• Material Science

    • Reflectivity
    • Characterization
    • Laser
    • Thin Films
  • Physics

    • X Ray
    • Grazing Incidence
  • Chemistry

    • X-Ray
    • Structure



Electron-phonon coupling in transition metals beyond Wang's approximationPhysical review B: Covering condensed matter and materials physics, 108(21), Article 214301. Akhmetov, F., Milov, I., Makhotkin, I. A., Ackermann, M. & Vorberger, J. electron dynamics and surface modification in ruthenium thin filmsVacuum, 212, Article 112045. Akhmetov, F., Milov, I., Semin, S., Formisano, F., Medvedev, N., Sturm, J. M., Zhakhovsky, V. V., Makhotkin, I. A., Kimel, A. & Ackermann, M. Inspection of the EUV Optical Parameters of Lithographic Materials with Lab-Based Radiometry and ReflectometryIn Optical and EUV Nanolithography XXXVI, Article 1249407. SPIE. Dorney, K. M., Kissoon, N. N., Holzmeier, F., Larsen, E. W., Singh, D. P., Arvind, S., Santra, S., Fallica, R., Makhotkin, I., Philipsen, V., De Gendt, S., Fleischmann, C., van der Heide, P. A. W. & Petersen, J. S. optical constant determination in the soft X-ray, EUV, and VUV spectral rangeIn Metrology, Inspection, and Process Control XXXVII, Article 124963B. SPIE. Abbasirad, N., Saadeh, Q., Ciesielski, R., Gottwald, A., Philippsen, V., Makhotkin, I., Sokolov, A., Kolbe, M., Scholze, F. & Soltwisch, V. transfer and self-limiting chemisorption on Ru thin film surface in hydrogen radicals environment. Gaffarov, I., Sturm, J. M., Vlooswijk, A., de Heij, P., Ackermann, M. D. & Makhotkin, I. A. heating and surface modifications in Ru thin films. Akhmetov, F., Milov, I., Semin, S., Medvedev, N., Formisano, F., Zhakhovsky, V. V., Kimel, A., Makhotkin, I. A. & Ackermann, M.

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