Nanolab

ir.ing. H. Veltkamp MSc (Henk-Willem)

Head of etch cluster / research enigneer / project leader
NANO
Nanolab 1002
h.veltkamp@utwente.nl
+31534895594
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Micro- and Nanofabrication Specialist | Head of the Etch Cluster at MESA+

Henk-Willem Veltkamp is Head of the Etch Cluster at the MESA+ Institute, University of Twente, where he combines technical expertise in advanced micro- and nanofabrication with a strong commitment to education, collaboration, and scientific innovation.

His expertise spans the full range of dry etching technologies available at MESA+, including plasma etching (RIE, ICP-RIE, Bosch-based, mixed-gas, and cryogenic DRIE), vapour-phase etching (HF and XeF₂), ion beam etching (IBE and RIBE), and atomic layer etching (ALE). Beyond maintaining and developing these capabilities, he supports researchers in designing fabrication process flows, translating concepts into practical manufacturing processes, and exploring new possibilities in micro- and nanotechnology. He is also responsible for training new facility users, helping them develop the knowledge and skills required to work safely and effectively in a cleanroom environment.

Henk-Willem is equally passionate about bringing people together. He has organised and co-organised numerous international scientific events and continues to contribute to the micro- and nanotechnology community. His activities include the EuroNanoLab Dry Etch Expert School, the MicroFluidic Handling Systems Conference, and the Micro- and Nano-Engineering (MNE) Conference 2027, for which he serves as Chair of Exhibition. Through these initiatives, he helps connect academic researchers, technology developers, equipment manufacturers, and industry professionals, fostering knowledge exchange and new collaborations.

Scientific Background and Career

Born in Zwolle, the Netherlands, on 12 October 1989, Henk-Willem developed an early interest in science, engineering, and the natural world. This interest led him to pursue a bachelor's degree in Chemistry at Saxion University of Applied Sciences in Deventer, which he began in 2007. During his studies, he developed a particular interest in microfluidics and microfabrication technology.

His first research experience at the University of Twente's MESA+ Institute involved investigating a bonding method for glass and fluorinated ethylene propylene (FEP) foil. The technique was intended for the fabrication of microvalves and micropumps. Subsequently, during his bachelor's thesis at LioniX B.V. in Enschede, he investigated the integration of an optofluidic chip for absorption measurements with a microreactor system. These projects laid the foundation for his continued interest in the intersection of microengineering, materials science, and device fabrication.

In 2011, Henk-Willem continued his academic development with a pre-master's programme in Applied Physics at the University of Twente, followed by a master's degree in Nanotechnology in 2012. His studies focused on micro- and nanofluidics, lab-on-a-chip devices, micro- and nanofabrication, and nanomedicine. During a laboratory practical course, he developed a fabrication process for wire-frame nanopyramids featuring entrance holes as small as 200 nm, work that ultimately contributed to two scientific publications. For his master's thesis, he investigated a micro solid-phase extraction chip for DNA isolation and purification. His broader research activities during this period also resulted in several publications.

Alongside his studies, Henk-Willem contributed to science education as a supervisor for organic chemistry practical courses for secondary school students at Twente Academy, reinforcing his interest in making scientific knowledge accessible to others.

After completing his master's degree, he moved to Brussels, Belgium, where he spent a year working as a researcher on a collaborative project between Vrije Universiteit Brussel and the University of Twente. The project focused on high-aspect-ratio hot embossing, an important technology for replicating complex microstructures. During this period, he also developed expertise in COMSOL Multiphysics, applying numerical simulations to engineering challenges and assisting colleagues with their modelling work. Some of these simulation projects subsequently contributed to scientific publications.

He then returned to the University of Twente, where he worked as Education Coordinator for E-learning and Blended Learning within the Faculty of Science and Technology. This role broadened his experience in educational development and digital learning before he embarked on his doctoral research.

