Expertise

  • Material Science

    • Reflectivity
    • Characterization
    • Laser
    • Thin Films
  • Chemistry

    • X-Ray
    • Structure
  • Physics

    • X Ray
    • Grazing Incidence

Organisations

Publications

2024
2023
Electron-phonon coupling in transition metals beyond Wang's approximationPhysical review B: Covering condensed matter and materials physics, 108(21), Article 214301. Akhmetov, F., Milov, I., Makhotkin, I. A., Ackermann, M. & Vorberger, J.https://doi.org/10.1103/PhysRevB.108.214301Laser-induced electron dynamics and surface modification in ruthenium thin filmsVacuum, 212, Article 112045. Akhmetov, F., Milov, I., Semin, S., Formisano, F., Medvedev, N., Sturm, J. M., Zhakhovsky, V. V., Makhotkin, I. A., Kimel, A. & Ackermann, M.https://doi.org/10.1016/j.vacuum.2023.112045Actinic Inspection of the EUV Optical Parameters of Lithographic Materials with Lab-Based Radiometry and ReflectometryIn Optical and EUV Nanolithography XXXVI, Article 1249407. SPIE. Dorney, K. M., Kissoon, N. N., Holzmeier, F., Larsen, E. W., Singh, D. P., Arvind, S., Santra, S., Fallica, R., Makhotkin, I., Philipsen, V., De Gendt, S., Fleischmann, C., van der Heide, P. A. W. & Petersen, J. S.https://doi.org/10.1117/12.2658359Precise optical constant determination in the soft X-ray, EUV, and VUV spectral rangeIn Metrology, Inspection, and Process Control XXXVII, Article 124963B. SPIE. Abbasirad, N., Saadeh, Q., Ciesielski, R., Gottwald, A., Philippsen, V., Makhotkin, I., Sokolov, A., Kolbe, M., Scholze, F. & Soltwisch, V.https://doi.org/10.1117/12.2659369Si transfer and self-limiting chemisorption on Ru thin film surface in hydrogen radicals environment. Gaffarov, I., Sturm, J. M., Vlooswijk, A., de Heij, P., Ackermann, M. D. & Makhotkin, I. A.https://spie.org/optics-optoelectronics/presentation/Si-transfer-and-self-limiting-chemisorption-on-Ru-thin-film/12578-20Laser-induced heating and surface modifications in Ru thin films. Akhmetov, F., Milov, I., Semin, S., Medvedev, N., Formisano, F., Zhakhovsky, V. V., Kimel, A., Makhotkin, I. A. & Ackermann, M.
2022

Research profiles

Organisations

Scan the QR code or
Download vCard