ing. J.W. Berenschot (Erwin)

Engineering & Materials Science

# Fabrication
# Lithography
# Silicon

Chemistry

# Etching

Physics & Astronomy

# Etching
# Fabrication
# Lithography
# Wafers

Faculty of Science and Technology (TNW), Mesoscale Chemical Systems (MCS)

Kooijman, L. J., Pordeli, Y. , Berenschot, J. W. , & Tas, N. R. (2023). Lateral Fractal Formation by Crystallographic Silicon Micromachining. Fractal and Fractional, 7(2), [202]. https://doi.org/10.3390/fractalfract7020202

Berenschot, E. J. W., Pordeli, Y. , Kooijman, L. J., Janssens, Y. L. , Tiggelaar, R. M. , & Tas, N. R. (2023). 3d Self-Aligned Fabrication of Suspended Nanowires by Crystallographic Nanolithography. In 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems, MEMS 2023 (pp. 639-642). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2023-January). IEEE. https://doi.org/10.1109/MEMS49605.2023.10052139

Lafuente, M. , Berenschot, E. J. W. , Tiggelaar, R. M., Rodrigo, S. G., Mallada, R. , Tas, N. R., & Pina, M. P. (2023). Retraction Note: Attomolar SERS detection of organophosphorous pesticides using silver mirror–like micro-pyramids as active substrate. Microchimica acta, 190, [38]. https://doi.org/10.1007/s00604-022-05620-y

Arturo, S. A. , Erwin, B. , Niels, T., & Silke, K. (2022). Fractals in tissue engineering. (Patent No. NL2025961B).

Berenschot, J. W. , Garcia Blanco, S. M. , Martinussen, S. , Tas, N. R. , & Tiggelaar, R. M. (2022). Light source, mems optical switch, sensor and methods for manufacturing the same. (Patent No. WO2022216150).

Susarrey Arce, A., Krol, S. , Berenschot, E. , & Tas, N. (2022). Fractals in tissue engineering. (Patent No. WO2022005280).

Wang, K. , Berenschot, E. J. W. , Dijkstra, M. , Tiggelaar, R. M. , Martinussen, S. M. , Chang, L. , Hendriks, W. A. P. M. , Borgelink, B. T. H. , Frentrop, R. N. , García Blanco, S. M. , Tas, N. R. , & Tkachuk, V. V. (2022). Low-stress Si₃N₄ waveguides on sapphire substrate: (Student paper). In ECIO 2022: 23rd European Conference on Integrated Optics: 4th May - 6th May, Milan, Italy (pp. 54-56). Politecnico di Milano.

Lafuente, M. , Berenschot, E. J. W. , Tiggelaar, R. M. , Susarrey Arce, A., Mallada, R., Pina, M. P. , García Blanco, S. M. , & Tas, N. R. (2022). Fabrication and characterization of symmetric Au-nanostructures with SERS activity: (Student paper). In ECIO 2022: 23rd European Conference on Integrated Optics: 4th May - 6th May, Milan, Italy (pp. 54-56). Politecnico di Milano.

Schmitt, T. W., Connolly, M. R., Schleenvoigt, M., Liu, C., Kennedy, O., Chávez-Garcia, J. M., Jalil, A. R., Bennemann, B., Trellenkamp, S., Lentz, F., Neumann, E., Lindström, T., De Graaf, S. E. , Berenschot, E. , Tas, N., Mussler, G., Petersson, K. D., Grützmacher, D., & Schüffelgen, P. (2022). Integration of Topological Insulator Josephson Junctions in Superconducting Qubit Circuits. Nano letters, 22(7), 2595-2602. https://doi.org/10.1021/acs.nanolett.1c04055

Jonker, D. , Berenschot, E. J. W. , Tiggelaar, R. M. , Tas, N. R. , Van Houselt, A. , & Gardeniers, H. J. G. E. (2022). A Self-Aligned Wafer-Scale Gate-All-Around Aperture Definition Method for Silicon Nanostructures. In 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 (pp. 561-564). (IEEE Symposium on Mass Storage Systems and Technologies; Vol. 2022-January). IEEE. https://doi.org/10.1109/MEMS51670.2022.9699565

Borgelink, B. T. H. , Berenschot, E. J. W. , Sanders, R. G. P. , Schlautmann, S. , Gardeniers, H. , & Tas, N. R. (2022). Self-Aligned Fabrication and Contact Line Pinning Characterization of Pedestal Nozzles. In 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 (pp. 259-262). (IEEE Symposium on Mass Storage Systems and Technologies; Vol. 2022-January). IEEE. https://doi.org/10.1109/MEMS51670.2022.9699536

Borgelink, B. T. H. , Berenschot, E. J. W. , Sanders, R. G. P. , Schlautmann, S. , Tas, N. R. , & Gardeniers, H. J. G. E. (2022). Fabrication and characterization of microfluidic pedestal nozzles enabling geometric contact line pinning. Sensors and Actuators B: Chemical, 365, [131943]. https://doi.org/10.1016/j.snb.2022.131943

Jonker, D. , Berenschot, E. J. W. , Tas, N. R. , Tiggelaar, R. M. , van Houselt, A. , & Gardeniers, H. J. G. E. (2022). Large Dense Periodic Arrays of Vertically Aligned Sharp Silicon Nanocones. Nanoscale research letters, 17(1), [100]. https://doi.org/10.1186/s11671-022-03735-y

