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ing. J.W. Berenschot (Erwin)

Supporting Staff

Expertise

Silicon
Fabrication
Membranes
Lithography
Etching
Masks
Silicon Nitride
Liquids

Publications

Recent Articles
Berenschot, J. W., Sun, X., Le The, H., Tiggelaar, R. M., de Boer, M. J., Eijkel, J. C. T., ... Sarajlic, E. (2017). Wafer-scale nanostructure formation inside vertical nano-pores. Paper presented at 12th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Los Angeles, United States.
Arik, Y. B., Matsui, R., Sarajlic, E., Takayama, Y., Boom, B. A., Berenschot, J. W., ... Fujita, H. (2016). Ultra-thin nanochannel-based liquid TEM cell for EELS analysis and high resolution imaging. In 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 804-807). IEEE. DOI: 10.1109/MEMSYS.2016.7421751
Berenschot, J. W., Tiggelaar, R. M., Geerlings, J., Gardeniers, J. G. E., Tas, N. R., Malankowska, M., ... Mallada, R. (2016). 3D-fractal engineering based on oxide-only corner lithography. In 2016 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) (Category numberCFP16DTI-ART; Code 122735). IEEE. DOI: 10.1109/DTIP.2016.7514895
Sun, X., Veltkamp, H-W., Berenschot, J. W., Gardeniers, J. G. E., & Tas, N. R. (2016). Nano-pyramid arrays for nano-particle trapping. In Nano-pyramid arrays for nano-particle trapping (pp. 185-188). Category numberCFP16MEM-ART; Code 119597. DOI: 10.1109/MEMSYS.2016.7421589
Le The, H., Berenschot, J. W., Tiggelaar, R. M., Tas, N. R., van den Berg, A., & Eijkel, J. C. T. (2016). Large-area fabrication of sub-30 NM periodic nanostructures. In 20th International Conference on Miniaturized Systems for Chemistry and LifeSciences, MicroTAS 2016 (pp. 1124-1125). (International Conference on Miniaturized Systems for Chemistry and LifeSciences (MicroTAS); No. --). The Chemical and Biological Microsystems Society.

UT Research Information System

Contact Details

Visiting Address

University of Twente
Faculty of Science and Technology
Carré (building no. 15), room 1405
Hallenweg 23
7522NH  Enschede
The Netherlands

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Mailing Address

University of Twente
Faculty of Science and Technology
Carré  1405
P.O. Box 217
7500 AE Enschede
The Netherlands