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dr.ir. C. Salm (Cora)

Lecturer

Expertise

Detectors
Temperature
Oxides
Electromigration
Metals
Silicon
Plasmas
Imaging Techniques

Publications

Recent Articles
Wang, J., Bielen, J., Salm, C., & Schmitz, J. (2016). Spring-constant measurement methods for RF-MEMS capacitive switches. In 2016 International Conference on Microelectronic Test Structures (ICMTS) (pp. 10-14). USA: IEEE. DOI: 10.1109/ICMTS.2016.7476164
van der Graaf, H., Aarnink, A. A. I., Aarts, A., van Bakel, N., Berbee, E., Berkien, A., ... Wyrsch, N. (2013). The gridpix detector: History and perspective. Modern physics letters. A, 28(28-13), 13400211-13400217. DOI: 10.1142/S021773231340021X
Kazmi, S. N. R., Salm, C., & Schmitz, J. (2013). Cryogenic reactive ion etching of in-situ highly boron doped LPCVD poly Si0.3Ge0.7 using SF6 and O2 plasma. In 38th International Conference on Micro and Nano Engineering (pp. 311-314). (Microelectronic Engineering; Vol. 110). Amsterdam: ELSEVIER. DOI: 10.1016/j.mee.2013.02.034
Wang, J., Salm, C., & Schmitz, J. (2013). Comparison of C-V measurement methods for RF-MEMS capacitive switches. In IEEE International Conference on Microelectronic Test Structures, ICMTS 2013 (pp. 53-58). USA: IEEE Electron Devices Society. DOI: 10.1109/ICMTS.2013.6528145

UT Research Information System

Contact Details

Visiting Address

University of Twente
Faculty of Electrical Engineering, Mathematics & Computer Science
Carré (building no. 15), room 2611
Hallenweg 23
7522NH  Enschede
The Netherlands

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Mailing Address

University of Twente
Faculty of Electrical Engineering, Mathematics & Computer Science
Carré  2611
P.O. Box 217
7500 AE Enschede
The Netherlands