Expertise

  • Engineering

    • Flow Sensor
    • Mass Flow
    • Surfaces
    • Fabrication
    • Design
  • Chemistry

    • Sensor
  • Physics

    • Flowmeter
    • Detection

Organisations

Ancillary activities

  • Innovative Sensor Technology IST-AGDirector Research & Development

Publications

2025

Inline Microfluidic Thermal Conductivity Sensor Using A Suspended Silicon Heater (2025)In 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 169-172). IEEE. Bonnema, M. J. S., Harbers, J., Zeng, Y., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.1109/MEMS61431.2025.10917777Gas-compensated thermal flow sensor using an integrated velocity-independent gas properties meter (2025)Journal of micromechanics and microengineering, 35. Article 015003. Azadi Kenari, S., Wiegerink, R. J., Sanders, R. G. P. & Lötters, J. C.https://doi.org/10.1088/1361-6439/ad99e3Towards a gas independent thermal flow meter (2025)[Thesis › PhD Thesis - Research UT, graduation UT]. University of Twente. Azadi Kenari, S.https://doi.org/10.3990/1.9789036564243Micro coriolis mass flow sensor with large channel diameter by wet etching of silicon (2025)[Thesis › PhD Thesis - Research UT, graduation UT]. University of Twente. Yu, Q.https://doi.org/10.3990/1.9789036563598

2024

Micro Coriolis Mass Flow Sensor with Large Channel Diameter Realized by HNA Wet Etching (2024)Sensors (Switzerland), 24(24). Article 7952. Yu, Q., Bonnema, M. J. S., Yariesbouei, M., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.3390/s24247952Flow-through Microfluidic Relative Permittivity Sensor Using Highly-Doped Silicon Sidewall Electrodes (2024)Journal of micromechanics and microengineering, 34(11). Article 115002. Bonnema, M. J. S., Veltkamp, H.-W., Alveringh, D., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.1088/1361-6439/ad7ec6Method for detecting fluid parameters using a flow sensor configuration (2024)[Patent › Patent]. Alveringh, D., Le, D. V., Groenesteijn, J. & Lötters, J. C.https://patents.google.com/patent/NL2034449B1/Fabrication of Buried Microchannels with Almost Circular Cross-Section Using HNA Wet Etching (2024)Micromachines, 15(10). Article 1230. Yu, Q., Veltkamp, H.-W., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.3390/mi15101230Method for determining a flow rate of a fluid independent of the thermal proprties of the fluid (2024)[Patent › Patent]. Azadi Kenari, S., Lötters, J. C., Sanders, R. G. P. & Wiegerink, R. J.Thermal Flow sensor for determining a flow rate of a fluid (2024)[Patent › Patent]. Azadi Kenari, S., Lötters, J. C., Sanders, R. G. P. & Wiegerink, R. J.

Research profiles

Address

University of Twente

Carré (building no. 15), room C1409
Hallenweg 23
7522 NH Enschede
Netherlands

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