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# Fabrication
# Lithography
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# Etching
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# Wafers
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Recent
Jonker, D.
, Eyovge, C.
, Berenschot, E., Di Palma, V.
, Wasserberg, D., Michel-Souzy, S.
, Jonkheijm, P., Krol, S.
, Gardeniers, H., Creatore, M.
, Tas, N.
, & Susarrey-Arce, A. (2024).
Electrochemical Sensing with Spatially Patterned Pt Octahedra Electrodes.
Advanced Materials Technologies,
9(5), Article 2300878.
https://doi.org/10.1002/admt.202300878
Carrara, S. C., Davila-Lezama, A., Cabriel, C.
, Berenschot, E. J. W., Krol, S.
, Gardeniers, J. G. E., Izeddin, I., Kolmar, H.
, & Susarrey-Arce, A. (2024).
3D topographies promote macrophage M2d-Subset differentiation.
Materials Today Bio,
24, Article 100897.
https://doi.org/10.1016/j.mtbio.2023.100897
Cabriel, C., Córdova-Castro, M.
, Berenschot, E., Dávila-Lezema, A.
, Pondman, K.
, Gac, S. L.
, Tas, N.
, Susarrey-Arce, A., & Izeddin, I. (2023).
Single-molecule super-resolution imaging of microfabricated 3D substrates for 3D cell culture (Conference Presentation). SPIE BiOS 2023, San Fransisco, California, United States.
https://doi.org/10.1117/12.2648989
Lafuente, M., Muñoz, P.
, Berenschot, E. J. W.
, Tiggelaar, R. M.
, Susarrey-Arce, A., Rodrigo, S. G.
, Kooijman, L. J.
, García-Blanco, S. M., Mallada, R., Pina, M. P.
, & Tas, N. R. (2023).
Exploring the surface-enhanced Raman scattering (SERS) activity of gold nanostructures embedded around nanogaps at wafer scale: Simulations and experiments.
Applied Materials Today,
35, Article 101929.
https://doi.org/10.1016/j.apmt.2023.101929
Kooijman, L. J., Pordeli, Y.
, Berenschot, J. W.
, & Tas, N. R. (2023).
Lateral Fractal Formation by Crystallographic Silicon Micromachining.
Fractal and Fractional,
7(2), Article 202.
https://doi.org/10.3390/fractalfract7020202
Berenschot, E. J. W., Pordeli, Y.
, Kooijman, L. J., Janssens, Y. L.
, Tiggelaar, R. M.
, & Tas, N. R. (2023).
3d Self-Aligned Fabrication of Suspended Nanowires by Crystallographic Nanolithography. In
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems, MEMS 2023 (pp. 639-642). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2023-January). IEEE.
https://doi.org/10.1109/MEMS49605.2023.10052139
Lafuente, M.
, Berenschot, E. J. W.
, Tiggelaar, R. M., Rodrigo, S. G., Mallada, R.
, Tas, N. R., & Pina, M. P. (2023).
Retraction Note: Attomolar SERS detection of organophosphorous pesticides using silver mirror–like micro-pyramids as active substrate.
Microchimica acta,
190, Article 38.
https://doi.org/10.1007/s00604-022-05620-y
Arturo, S. A.
, Erwin, B.
, Niels, T., & Silke, K. (2022).
Fractals in tissue engineering. (Patent No.
NL2025961B).
Susarrey Arce, A., Krol, S.
, Berenschot, E.
, & Tas, N. (2022).
Fractals in tissue engineering. (Patent No.
WO2022005280).
Wang, K.
, Berenschot, E. J. W.
, Dijkstra, M.
, Tiggelaar, R. M.
, Martinussen, S. M.
, Chang, L.
, Hendriks, W. A. P. M.
, Borgelink, B. T. H.
, Frentrop, R. N.
, García Blanco, S. M.
, Tas, N. R.
, & Tkachuk, V. V. (2022).
Low-stress Si3N4 waveguides on sapphire substrate: (Student paper). In
ECIO 2022: 23rd European Conference on Integrated Optics: 4th May - 6th May, Milan, Italy (pp. 54-56). Politecnico di Milano.
Lafuente, M.
, Berenschot, E. J. W.
, Tiggelaar, R. M.
, Susarrey Arce, A., Mallada, R., Pina, M. P.
, García Blanco, S. M.
, & Tas, N. R. (2022).
Fabrication and characterization of symmetric Au-nanostructures with SERS activity: (Student paper). In
ECIO 2022: 23rd European Conference on Integrated Optics: 4th May - 6th May, Milan, Italy (pp. 54-56). Politecnico di Milano.
Schmitt, T. W., Connolly, M. R., Schleenvoigt, M., Liu, C., Kennedy, O., Chávez-Garcia, J. M., Jalil, A. R., Bennemann, B., Trellenkamp, S., Lentz, F., Neumann, E., Lindström, T., De Graaf, S. E.
, Berenschot, E.
, Tas, N., Mussler, G., Petersson, K. D., Grützmacher, D., & Schüffelgen, P. (2022).
Integration of Topological Insulator Josephson Junctions in Superconducting Qubit Circuits.
Nano letters,
22(7), 2595-2602.
https://doi.org/10.1021/acs.nanolett.1c04055
Jonker, D.
