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ing. J.W. Berenschot (Erwin)

Supporting Staff

Expertise

Engineering & Materials Science
Fabrication
Lithography
Silicon
Chemistry
Etching
Physics & Astronomy
Etching
Fabrication
Lithography
Wafers

Publications

Recent
Jonker, D., Jafari, Z. , Winczewski, J. P. , Eyovge, C. , Berenschot, J. W. , Tas, N. R. , Gardeniers, J. G. E., De Leon, I. , & Susarrey-Arce, A. (2020). Wafer-scale fabrication of periodic Au-hollow nanopillars for SERS applications. In Novel Optical Materials and Applications, NOMA 2020 (Vol. Part F186-NOMA 2020). [143868] Optical Society of America. https://doi.org/10.1364/NOMA.2020.NoM3C.5
Van Kampen, C. P. , Berenschot, E. J. , Burger, G. J. , Tiggelaar, R. M. , Sanders, R. G. , Gardeniers, H. G. , & Tas, N. R. (2020). Massive Parallel NEMS Flow Restriction Fabricated Using Self-Aligned 3D-Crystallographic Nanolithography. In 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 (pp. 1106-1109). [9056175] (Proceedings IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2020). IEEE. https://doi.org/10.1109/MEMS46641.2020.9056175
Kooijman, L. J. , Pordeli, Y. , van der Wel, B. Y. , Berenschot, J. W. , Eijkel, J. C. T. , & Tas, N. R. (2020). High-performance ceramic EOF pump realized by massively parallel sacrificial silicon nano-pillar moulding. In 23rd International Conference on Miniaturized Systems for Chemistry and Life Sicences: uTAS 2019 (pp. 1188-1189). The Chemical and Biological Microsystems Society.
Pordeli, Y. , Borgelink, B. T. H. , Van Der Wel, B. Y. , Berenschot, E. J. W. , Dogan, T. , De Boer, M. J. , Bruinink, C. M. , Zandvliet, H. J. W. , Gardeniers, H. J. G. E. , & Tas, N. R. (2019). Wafer-Scale Self-Aligned Fabrication of Nanometric Curved Tunneling Junctions. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII (pp. 2376-2379). [8808559] IEEE. https://doi.org/10.1109/TRANSDUCERS.2019.8808559
Schüffelgen, P., Rosenbach, D. , Li, C., Schmitt, T. W., Schleenvoigt, M., Jalil, A. R., Schmitt, S., Kölzer, J., Wang, M., Bennemann, B., Parlak, U., Kibkalo, L., Trellenkamp, S., Grap, T., Meertens, D., Luysberg, M., Mussler, G. , Berenschot, E. , Tas, N., ... Grützmacher, D. (2019). Selective area growth and stencil lithography for in situ fabricated quantum devices. Nature nanotechnology, 14(9), 825-831. https://doi.org/10.1038/s41565-019-0506-y
Le The, H. , Lozeman, J. J. A. , Bomer, J. G., Tong, H. D. , Berenschot, E. , van den Berg, A. , Odijk, M. , & Eijkel, J. C. T. (2018). Wafer-scale fabrication of high-quality sub-10 nm gold nanogaps. In F-G. Tseng, & G-B. Lee (Eds.), MicroTAS 2018: The 22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences (pp. 574-577). The Chemical and Biological Microsystems Society.

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Contact Details

Visiting Address

University of Twente
Faculty of Science and Technology
Carré (building no. 15), room C1405
Hallenweg 23
7522NH  Enschede
The Netherlands

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Mailing Address

University of Twente
Faculty of Science and Technology
Carré  C1405
P.O. Box 217
7500 AE Enschede
The Netherlands