method of forming a device structure using selective deposition of gallium nitride and system for same. (Patent No. 62/779684). https://www.freepatentsonline.com/y2020/0194253.html

Sturm, J. M. , Liu, F., Darlatt, E., Kolbe, M. , Aarnink, A. A. I. , Lee, C. J. , & Bijkerk, F. (2019). Extreme UV secondary electron yield measurements of Ru, Sn, and Hf oxide thin films. Journal of Micro/ Nanolithography, MEMS, and MOEMS, 18(3), Article 033501. https://doi.org/10.1117/1.JMM.18.3.033501

Banerjee, S. , Aarnink, A. A. I. , Gravesteijn, D. J. , & Kovalgin, A. Y. (2019). Thermal Atomic Layer Deposition of Polycrystalline Gallium Nitride. The Journal of physical chemistry C, 123(37), 23214-23225. https://doi.org/10.1021/acs.jpcc.9b05946

van der Zouw, K. , Aarnink, A. A. I. , Schmitz, J. , & Kovalgin, A. Y. (2019). Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films. In 2019 IEEE 32nd International Conference on Microelectronic Test Structures, ICMTS 2019 (pp. 48-53). Article 8730954 IEEE. https://doi.org/10.1109/ICMTS.2019.8730954

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a.a.i.aarnink@utwente.nl

Visiting Address

University of Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Carré (building no. 15), room C2615
Hallenweg 21
7522NH Enschede
The Netherlands

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Mailing Address

University of Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Carré C2615
P.O. Box 217
7500 AE Enschede
The Netherlands

Faculty of Electrical Engineering, Mathematics and Computer Science (EEMCS), Integrated Devices and Systems (IDS)

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University of Twente Drienerlolaan 5
7522 NB Enschede

+31 (0)53 489 9111
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