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ing. J.W. Berenschot (Erwin)

Supporting Staff

Expertise

Silicon
Silicon
Lithography
Etching
Silicon
Lithography
Lithography
Wafers

Publications

Recent
Berenschot, J. W., Sun, X., The, H. L., Tiggelaar, R. M., de Boer, M. J., Eijkel, J. C. T., ... Sarajlic, E. (2017). Wafer-scale nanostructure formation inside vertical nano-pores. In IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2017) (IEEE International Conference on Nano/Micro Engineered and Molecular Systems). Piscataway, NJ: IEEE.
Arik, Y. B., Matsui, R., Sarajlic, E., Takayama, Y., Boom, B. A., Berenschot, J. W., ... Fujita, H. (2016). Ultra-thin nanochannel-based liquid TEM cell for EELS analysis and high resolution imaging. In 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 804-807). IEEE. DOI: 10.1109/MEMSYS.2016.7421751

UT Research Information System

Contact Details

Visiting Address

University of Twente
Faculty of Science and Technology
Carré (building no. 15), room 1405
Hallenweg 23
7522NH  Enschede
The Netherlands

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Mailing Address

University of Twente
Faculty of Science and Technology
Carré  1405
P.O. Box 217
7500 AE Enschede
The Netherlands