Ertuğ Şimşek received the B.S. degree in Mechanical Engineering and the M.Sc. degree in Micro and Nanotechnology from Middle East Technical University (METU), Turkey. He is currently working toward the Ph.D. degree at the University of Twente, the Netherlands. His research focuses on piezoelectric materials for extreme ultraviolet (EUV) lithography applications. His research interests include the design, simulation, fabrication, and characterization of micromachined devices.
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Organisations
Publications
2023
Active Wafer Table Based on Piezoelectric Thin Films (2023)[Contribution to conference › Poster] NWO Physics 2023. Şimşek, E., Vries, S. E., Jansen, B., Steur, M., Bijkerk, F., Bayraktar, M. & Ackermann, M.Bottom Electrode Optimization for Piezoelectric Thin Film Based Active Wafer Tables (2023)[Contribution to conference › Poster] MESA+ Meeting 2023. Şimşek, E., Jansen, B., Bayraktar, M. & Ackermann, M.
Research profiles
Address
University of Twente
Carré (building no. 15), room C3209
Hallenweg 23
7522 NH Enschede
Netherlands
University of Twente
Carré C3209
P.O. Box 217
7500 AE Enschede
Netherlands
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