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Expertise
Material Science
- Thin Films
- Film
- Piezoelectricity
- Ferroelectric Material
- Capacitor
- Silicon
- Pulsed Laser Deposition
- Ferroelectricity
Organisations
- Ferroelectric thin-films: epitaxial- and textured Pb(Zr,Ti)O3 and Ba(Sr,Ti)O3 thin films.
- Multiferroics thin-films: epitaxial BiFeO3 and Pb(Zr,Ti)O3/La(Sr,Mn)O3 thin films.
- Heterolayered structure and Doping thin films.
- Thin-film orientation control.
- Interfacial layers.
- Ferroelectric thin-film fabrications: Pulsed laser deposition and Sol-gel spin coating.
- Piezoelectric devices: Micro-diaphragms and Micro-cantilevers for micro-fluidic pumps and micro-biosensors applications; High-resonance frequency resonators for sonar applications.
Mass-sensors based on piezoelectric thin-film cantilevers
Publications
2026
Growth of perovskite oxide films on epitaxial TiN-layer buffered Si for applications in piezoelectric microelectromechanical systems (2026)Thin solid films, 851. Article 141038. Nguyen, M. D. & Rijnders, G.https://doi.org/10.1016/j.tsf.2026.141038Sezawa-Mode Surface Acoustic Wave Resonators in Pulsed-Laser-Deposited Pb0.9Ba0.1(Zr0.52,Ti0.48)O3 on Bulk Silicon (2026)Micromachines, 17(7). Article 868. Janssens, Y., Berenschot, E., Nguyen, D. M. & Tas, N.https://doi.org/10.3390/mi17070868Controlling the crystallinity of Aurivillius Bi4Ti3O12 films for energy storage applications (2026)Journal of the European Ceramic Society, 46(6). Article 118076. Nguyen, M. D., Vu, T. V., Ho, T. H., Tong, H. D. & Rijnders, G.https://doi.org/10.1016/j.jeurceramsoc.2025.118076
2025
Impact of annealing on low-loss sputtered aluminum nitride: insights from optics to advanced material characterization (2025)OSA Continuum, 4(11), 2683-2694. Article 572281. Mardani, S., Hendriks, W. A. P. M., Dijkstra, M., Nguyen, M. D. & García-Blanco, S. M.https://doi.org/10.1364/OPTCON.572281Wafer-Scale Aluminium Scandium Nitride (AlScN) by Pulsed Laser Deposition: From Growth to Devices (2025)[Contribution to conference › Poster] MESA+ Meeting 2025. Hasan, M. M., van Slooten, J. I., Nickel, T., Nguyen, D. M., Koster, G. & Rijnders, A. J. H. M.Energy storage performance of all-oxide lead-free thin-film capacitors on mica-flexible substrates (2025)Journal of alloys and compounds, 1040. Article 183434. Nguyen, M. D., Vu, T. V., Vu, H. N. & Rijnders, G.https://doi.org/10.1016/j.jallcom.2025.183434Mechanistic Insights Into Proton and Oxygen Transport Through Ultrathin Amorphous Al2O3 and Al2O3-SiO2 Electrocatalyst Overlayers (2025)Advanced materials interfaces, 12(13). Article 2400846. Leon‐Chaparro, D., Nguyen, M. D., Baeumer, C., Mul, G. & Katsoukis, G.https://doi.org/10.1002/admi.202400846Mechanistic Insights Into Proton and Oxygen Transport Through Ultrathin Amorphous Al2O3 and Al2O3-SiO2 Electrocatalyst Overlayers (Adv. Mater. Interfaces 13/2025) (2025)Advanced materials interfaces, 12(13), Back Cover. Article e70055. Leon‐Chaparro, D., Nguyen, M. D., Baeumer, C., Mul, G. & Katsoukis, G.https://doi.org/10.1002/admi.70055Energy storage performance of silicon-integrated Sr0.98Mn0.02TiO3 thin film capacitors (2025)Materials chemistry and physics, 332. Article 130290. Nguyen, M. D., Vo, D. D., Vu, T. V. & Houwman, E. P.https://doi.org/10.1016/j.matchemphys.2024.130290
2024
Breakdown strength and energy storage properties of epitaxial lead-based relaxor-ferroelectric films over a wide range of film thickness (2024)Ceramics international, 50(24, Part B), 54529-54535. Nguyen, M. D., Vu, H. N. & Rijnders, G.https://doi.org/10.1016/j.ceramint.2024.10.310
Research profiles
Courses academic year 2026/2027
Courses in the current academic year are added at the moment they are finalised in the Osiris system. Therefore it is possible that the list is not yet complete for the whole academic year.
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