Ertuğ Şimşek received the B.S. degree in Mechanical Engineering and the M.Sc. degree in Micro and Nanotechnology. He is currently working toward the Ph.D. degree at the University of Twente, the Netherlands. His research focuses on piezoelectric materials for extreme ultraviolet (EUV) lithography applications. His research interests include the design, simulation, fabrication, and characterization of micromachined devices.
.
Expertise
Agricultural and Biological Sciences
- Actuator
Material Science
- Piezoelectricity
- Thin Films
- Film
- Lithography
- Physical Vapor Deposition
Engineering
- Correction Capability
Organisations
Publications
2026
Active substrate support using piezoelectric thin films (2026)Proceedings of SPIE - the international society for optical engineering, 13981. Şimşek, E., Jansen, B., Ackermann, M. & Bayraktar, M.https://doi.org/10.1117/12.3087271
2025
Templated Pb(Zr,Ti)O3 growth using seed layers (2025)[Contribution to conference › Poster] International Workshop on 11th Piezoelectric MEMS, PiezoMEMS 2025. Repecaud, P.-A. F., Şimşek, E. & Bayraktar, M.Towards First Ever Active Wafer Support Based on Piezoelectric Thin Films (2025)[Contribution to conference › Poster] ASML Technology Conference 2025. Şimşek, E., Jansen, B., Ackermann, M. & Bayraktar, M.
2023
Active Wafer Table Based on Piezoelectric Thin Films (2023)[Contribution to conference › Poster] NWO Physics 2023. Şimşek, E., Vries, S. E., Jansen, B., Steur, M., Bijkerk, F., Bayraktar, M. & Ackermann, M.Bottom Electrode Optimization for Piezoelectric Thin Film Based Active Wafer Tables (2023)[Contribution to conference › Poster] MESA+ Meeting 2023. Şimşek, E., Jansen, B., Bayraktar, M. & Ackermann, M.
Research profiles
Address
University of Twente
Carré (building no. 15), room C3209
Hallenweg 23
7522 NH Enschede
Netherlands
University of Twente
Carré C3209
P.O. Box 217
7500 AE Enschede
Netherlands
Scan the QR code or