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prof.dr. F. Bijkerk (Fred)

Full Professor and Programme Leader Industrial Focus Group XUV Optics

Expertise

Wavelengths
Reflectance
Mirrors
X Rays
Thin Films
Optics
Lithography
Multilayers

Publications

Recent
Stilhano Vilas Boas, C. R., Sturm, J. M., & Bijkerk, F. (2018). Isotopic labelling study of oxygen diffusion in oxide thin films by low energy ion scattering. Poster session presented at 14th International Conference on Diffusion in Solids and Liquids 2018, Amsterdam, Netherlands.
Dolgov, A., Lee, C. J., Bijkerk, F., Abrikosov, A., Krivtsun, V. M., Lopaev, D., ... van Kampen, M. (2018). Plasma-assisted oxide removal from ruthenium-coated EUV optics. Journal of applied physics, 123(15), [153301]. DOI: 10.1063/1.5006771

UT Research Information System

Contact Details

Visiting Address

University of Twente
Faculty of Science and Technology
Carré (building no. 15), room C2025
Hallenweg 23
7522NH  Enschede
The Netherlands

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Mailing Address

University of Twente
Faculty of Science and Technology
Carré  C2025
P.O. Box 217
7500 AE Enschede
The Netherlands