Carré

ing. J.W. Berenschot (Erwin)

Supporting staff
TNW-CE-MCS
Carré C1405
j.w.berenschot@utwente.nl
+31534896146
Business card

Expertise

  • Engineering

    • Fabrication

  • Material Science

    • Silicon
    • Lithography
    • Nanocrystalline Material
    • Silicon Nitride
    • Membrane

  • Chemistry

    • Procedure
    • Pyramidal Crystal

Organisations

Publications

Jump to: 2024 | 2023 | 2022

2024

Thick waveguides of low-stress stoichiometric silicon nitride on sapphire (SiNOS) (2024)Optics express, 32(21), 36835-36847. Martinussen, S., Berenschot, E., Bonneville, D., Wang, K., Dijkstra, M., Tas, N., García Blanco, S. M. & Tiggelaar, R. M.https://doi.org/10.1364/OE.536578Periodic Arrays of Plasmonic Ag-Coated Multiscale 3D-Structures with SERS Activity: Fabrication, Modelling and Characterisation (2024)Micromachines, 15(9). Article 1129. Lafuente, M., Kooijman, L. J., Rodrigo, S. G., Berenschot, E., Mallada, R., Pina, M. P., Tas, N. R. & Tiggelaar, R. M.https://doi.org/10.3390/mi150911293D single-molecule super-resolution imaging of microfabricated fractal substrates for cell culture and self-referenced imaging (2024)[Working paper › Preprint]. bioRxiv. Cabriel, C., Córdova-Castro, R. M., Berenschot, E., Dávila-Lezama, A., Pondman, K., Le Gac, S., Tas, N., Susarrey-Arce, A. & Izeddin, I.https://doi.org/10.1101/2023.11.07.566090Microfabricated Platform for Directional Neural Microcircuits in Silicon-Glass (2024)In 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 (pp. 2169-2172). IEEE. De Boer, D., van Voorst, T. W., Berenschot, E. J. W., Cornelisse, L. N. & Tas, N. R.Residual Stress Analysis of Thin Film Materials for Fabricating Suspended Low Stress Si3N4 Waveguides on Sapphire (2024)In 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 (pp. 2086-2089). IEEE. Berenschot, E., Martinussen, S., Wang, K., García-Blanco, S., Tas, N. & Tiggelaar, R.https://ieeexplore.ieee.org/document/10516852Electrochemical Sensing with Spatially Patterned Pt Octahedra Electrodes (2024)Advanced Materials Technologies, 9(5). Article 2300878. Jonker, D., Eyovge, C., Berenschot, E., Di Palma, V., Wasserberg, D., Michel-Souzy, S., Jonkheijm, P., Krol, S., Gardeniers, H., Creatore, M., Tas, N. & Susarrey-Arce, A.https://doi.org/10.1002/admt.2023008783D topographies promote macrophage M2d-Subset differentiation (2024)Materials Today Bio, 24. Article 100897. Carrara, S. C., Davila-Lezama, A., Cabriel, C., Berenschot, E. J. W., Krol, S., Gardeniers, J. G. E., Izeddin, I., Kolmar, H. & Susarrey-Arce, A.https://doi.org/10.1016/j.mtbio.2023.100897

2023

Self-Aligned Formation and Positioning of Nanogap Templates (2023)In 2023 IEEE Nanotechnology Materials and Devices Conference (NMDC) (pp. 284-289). IEEE. Boer, D. D., Berenschot, E., Pordeli, Y. & Tas, N.https://doi.org/10.1109/NMDC57951.2023.10344109Exploring the surface-enhanced Raman scattering (SERS) activity of gold nanostructures embedded around nanogaps at wafer scale: Simulations and experiments (2023)Applied Materials Today, 35. Article 101929. Lafuente, M., Muñoz, P., Berenschot, E. J. W., Tiggelaar, R. M., Susarrey-Arce, A., Rodrigo, S. G., Kooijman, L. J., García-Blanco, S. M., Mallada, R., Pina, M. P. & Tas, N. R.https://doi.org/10.1016/j.apmt.2023.101929Single-molecule super-resolution imaging of microfabricated 3D substrates for 3D cell culture (Conference Presentation) (2023)[Contribution to conference › Other] SPIE BiOS 2023. Cabriel, C., Córdova-Castro, M., Berenschot, E., Dávila-Lezema, A., Pondman, K., Gac, S. L., Tas, N., Susarrey-Arce, A. & Izeddin, I.https://doi.org/10.1117/12.26489893d Self-Aligned Fabrication of Suspended Nanowires by Crystallographic Nanolithography (2023)In 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems, MEMS 2023 (pp. 639-642) (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2023-January). IEEE. Berenschot, E. J. W., Pordeli, Y., Kooijman, L. J., Janssens, Y. L., Tiggelaar, R. M. & Tas, N. R.https://doi.org/10.1109/MEMS49605.2023.10052139Lateral Fractal Formation by Crystallographic Silicon Micromachining (2023)Fractal and Fractional, 7(2). Article 202. Kooijman, L. J., Pordeli, Y., Berenschot, J. W. & Tas, N. R.https://doi.org/10.3390/fractalfract7020202Attomolar SERS detection of organophosphorous pesticides using silver mirror-like micro-pyramids as active substrate (Retraction of Vol 187, art no 247, 2020) (2023)Microchimica acta, 190(1). Article 38. Lafuente, M., Berenschot, E. J. W., Tiggelaar, R. M., Rodrigo, S. G., Mallada, R., Tas, N. R. & Pina, M. P.https://doi.org/10.1007/s00604-022-05620-yRetraction Note: Attomolar SERS detection of organophosphorous pesticides using silver mirror–like micro-pyramids as active substrate (2023)Microchimica acta, 190(1). Article 38. Lafuente, M., Berenschot, E. J. W., Tiggelaar, R. M., Rodrigo, S. G., Mallada, R., Tas, N. R. & Pina, M. P.https://doi.org/10.1007/s00604-022-05620-yThree-dimensional electrodes in tissue engineering (2023)[Patent › Patent]. Berenschot, E. J. W., Tas, N. R., Susarrey Arce, A., Jonker, D. & Eyovge, C.