, Berenschot, E. J. W.
, Tiggelaar, R. M.
, Tas, N. R.
, Van Houselt, A.
, & Gardeniers, H. J. G. E. (2022).
A Self-Aligned Wafer-Scale Gate-All-Around Aperture Definition Method for Silicon Nanostructures. In
35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 (pp. 561-564). (IEEE Symposium on Mass Storage Systems and Technologies; Vol. 2022-January). IEEE.
https://doi.org/10.1109/MEMS51670.2022.9699565
Borgelink, B. T. H.
, Berenschot, E. J. W.
, Sanders, R. G. P.
, Schlautmann, S.
, Gardeniers, H.
, & Tas, N. R. (2022).
Self-Aligned Fabrication and Contact Line Pinning Characterization of Pedestal Nozzles. In
35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 (pp. 259-262). (IEEE Symposium on Mass Storage Systems and Technologies; Vol. 2022-January). IEEE.
https://doi.org/10.1109/MEMS51670.2022.9699536
Borgelink, B. T. H.
, Berenschot, E. J. W.
, Sanders, R. G. P.
, Schlautmann, S.
, Tas, N. R.
, & Gardeniers, H. J. G. E. (2022).
Fabrication and characterization of microfluidic pedestal nozzles enabling geometric contact line pinning.
Sensors and Actuators B: Chemical,
365, Article 131943.
https://doi.org/10.1016/j.snb.2022.131943
Jonker, D.
, Berenschot, E. J. W.
, Tas, N. R.
, Tiggelaar, R. M.
, van Houselt, A.
, & Gardeniers, H. J. G. E. (2022).
Large Dense Periodic Arrays of Vertically Aligned Sharp Silicon Nanocones.
Nanoscale research letters,
17(1), Article 100.
https://doi.org/10.1186/s11671-022-03735-y
Berenschot, E.
, Tiggelaar, R. M.
, Borgelink, B., Van Kampen, C., Deenen, C. S., Pordeli, Y.
, Witteveen, H.
, Gardeniers, H. J. G. E.
, & Tas, N. R. (2022).
Self-Aligned Crystallographic Multiplication of Nanoscale Silicon Wedges for High-Density Fabrication of 3D Nanodevices.
ACS Applied Nano Materials,
5(10), 15847-15854.
https://doi.org/10.1021/acsanm.2c04079
Capuano, L.
, Berenschot, J. W.
, Tiggelaar, R. M.
, Feinaeugle, M.
, Tas, N. R.
, Gardeniers, J. G. E.
, & Römer, G. R. B. E. (2022).
Fabrication of microstructures in the bulk and on the surface of sapphire by anisotropic selective wet etching of laser-affected volumes.
Journal of micromechanics and microengineering,
32(12), Article 125003.
https://doi.org/10.1088/1361-6439/ac9911
Centonze, M.
, Berenschot, E. J. W., Serrati, S.
, Susarrey-Arce, A., & Krol, S. (2022).
The Fast Track for Intestinal Tumor Cell Differentiation and In Vitro Intestinal Models by Inorganic Topographic Surfaces.
Pharmaceutics,
14(1), Article 218.
https://doi.org/10.3390/pharmaceutics14010218
Dituri, F., Centonze, M.
, Berenschot, E. J. W.
, Tas, N. R.
, Susarrey-Arce, A., & Krol, S. (2021).
Complex tumor spheroid formation and one‐step cancer‐ associated fibroblasts purification from hepatocellular carcinoma tissue promoted by inorganic surface topography.
Nanomaterials,
11(12), Article 3233.
https://doi.org/10.3390/nano11123233
Jonker, D., Jafari, Z.
, Winczewski, J. P.
, Eyovge, C.
, Berenschot, J. W.
, Tas, N. R.
, Gardeniers, J. G. E., De Leon, I.
, & Susarrey-Arce, A. (2021).
A wafer-scale fabrication method for three-dimensional plasmonic hollow nanopillars.
Nanoscale Advances,
3(17), 4926-4939.
https://doi.org/10.1039/d1na00316j
Jonker, D., Jafari, Z.
, Winczewski, J. P.
, Eyovge, C.
, Berenschot, J. W.
, Tas, N. R.
, Gardeniers, J. G. E., De Leon, I.
, & Susarrey-Arce, A. (2020).
Wafer-scale fabrication of periodic Au-hollow nanopillars for SERS applications. In
Novel Optical Materials and Applications, NOMA 2020 (Vol. Part F186-NOMA 2020). Article 143868 Optical Society of America.
https://doi.org/10.1364/NOMA.2020.NoM3C.5
Lafuente, M.
, Berenschot, E. J. W.
, Tiggelaar, R. M., Rodrigo, S. G., Mallada, R.
, Tas, N. R., & Pina, M. P. (2020).
Attomolar SERS detection of organophosphorous pesticides using silver mirror–like micro-pyramids as active substrate.
Microchimica acta,
187(4), Article 247.
https://doi.org/10.1007/s00604-020-4216-9
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7522NH Enschede
The Netherlands
Mailing Address
University of Twente
Faculty of Science and Technology
Carré
C1405
P.O. Box 217
7500 AE Enschede
The Netherlands