PhD Research and Scientific Collaboration

In 2016, Henk-Willem began his PhD at the MESA+ Institute for Nanotechnology, initially within the Micro Sensors and Systems department. His research focused on the miniaturisation of the Wobbe index meter, a device used to characterise the combustion properties of gases. His work combined sensor development, designing fabrication strategies for high-temperature microfluidics, and the integration of functional components into compact analytical systems. Following the departmental merger with Semiconductor Components in 2018, he continued his research within the Integrated Devices and Systems department.

Throughout his doctoral studies, Henk-Willem remained actively involved in the scientific community beyond his own research. He co-organised several international conferences, including the 10th International Nanoscience Student Conference (INASCON) in 2016 and the third and fourth editions of the Microfluidic Handling Systems Conference in 2017 and 2019. These experiences strengthened his commitment to scientific networking, interdisciplinary collaboration, and the organisation of events that bring researchers together.

His interest in advancing science also extended to direct participation in biomedical research. As a blood donor for scientific studies, he contributed biological samples to research projects, particularly those investigating cancer cell detection. This involvement reflects his broader appreciation of the many ways in which scientific progress depends on collaboration and individual contributions.

Leadership, Service, and Personal Commitment

Beyond his professional activities in micro- and nanotechnology, Henk-Willem is actively involved in scientific societies and public service. He serves as secretary of the Dutch Orders and Medals Research Society (Studiekring Ridderorden en Onderscheidingen, SRO) and is a volunteer at Stichting KROON (Kenniscentrum RidderOrden en Onderscheidingen in NederlanD), contributing to the study and documentation of phaleristics and the history of orders, decorations, and medals.

He is also a longstanding member and first responder with the Dutch Red Cross. His commitment to emergency response has extended to his work at the University of Twente, where he has participated in the university's emergency response teams, including the Waaier team and the Carré/NanoLab team.

His passion for science even made him decide to become a blood donor for scientific research. During his project, countless tubes of blood were taken from him, which contributed to all sorts of research, but mainly cancer cell detection topics.

Across his scientific, educational, organisational, and voluntary activities, Henk-Willem combines technical curiosity with a practical, collaborative mindset. Whether developing new etching processes, helping researchers realise complex devices, training the next generation of cleanroom users, or bringing international experts together, he is driven by a consistent ambition: to turn scientific and technological possibilities into practical capabilities while helping people learn, collaborate, and innovate.

Expertise

  • Material Science

    • Silicon

  • Engineering

    • Side Wall
    • Microfluidic Channel
    • Flow Sensor
    • Microchannel
    • Fabrication Method
    • Fluidics
    • Silicon Electrode

Organisations

Publications

Jump to: 2026 | 2025 | 2024 | 2023 | 2022

2026

Self-Aligned Sidewall Heaters Applied in a Microfluidic Thermal Flow Sensor (2026)In 2026 IEEE 39th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 139-142). Article 11419397. IEEE Advancing Technology for Humanity. Bonnema, M. J. S., Džemaili, N., Veltkamp, H.-W., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.1109/MEMS64181.2026.11419397

2025

A Silicon-Based Combined Hot-Element and Calorimetric Anemometer (2025)IEEE sensors journal, 25(13), 23645-23652. Hackett, T. L., Veltkamp, H.-W., Sanders, R. G. P., van den Berg, T. E., Alveringh, D. & Schmitz, J.https://doi.org/10.1109/JSEN.2025.3570456

