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Recent
Zeng, Y.
, Groenesteijn, J.
, Alveringh, D.
, Wiegerink, R. J.
, & Lötters, J. C. (2021).
Design, Fabrication, and Characterization of a Micro Coriolis Mass Flow Sensor Driven by PZT Thin Film Actuators.
Journal of microelectromechanical systems,
30(6), 885-896.
https://doi.org/10.1109/JMEMS.2021.3107744
Lötters, J. C.
, Groenesteijn, J.
, Steenwelle, R. J. A.
, Wiegerink, R. J.
, Alveringh, D.
, Ma, K.
, & Zeng, Y. (2019).
Coriolis flow sensor. (Patent No.
WO2019143239A8).
Alveringh, D.
, Wiegerink, R. J.
, & Lotters, J. C. (2018).
Inline relative permittivity sensing using silicon electrodes realized in surface channel technology. In
2018 IEEE Micro Electro Mechanical Systems, MEMS 2018: the 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, Belfast, Northern Ireland, 21-25 January 2018 (pp. 840-843). (International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2018-January). IEEE.
https://doi.org/10.1109/MEMSYS.2018.8346686
Schut, T. V. P.
, Alveringh, D.
, Sparreboom, W.
, Groenesteijn, J.
, Wiegerink, R. J.
, & Lötters, J. C. (2018).
Fully integrated mass flow, pressure, density and viscosity sensor for both liquids and gases. In
2018 IEEE Micro Electro Mechanical Systems (pp. 218-221). IEEE.
https://doi.org/10.1109/MEMSYS.2018.8346523
Alveringh, D. (2018).
Integrated throughflow mechanical microfluidic sensors. University of Twente.
https://doi.org/10.3990/1.9789036545150
Zeng, Y.
, Groenesteijn, J.
, Alveringh, D.
, Steenwelle, R. J. A.
, Ma, K.
, Wiegerink, R. J.
, & Lötters, J. C. (2018).
Micro Coriolis mass flow sensor driven by integrated PZT thin film actuators. Paper presented at 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, Belfast, United Kingdom.
Alveringh, D.
, Wiegerink, R. J.
, Groenesteijn, J.
, Sanders, R. G. P.
, & Lötters, J. C. (2018).
Experimental analysis of thermomechanical noise in micro Coriolis mass flow sensors.
Sensors and actuators. A: Physical,
271, 212-216.
https://doi.org/10.1016/j.sna.2018.01.024
Zeng, Y.
, Groenesteijn, J.
, Alveringh, D.
, Wiegerink, R. J.
, & Lötters, J. C. (2017).
Micro Coriolis mass flow sensor driven by external piezo ceramic. 45-48. Paper presented at 3rd Conference on MicroFluidic Handling Systems, MFHS 2017, Enschede, Netherlands.
Alveringh, D.
, Sanders, R. G. P.
, Groenesteijn, J.
, Lammerink, T. S. J.
, Wiegerink, R. J.
, & Lötters, J. C. (2017).
Universal modular fluidic and electronic interfacing platform for microfluidic devices. In
Proceedings of the 3rd Conference on MicroFluidic Handling Systems, MFHS 2017 (pp. 106-109)
Alveringh, D., Schut, T.
, Wiegerink, R. J.
, Sparreboom, W.
, & Lötters, J. C. (2017).
Resistive pressure sensors integrated with a Coriolis mass flow sensor. In
TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 1167-1170). IEEE.
https://doi.org/10.1109/TRANSDUCERS.2017.7994261
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C2609
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7500 AE Enschede
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