Expertise
Engineering & Materials Science
# Atomic Layer Deposition
# Spectroscopic Ellipsometry
# Tungsten
# Wire
Chemistry
# Atomic Layer Epitaxy
# Liquid Film
# Tungsten
Physics & Astronomy
# Atomic Layer Epitaxy
Organisations
Publications
Recent
van der Zouw, K.
, van der Wel, B. Y.
, Aarnink, A. A. I.
, Wolters, R. A. M.
, Gravesteijn, D. J.
, & Kovalgin, A. Y. (2023).
Low-resistivity molybdenum obtained by atomic layer deposition.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films,
41(5), Article 052402.
https://doi.org/10.1116/6.0002804
Thammaiah, S. D.
, Liu, X., Knežević, T.
, Batenburg, K. M.
, Aarnink, A. A. I.
, & Nanver, L. K. (2021).
PureB diode fabrication using physical or chemical vapor deposition methods for increased back-end-of-line accessibility.
Solid-state electronics,
177, Article 107938. Advance online publication.
https://doi.org/10.1016/j.sse.2020.107938
Apaydin, R. O.
, Onnink, A. J.
, Liu, X.
, Aarnink, A. A. I.
, de Jong, M. P.
, Gravesteijn, D. J.
, & Kovalgin, A. Y. (2020).
Comparative study of thermal and radical-enhanced methods for growing boron nitride films from diborane and ammonia.
Journal of vacuum science and technology A: vacuum, surfaces, and films,
38(3), Article 033411.
https://doi.org/10.1116/6.0000132
Onnink, A. J.
, Apaydin, R. O.
, Aarnink, A. A. I.
, de Jong, M. P.
, Gravesteijn, D. J.
, & Kovalgin, A. Y. (2020).
Study of the phase nature of boron- and nitrogen-containing films by optical and photoelectron spectroscopy.
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics,
38(4), Article 044009.
https://doi.org/10.1116/6.0000193
van der Zouw, K.
, Aarnink, A. A. I.
, Schmitz, J.
, & Kovalgin, A. Y. (2020).
Conduction and electric field effect in ultra-thin tungsten films.
IEEE Transactions on Semiconductor Manufacturing,
33(2), 202-209. Article 9016070. Advance online publication.
https://doi.org/10.1109/TSM.2020.2976886
Sturm, J. M.
, Liu, F., Darlatt, E., Kolbe, M.
, Aarnink, A. A. I.
, Lee, C. J.
, & Bijkerk, F. (2019).
Extreme UV secondary electron yield measurements of Ru, Sn, and Hf oxide thin films.
Journal of Micro/ Nanolithography, MEMS, and MOEMS,
18(3), Article 033501.
https://doi.org/10.1117/1.JMM.18.3.033501
Banerjee, S.
, Aarnink, A. A. I.
, Gravesteijn, D. J.
, & Kovalgin, A. Y. (2019).
Thermal Atomic Layer Deposition of Polycrystalline Gallium Nitride.
The Journal of physical chemistry C,
123(37), 23214-23225.
https://doi.org/10.1021/acs.jpcc.9b05946
van der Zouw, K.
, Aarnink, A. A. I.
, Schmitz, J.
, & Kovalgin, A. Y. (2019).
Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films. In
2019 IEEE 32nd International Conference on Microelectronic Test Structures, ICMTS 2019 (pp. 48-53). Article 8730954 IEEE.
https://doi.org/10.1109/ICMTS.2019.8730954
UT Research Information System
Contact Details
Visiting Address
University of Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Carré
(building no. 15), room C2615
Hallenweg 21
7522NH Enschede
The Netherlands
Mailing Address
University of Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Carré
C2615
P.O. Box 217
7500 AE Enschede
The Netherlands