I joined XUV Optics in 2017 as a PhD student and in 2022 I defended my thesis on the topic "Fracture behavior and characterization of free-standing metal silicide thin films". After obtaining PhD, I stayed at XUV as a postdoc to study interaction of surfaces with plasma under supervision of Marcelo Ackermann and Marko Sturm.
Expertise
Material Science
- Thin Films
- Membrane
- Fracture Toughness
- Mechanical Strength
- Metal
- Silicide
- Silicon Nitride
- Crack
Organisations
Publications
2022
Fracture behavior and characterization of free-standing metal silicide thin films. University of Twente. Shafikov, A.https://doi.org/10.3990/1.9789036554251Relation between composition and fracture strength in off-stoichiometric metal silicide free-standing membranes, Article 107531. Shafikov, A., van de Kruijs, R. W. E., Benschop, J. P. H., Schurink, B., van den Beld, W. T. E., Houweling, Z. S., Kooi, B. J., Ahmadi, M., de Graaf, S. & Bijkerk, F.https://doi.org/10.1016/j.intermet.2022.107531Fracture Toughness of Free-Standing ZrSiₓ Thin Films Measured Using Crack-on-a-Chip Method, 63-73. Shafikov, A., van de Kruijs, R. W. E., Benschop, J. P. H., van den Beld, W., Houweling, S. & Bijkerk, F.https://doi.org/10.1109/JMEMS.2021.3128760
2021
Strengthening ultrathin Si3N4 membranes by compressive surface stress, Article 112456. Shafikov, A., Schurink, B., van de Kruijs, R. W. E., Benschop, J. P. H., van den Beld, W., Houweling, S. & Bijkerk, F.https://doi.org/10.1016/j.sna.2020.112456
2020
Pellicle for EUV lithograpy. Shafikov, A., Bijkerk, F., Schurink, B., Sturm, M. & van de Kruijs, R. W. E.Mechanical properties of polycrystalline metal silicide thin films. Shafikov, A., van de Kruijs, R. W. E., Schurink, B., Benschop, J. P. H. & Bijkerk, F.
2019
Improving strength of LPCDV Si3N4 freestanding thin films by nanometer thick compressive adlayer. Shafikov, A., Schurink, B., van de Kruijs, R. W. E. & Bijkerk, F.
Research profiles
Address
University of Twente
Carré (building no. 15), room C2029
Hallenweg 23
7522 NH Enschede
Netherlands
University of Twente
Carré C2029
P.O. Box 217
7500 AE Enschede
Netherlands
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