I started my Ph.D. in 2023 at the University of Twente (UT) in The Netherlands. The project I am working on is called INSPEXT. During extreme ultra violet light (EUV) exposure, free standing thin films are physically and chemically degraded. The exact mechanisms are not yet known, thus this PhD project will investigate this phenomenon to gain an understanding into this. The focus of this project is specifically on in-situ EUV transmission measurements.
Expertise
Engineering
- Metal Atom
- Photoelectron
- Resistance Degradation
Material Science
- Lithography
- Reflectivity
- Transition Metal Oxide
- Oxidation Reaction
Physics
- Transition Metal
Organisations
Publications
2024
Investigating EUV degradation with in-situ EUV transmission measurements (2024)[Contribution to conference › Poster] 16th BESSY@HZB User Meeting 2024. Ramsamoedj, D. C., Ackermann, M. & van den Beld, W.Investigating EUV degradation with in-situ EUV transmission measurements (2024)[Contribution to conference › Poster] EUV Source Workshop 2024. Ramsamoedj, D. C., Ackermann, M. & van den Beld, W.Investigating EUV degradation with in-situ EUV transmission measurements (2024)[Contribution to conference › Poster] ASML PhD and Postdoc networking event. Ramsamoedj, D. C., van den Beld, W. & Ackermann, M.
Research profiles
Address
University of Twente
Carré (building no. 15), room C2029
Hallenweg 23
7522 NH Enschede
Netherlands
University of Twente
Carré C2029
P.O. Box 217
7500 AE Enschede
Netherlands
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