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A.Y. Kovalgin (Alexey)

Associate Professor

Expertise

Temperature
Silicon
Oxides
Metals
Plasmas
Electrodes
Silicon
Oxidation

Publications

Recent Articles
Banerjee, S., van der Velde, F. J., Yang, M., Schmitz, J., & Kovalgin, A. Y. (2017). Electrical test structures for verifying continuity of ultra-thin insulating and conducting films. In Electrical test structures for verifying continuity of ultra-thin insulating and conducting films (pp. 1-6). IEEE. DOI: 10.1109/ICMTS.2017.7954258
Kovalgin, A. Y. (2016). Hot-wire assisted ALD: from idea to realization. In All Abstracts & Biographies SEMICON EUROPA (pp. -). Grenoble, France: SEMI Europe.
Kovalgin, A. Y. (2016). High-quality tungsten films by hotwire-assisted CVD/ALD at low temperature. In Abstracts Hot Wire CVD 9 (pp. 16-16). Philadelphia, PA, USA: HWCVD9.

UT Research Information System

Contact Details

Visiting Address

University of Twente
Faculty of Electrical Engineering, Mathematics & Computer Science
Carré (building no. 15), room 2609
Hallenweg 23
7522NH  Enschede
The Netherlands

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Mailing Address

University of Twente
Faculty of Electrical Engineering, Mathematics & Computer Science
Carré  2609
P.O. Box 217
7500 AE Enschede
The Netherlands