Berenschot, E. , Tiggelaar, R. M. , Borgelink, B., Van Kampen, C., Deenen, C. S., Pordeli, Y. , Witteveen, H. , Gardeniers, H. J. G. E. , & Tas, N. R. (2022). Self-Aligned Crystallographic Multiplication of Nanoscale Silicon Wedges for High-Density Fabrication of 3D Nanodevices. ACS Applied Nano Materials, 5(10), 15847-15854. https://doi.org/10.1021/acsanm.2c04079

Capuano, L. , Berenschot, J. W. , Tiggelaar, R. M. , Feinaeugle, M. , Tas, N. R. , Gardeniers, J. G. E. , & Römer, G. R. B. E. (2022). Fabrication of microstructures in the bulk and on the surface of sapphire by anisotropic selective wet etching of laser-affected volumes. Journal of micromechanics and microengineering, 32(12), [125003]. https://doi.org/10.1088/1361-6439/ac9911

Centonze, M. , Berenschot, E. J. W., Serrati, S. , Susarrey-Arce, A., & Krol, S. (2022). The Fast Track for Intestinal Tumor Cell Differentiation and In Vitro Intestinal Models by Inorganic Topographic Surfaces. Pharmaceutics, 14(1), [218]. https://doi.org/10.3390/pharmaceutics14010218

Dituri, F., Centonze, M. , Berenschot, E. J. W. , Tas, N. R. , Susarrey-Arce, A., & Krol, S. (2021). Complex tumor spheroid formation and one‐step cancer‐ associated fibroblasts purification from hepatocellular carcinoma tissue promoted by inorganic surface topography. Nanomaterials, 11(12), [3233]. https://doi.org/10.3390/nano11123233

Jonker, D., Jafari, Z. , Winczewski, J. P. , Eyovge, C. , Berenschot, J. W. , Tas, N. R. , Gardeniers, J. G. E., De Leon, I. , & Susarrey-Arce, A. (2021). A wafer-scale fabrication method for three-dimensional plasmonic hollow nanopillars. Nanoscale Advances, 3(17), 4926-4939. https://doi.org/10.1039/d1na00316j

Seyfert, C. , Berenschot, E. J. W. , Tas, N. R. , Susarrey-Arce, A. , & Marin, A. (2021). Evaporation-driven colloidal cluster assembly using droplets on superhydrophobic fractal-like structures. Soft matter, 17(3), 506-515. https://doi.org/10.1039/D0SM01346C

Jonker, D., Jafari, Z. , Winczewski, J. P. , Eyovge, C. , Berenschot, J. W. , Tas, N. R. , Gardeniers, J. G. E., De Leon, I. , & Susarrey-Arce, A. (2020). Wafer-scale fabrication of periodic Au-hollow nanopillars for SERS applications. In Novel Optical Materials and Applications, NOMA 2020 (Vol. Part F186-NOMA 2020). [143868] Optical Society of America. https://doi.org/10.1364/NOMA.2020.NoM3C.5

Lafuente, M. , Berenschot, E. J. W. , Tiggelaar, R. M., Rodrigo, S. G., Mallada, R. , Tas, N. R., & Pina, M. P. (2020). Attomolar SERS detection of organophosphorous pesticides using silver mirror–like micro-pyramids as active substrate. Microchimica acta, 187(4), [247]. https://doi.org/10.1007/s00604-020-4216-9

Van Kampen, C. P. , Berenschot, E. J. , Burger, G. J. , Tiggelaar, R. M. , Sanders, R. G. , Gardeniers, H. G. , & Tas, N. R. (2020). Massive Parallel NEMS Flow Restriction Fabricated Using Self-Aligned 3D-Crystallographic Nanolithography. In 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 (pp. 1106-1109). [9056175] (Proceedings IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2020). IEEE. https://doi.org/10.1109/MEMS46641.2020.9056175

Capuano, L. , Tiggelaar, R. M. , Berenschot, J. W. , Gardeniers, J. G. E. , & Römer, G. R. B. E. (2020). Fabrication of millimeter-long structures in sapphire using femtosecond infrared laser pulses and selective etching. Optics and Lasers in Engineering, 133, [106114]. https://doi.org/10.1016/j.optlaseng.2020.106114

Jonker, D. , Kooijman, L., Pordeli, Y. , van der Wel, B. , Berenschot, E. , Borgelink, B. , Le-The, H. , de Boer, M. , Eijkel, J. , Hueting, R. , Tiggelaar, R. , van Houselt, A. , Gardeniers, H. , & Tas, N. (2020). Wafer-scale fabrication and modification of silicon nano-pillar arrays for nanoelectronics, nanofluidics and beyond. International Journal of Nanotechnology, 17(7-10), 583-606. https://doi.org/10.1504/IJNT.2020.111322

Ni, S. , Berenschot, E. J. W. , Westerik, P. J. , de Boer, M. J. , Wolf, R. , Le-The, H. , Gardeniers, H. J. G. E. , & Tas, N. R. (2020). Wafer-scale 3D shaping of high aspect ratio structures by multistep plasma etching and corner lithography. Microsystems and Nanoengineering, 6(1), [25]. https://doi.org/10.1038/s41378-020-0134-6

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j.w.berenschot@utwente.nl

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University of Twente
Faculty of Science and Technology
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The Netherlands

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University of Twente
Faculty of Science and Technology
Carré C1405
P.O. Box 217
7500 AE Enschede
The Netherlands

Faculty of Science and Technology (TNW), Mesoscale Chemical Systems (MCS)

University of Twente Drienerlolaan 5
7522 NB Enschede

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