A. Shafikov (Airat) | University of Twente

Chemistry

# Fracture Strength

Engineering & Materials Science

# Fracture Toughness
# Membranes
# Silicides
# Thin Films

Physics & Astronomy

# Fracture Strength
# Membranes
# Thin Films

Faculty of Science and Technology (TNW), XUV Optics (XUV)

Shafikov, A. (2022). Fracture behavior and characterization of free-standing metal silicide thin films. [PhD Thesis - Research UT, graduation UT, University of Twente]. University of Twente. https://doi.org/10.3990/1.9789036554251

Shafikov, A. , van de Kruijs, R. W. E. , Benschop, J. P. H. , Schurink, B. , van den Beld, W. T. E. , Houweling, Z. S. , Kooi, B. J. , Ahmadi, M., de Graaf, S. , & Bijkerk, F. (2022). Relation between composition and fracture strength in off-stoichiometric metal silicide free-standing membranes. Intermetallics, 144, [107531]. https://doi.org/10.1016/j.intermet.2022.107531

Shafikov, A. , van de Kruijs, R. W. E. , Benschop, J. P. H. , van den Beld, W. , Houweling, S. , & Bijkerk, F. (2022). Fracture Toughness of Free-Standing ZrSiₓ Thin Films Measured Using Crack-on-a-Chip Method. Journal of microelectromechanical systems, 31(1), 63-73. https://doi.org/10.1109/JMEMS.2021.3128760

Shafikov, A. , Schurink, B. , van de Kruijs, R. W. E. , Benschop, J. P. H. , van den Beld, W. , Houweling, S. , & Bijkerk, F. (2021). Strengthening ultrathin Si₃N₄membranes by compressive surface stress. Sensors and actuators. A: Physical, 317, [112456]. https://doi.org/10.1016/j.sna.2020.112456

Shafikov, A. , van de Kruijs, R. W. E. , Schurink, B. , Benschop, J. P. H. , & Bijkerk, F. (2020). Mechanical properties of polycrystalline metal silicide thin films. Poster session presented at Physics@Veldhoven 2020, veldhoven, Netherlands.

Shafikov, A. , Bijkerk, F. , Schurink, B. , Sturm, M. , & van de Kruijs, R. W. E. (2020). Pellicle for EUV lithograpy. (Patent No. NL2025186).

Shafikov, A. , Schurink, B. , van de Kruijs, R. W. E. , & Bijkerk, F. (2019). Improving strength of LPCDV Si3N4 freestanding thin films by nanometer thick compressive adlayer. Poster session presented at Nanomechanical testing in materials research and development VII 2019, Malaga, Spain.

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a.shafikov@utwente.nl

airat.shafikov@gmail.com

Visiting Address

University of Twente
Faculty of Science and Technology
Carré (building no. 15), room C2029
Hallenweg 23
7522NH Enschede
The Netherlands

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Mailing Address

University of Twente
Faculty of Science and Technology
Carré C2029
P.O. Box 217
7500 AE Enschede
The Netherlands

Faculty of Science and Technology (TNW), XUV Optics (XUV)

University of Twente Drienerlolaan 5
7522 NB Enschede

+31 (0)53 489 9111
info@utwente.nl
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