Expertise
Physics & Astronomy
# Actuation
# Chips
# Mass Flow
# Sensors
Engineering & Materials Science
# Fabrication
# Microfluidics
# Sensors
# Silicon
Organisations
Publications
Recent
Zeng, Y. (2022).
Surface channel based Coriolis flow sensors with integrated piezoelectric transducers. University of Twente.
https://doi.org/10.3990/1.9789036553636
Yariesbouei, M.
, Sanders, R. G. P.
, Moazzenzade, T.
, Wiegerink, R. J.
, & Lötters, J. C. (2022).
Free Suspended Thin-Walled Nickel Electroplated Tubes for Microfluidic Density and Mass Flow Sensors.
Journal of microelectromechanical systems,
31(3), 408-414.
https://doi.org/10.1109/JMEMS.2022.3149632
Yariesbouei, M.
, Sparreboom, W.
, Groenesteijn, J.
, van Putten, J. H.
, de Boer, M. J.
, Wiegerink, R. J.
, Veltkamp, H-W.
, Yu, Q.
, Rodriguez Olguin, M. A.
, & Lötters, J. C. (2021).
Microelectromechanical system component or a microfluidic component comprising a free-hanging or free-standing microchannel. (Patent No.
WO2021054829).
https://patentscope.wipo.int/search/en/detail.jsf?docId=WO2021054829
Zhao, Y.
, Janssens, Y. L.
, Veltkamp, H. W.
, De Boer, M. J.
, Groenesteijn, J.
, Tas, N. R.
, Wiegerink, R. J.
, & Lötters, J. C. (2021).
Sacrificial grid release technology: A versatile release concept for MEMS structures.
Journal of micromechanics and microengineering,
31(4), [045013].
https://doi.org/10.1088/1361-6439/abe7da
Zeng, Y.
, Groenesteijn, J.
, Alveringh, D.
, Wiegerink, R. J.
, & Lötters, J. C. (2021).
Design, Fabrication, and Characterization of a Micro Coriolis Mass Flow Sensor Driven by PZT Thin Film Actuators.
Journal of microelectromechanical systems,
30(6), 885-896.
https://doi.org/10.1109/JMEMS.2021.3107744
Schut, T. V. P. (2021).
Towards a thermal noise limited micro-coriolis mass flow sensor. University of Twente.
https://doi.org/10.3990/1.9789083180410
Yariesbouei, M.
, Wiegerink, R. J.
, Sanders, R. G. P.
, & Lötters, J. C. (2021).
Thin-Walled Cylindrical Nickel Electroplated Tubes for Application in Microfluidic Density and Mass Flow Sensors. In
2021 IEEE 34th International Conference on Micro Electro Mechanical Systems, MEMS (pp. 685-688). [9375238] (IEEE International Conference on Micro Electro Mechanical Systems, MEMS; Vol. 2021). IEEE.
https://doi.org/10.1109/MEMS51782.2021.9375238
Schut, T. V. P.
, Wiegerink, R. J.
, & Lötters, J. C. (2021).
μ-Coriolis Mass Flow Sensor With Differential Capacitive Readout.
IEEE sensors journal,
21(5), 5886-5894. [9277606].
https://doi.org/10.1109/JSEN.2020.3042078
Zhao, Y.
, Veltkamp, H. W.
, Schut, T. V. P.
, Sanders, R. G. P., Breazu, B.
, Groenesteijn, J.
, de Boer, M. J.
, Wiegerink, R. J.
, & Lötters, J. C. (2020).
Heavily-doped bulk silicon sidewall electrodes embedded between free-hanging microfluidic channels by modified surface channel technology.
Micromachines,
11(6), [561].
https://doi.org/10.3390/MI11060561
Schut, T. V. P.
, Wiegerink, R. J.
, & Lötters, J. C. (2020).
μ-Coriolis mass flow sensor with improved flow sensitivity through modelling of the sensor.
Microelectronic engineering,
226, [111289].
https://doi.org/10.1016/j.mee.2020.111289
UT Research Information System
Courses Academic Year 2022/2023
Courses in the current academic year are added at the moment they are finalised in the Osiris system. Therefore it is possible that the list is not yet complete for the whole academic year.
Courses Academic Year 2021/2022
Contact Details
Visiting Address
University of Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Carré
(building no. 15), room C1409
Hallenweg 23
7522NH Enschede
The Netherlands
Mailing Address
University of Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Carré
C1409
P.O. Box 217
7500 AE Enschede
The Netherlands