Expertise
Physics & Astronomy
# Lithography
# Mirrors
# Optics
# Reflectance
# Thin Films
# Wavelengths
Engineering & Materials Science
# Multilayers
Chemistry
# Multilayer
Organisations
Publications
Recent
Chen, J.
, Louis, E., Harmsen, R., Tsarfati, T.
, Wormeester, H., van Kampen, M., van Schaik, W.
, van de Kruijs, R.
, & Bijkerk, F. (2022).
Corrigendum to “In situ ellipsometry study of atomic hydrogen etching of extreme ultraviolet induced carbon layers” [Appl. Surf. Sci. 258(1) (2011) 7–12, (S0169433211011883), (10.1016/j.apsusc.2011.07.121)].
Applied surface science, [155765].
https://doi.org/10.1016/j.apsusc.2022.155765
Chandrasekaran, A. (2022).
Surface and interface diffusion processes in nanoscale thin films. [PhD Thesis - Research UT, graduation UT, University of Twente]. University of Twente.
https://doi.org/10.3990/1.9789036554763
Shafikov, A. (2022).
Fracture behavior and characterization of free-standing metal silicide thin films. [PhD Thesis - Research UT, graduation UT, University of Twente]. University of Twente.
https://doi.org/10.3990/1.9789036554251
Phadke, P.
, Zameshin, A. A.
, Sturm, J. M.
, van de Kruijs, R. W. E.
, & Bijkerk, F. (2022).
Sputter yields of monoatomic solids by Ar and Ne ions near the threshold: A Bayesian analysis of the Yamamura Model.
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms,
520, 29-39.
https://doi.org/10.1016/j.nimb.2022.03.016
Shafikov, A.
, van de Kruijs, R. W. E.
, Benschop, J. P. H.
, Schurink, B.
, van den Beld, W. T. E.
, Houweling, Z. S.
, Kooi, B. J.
, Ahmadi, M., de Graaf, S.
, & Bijkerk, F. (2022).
Relation between composition and fracture strength in off-stoichiometric metal silicide free-standing membranes.
Intermetallics,
144, [107531].
https://doi.org/10.1016/j.intermet.2022.107531
Kizir, S. (2022).
Nucleation, growth and hydrogen resistance of multi-layer graphene. [PhD Thesis - Research UT, graduation UT, University of Twente]. University of Twente.
https://doi.org/10.3990/1.9789036552820
Shafikov, A.
, van de Kruijs, R. W. E.
, Benschop, J. P. H.
, van den Beld, W.
, Houweling, S.
, & Bijkerk, F. (2022).
Fracture Toughness of Free-Standing ZrSiₓ Thin Films Measured Using Crack-on-a-Chip Method.
Journal of microelectromechanical systems,
31(1), 63-73.
https://doi.org/10.1109/JMEMS.2021.3128760
Shavikof, A.
, Bijkerk, F.
, Schurink, B.
, Sturm, J. M.
, & van de Kruijs, R. W. E. (2021).
PELLICLE FOR EUV LITHOGRAPHY. (Patent No.
CN113646697).
UT Research Information System
Courses Academic Year 2022/2023
Courses in the current academic year are added at the moment they are finalised in the Osiris system. Therefore it is possible that the list is not yet complete for the whole academic year.
Courses Academic Year 2021/2022
Contact Details
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Mailing Address
University of Twente
Faculty of Science and Technology
Carré
C2025
P.O. Box 217
7500 AE Enschede
The Netherlands