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A.A.I. Aarnink (Tom)

Senior Process Engineer

Expertise

Engineering & Materials Science
Atomic Layer Deposition
Spectroscopic Ellipsometry
Tungsten
Wire
Chemistry
Atomic Layer Epitaxy
Liquid Film
Tungsten
Physics & Astronomy
Atomic Layer Epitaxy

Publications

Recent
van der Zouw, K. , Aarnink, A. A. I. , Schmitz, J. , & Kovalgin, A. Y. (2020). Conduction and electric field effect in ultra-thin tungsten films. IEEE Transactions on Semiconductor Manufacturing, 33(2), 202-209. Article 9016070. Advance online publication. https://doi.org/10.1109/TSM.2020.2976886
van der Zouw, K. , Aarnink, A. A. I. , Schmitz, J. , & Kovalgin, A. Y. (2019). Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films. In 2019 IEEE 32nd International Conference on Microelectronic Test Structures, ICMTS 2019 (pp. 48-53). Article 8730954 IEEE. https://doi.org/10.1109/ICMTS.2019.8730954

UT Research Information System

Contact Details

Visiting Address

University of Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Carré (building no. 15), room C2615
Hallenweg 21
7522NH  Enschede
The Netherlands

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Mailing Address

University of Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Carré  C2615
P.O. Box 217
7500 AE Enschede
The Netherlands

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