2024

Flow-through Microfluidic Relative Permittivity Sensor Using Highly-Doped Silicon Sidewall Electrodes (2024)Journal of micromechanics and microengineering, 34(11). Article 115002. Bonnema, M. J. S., Veltkamp, H.-W., Alveringh, D., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.1088/1361-6439/ad7ec6Fabrication of Buried Microchannels with Almost Circular Cross-Section Using HNA Wet Etching (2024)Micromachines, 15(10). Article 1230. Yu, Q., Veltkamp, H.-W., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.3390/mi15101230Next-Generation ATR-IR Devices for Monitoring Chemical Processes (2024)In Next-Generation ATR-IR Devices for Monitoring Chemical Processes. Srivastava, K., Ramaswami, B., Veltkamp, H.-W., Boyle, N., Flaman, G., Bomer, J. G., van den Berg, A., van der Stam, W., Burgess, I. & Odijk, M.Inline and Real-Time Microfluidic Relative Permittivity Sensor Using Highly Doped Silicon Sidewall Electrodes (2024)In 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 805-808). Bonnema, M. J. S., Veltkamp, H.-W., Alveringh, D., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.1109/mems58180.2024.10439445Microfabrication Technology for Isolated Silicon Sidewall Electrodes and Heaters (2024)In The 5th Conference on MicroFluidic Handling Systems (pp. 53-56). Bonnema, M. J. S., Veltkamp, H.-W., Wiegerink, R. J. & Lötters, J. C.A Method for Comparing Dry Etch Equipment (2024)In 2024 16th International Symposium on Electronics and Telecommunications, ISETC 2024 - Conference Proceedings. IEEE. Avram, A., Veltkamp, H. W., Elias, M., Ronchin, S., De Boer, C., Hovik, J. & De Boer, M.https://doi.org/10.1109/ISETC63109.2024.10797425WIRE SUSPENDED ON A V-GROOVE CAVITY TO MEASURE GAS PHYSICAL PROPERTIES (2024)[Book/Report › Report]. Azadi Kenari, S., Wiegerink, R. J., Batenburg, K. M., Veltkamp, H.-W., Sanders, R. G. P. & Lotterman, H.https://heidelberg-instruments.com/wp-content/uploads/2024/05/Heidelberg-Instruments-Application-Note_Suspended-Wires-V1.3.pdf

2023

Thermal Flow Meter with Integrated Thermal Conductivity Sensor (2023)Micromachines, 14(7). Article 1280. Azadi Kenari, S., Wiegerink, R. J., Veltkamp, H.-W., Sanders, R. G. P. & Lötters, J. C.https://doi.org/10.3390/mi14071280

2022

A miniature microclimate thermal flow sensor for horticultural applications (2022)In 2022 IEEE Sensors. Article 9967348. IEEE. Alveringh, D., Bijsterveld, D. G., Berg, T. E. v. d., Veltkamp, H.-W., Batenburg, K. M., Sanders, R. G. P., Lötters, J. C. & Wiegerink, R. J.https://doi.org/10.1109/SENSORS52175.2022.9967348Method for Keyhole-Free High-Aspect-Ratio Trench Refill by LPCVD (2022)Micromachines, 13(11). Article 1908. Veltkamp, H.-W., Janssens, Y. L., de Boer, M. J., Zhao, Y., Wiegerink, R. J., Tas, N. R. & Lötters, J. C.https://doi.org/10.3390/mi13111908Miniature robust high-bandwidth force sensor with mechanically amplified piezoresistive readout (2022)In 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) (pp. 684-687). IEEE. Alveringh, D., van der Ven, D. L., Veltkamp, H.-W., Batenburg, K. M., Sanders, R. G. P., Fernandez Rivas, D. & Wiegerink, R. J.https://doi.org/10.1109/MEMS51670.2022.9699639

Other contributions

My publicaiton list

Research profiles

  • 2002-2007: Havo level secondary education at Noordgouw, Heerde (ISCED 2+3)
  • 2007-2011: B.Sc. Chemistry at Saxion University of Applied Sciences, Deventer (ISCED 6)
  • 2011-2012: Pre-M.Sc. program Nanotechnology/Applied Physics at University of Twente, Enschede (ISCED 6)
  • 2012-2014: M.Sc. Nanotechnology, University of Twente, Enschede (ISCED 7)
  • 2016-2020: Ph.D. training, University of Twente, Enschede (ISCED 8)

Affiliated study programs

Current projects

Integrated Wobbe Index Meter

STW project 13952

In the press

  • https://www.coleparmer.com/blog/2015/10/15/transporting-reagents-with-a-pipette-and-tygon-tubing/
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