Publications
2026
Realization of Pure Boron/Si Diodes Through a Two-Step Low-Temperature Growth in a Home-Built LP CVD System (2026)Journal of the Electron Devices Society, 14, 176-185. Vu, T. T. H., Batenburg, K. M., Aarnink, A. A. I., Wu, W., Kovalgin, A. Y., Gravesteijn, D. J. & Hueting, R. J. E.https://doi.org/10.1109/JEDS.2026.3667184
2025
Chemisorption of H radical generated volatile Si hydrides on Ru films (2025)Surfaces and Interfaces, 78. Article 107956. Gaffarov, I., van der Zouw, K., Aarnink, T., Sturm, J. M., Makhotkin, I. A. & Ackermann, M.https://doi.org/10.1016/j.surfin.2025.107956Area-Selective Low-Pressure Thermal Atomic Layer Deposition of Gallium Nitride (2025)ACS Omega, 10(45), 53874-53886. van der Wel, B. Y., van der Zouw, K., Aarnink, A. A. I. & Kovalgin, A. Y.https://doi.org/10.1021/acsomega.5c03453Highly Reactive Atomic Hydrogen as an Alternative Reactant for Atomic Layer Deposition of Platinum Using MeCpPtMe3 (2025)The Journal of physical chemistry C, 129(30), 13822-13829. Van Bui, H., Grillo, F., Nguyen, D. M., Dang, M. D., Aarnink, A. A. I., Wolters, R. A. M., van Ommen, J. R. & Kovalgin, A. Y.https://doi.org/10.1021/acs.jpcc.5c03286Metallic molybdenum obtained by atomic layer deposition from Mo(CO)6 (2025)Journal of vacuum science & technology A: vacuum, surfaces, and films, 43(2). Article 022407. van der Zouw, K., van der Wel, B. Y., Sturm, J. M., Aarnink, A. A. I., Wolters, R. A. M., Gravesteijn, D. J. & Kovalgin, A. Y.https://doi.org/10.1116/6.0004244
2024
Electrical behavior of ALD-molybdenum films in the thin-film limit (2024)In 2024 IEEE 36th International Conference on Microelectronic Test Structures, ICMTS 2024 - Proceedings (IEEE International Conference on Microelectronic Test Structures). IEEE. Van Der Zouw, K., Dulfer, S. D., Aarnink, A. A. I. & Kovalgin, A. Y.https://doi.org/10.1109/ICMTS59902.2024.10520676Tuning Nanopores in Tubular Ceramic Nanofiltration Membranes with Atmospheric-Pressure Atomic Layer Deposition: Prospects for Pressure-Based In-Line Monitoring of Pore Narrowing (2024)Separations, 11(1). Article 24. Nijboer, M., Jan, A., Chen, M., Batenburg, K., Peper, J., Aarnink, T., Roozeboom, F., Kovalgin, A., Nijmeijer, A. & Luiten-Olieman, M.https://doi.org/10.3390/separations11010024From hot wire to cold finger:methods to detect the unstable product SnH4 of Sn etching (2024)[Contribution to conference › Poster] E-MRS Spring Meeting 2024. Onnink, A., Aarnink, A. A. I., Schmitz, J. & Kovalgin, A.
2023
Low-resistivity molybdenum obtained by atomic layer deposition (2023)Journal of vacuum science & technology A: vacuum, surfaces, and films, 41(5). Article 052402. van der Zouw, K., van der Wel, B. Y., Aarnink, A. A. I., Wolters, R. A. M., Gravesteijn, D. J. & Kovalgin, A. Y.https://doi.org/10.1116/6.0002804Area-Selective Low-Pressure Thermal Atomic Layer Deposition of Aluminum Nitride (2023)The Journal of physical chemistry C, 127(34), 17134-17145. van der Wel, B. Y., van der Zouw, K., Aarnink, A. A. I. & Kovalgin, A. Y.https://doi.org/10.1021/acs.jpcc.3c03063
Research profiles
Address
University of Twente
Carré (building no. 15), room C2615
Hallenweg 23
7522 NH Enschede
Netherlands
University of Twente
Carré C2615
P.O. Box 217
7500 AE Enschede
Netherlands
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