2022

Self-Aligned Crystallographic Multiplication of Nanoscale Silicon Wedges for High-Density Fabrication of 3D Nanodevices (2022)ACS Applied Nano Materials, 5(10), 15847-15854. Berenschot, E., Tiggelaar, R. M., Borgelink, B., Van Kampen, C., Deenen, C. S., Pordeli, Y., Witteveen, H., Gardeniers, H. J. G. E. & Tas, N. R.https://doi.org/10.1021/acsanm.2c04079Large Dense Periodic Arrays of Vertically Aligned Sharp Silicon Nanocones (2022)Nanoscale research letters, 17(1). Article 100. Jonker, D., Berenschot, E. J. W., Tas, N. R., Tiggelaar, R. M., van Houselt, A. & Gardeniers, H. J. G. E.https://doi.org/10.1186/s11671-022-03735-yLight source, mems optical switch, sensor and methods for manufacturing the same (2022)[Patent › Patent]. Berenschot, J. W., Garcia Blanco, S. M., Martinussen, S., Tas, N. R. & Tiggelaar, R. M.Fabrication of microstructures in the bulk and on the surface of sapphire by anisotropic selective wet etching of laser-affected volumes (2022)Journal of micromechanics and microengineering, 32(12). Article 125003. Capuano, L., Berenschot, J. W., Tiggelaar, R. M., Feinaeugle, M., Tas, N. R., Gardeniers, J. G. E. & Römer, G. R. B. E.https://doi.org/10.1088/1361-6439/ac9911Fabrication and characterization of microfluidic pedestal nozzles enabling geometric contact line pinning (2022)Sensors and Actuators B: Chemical, 365. Article 131943. Borgelink, B. T. H., Berenschot, E. J. W., Sanders, R. G. P., Schlautmann, S., Tas, N. R. & Gardeniers, H. J. G. E.https://doi.org/10.1016/j.snb.2022.131943Fabrication and characterization of symmetric Au-nanostructures with SERS activity: (Student paper) (2022)In ECIO 2022: 23rd European Conference on Integrated Optics: 4th May - 6th May, Milan, Italy (pp. 54-56). Politecnico di Milano. Lafuente, M., Berenschot, E. J. W., Tiggelaar, R. M., Susarrey Arce, A., Mallada, R., Pina, M. P., García Blanco, S. M. & Tas, N. R.Low-stress Si3N4 waveguides on sapphire substrate: (Student paper) (2022)In ECIO 2022: 23rd European Conference on Integrated Optics: 4th May - 6th May, Milan, Italy (pp. 54-56). Politecnico di Milano. Wang, K., Berenschot, E. J. W., Dijkstra, M., Tiggelaar, R. M., Martinussen, S. M., Chang, L., Hendriks, W. A. P. M., Borgelink, B. T. H., Frentrop, R. N., García Blanco, S. M., Tas, N. R. & Tkachuk, V. V.Integration of Topological Insulator Josephson Junctions in Superconducting Qubit Circuits (2022)Nano letters, 22(7), 2595-2602. Schmitt, T. W., Connolly, M. R., Schleenvoigt, M., Liu, C., Kennedy, O., Chávez-Garcia, J. M., Jalil, A. R., Bennemann, B., Trellenkamp, S., Lentz, F., Neumann, E., Lindström, T., De Graaf, S. E., Berenschot, E., Tas, N., Mussler, G., Petersson, K. D., Grützmacher, D. & Schüffelgen, P.https://doi.org/10.1021/acs.nanolett.1c04055Fractals in tissue engineering (2022)[Patent › Patent]. Arturo, S. A., Erwin, B., Niels, T. & Silke, K.A Self-Aligned Wafer-Scale Gate-All-Around Aperture Definition Method for Silicon Nanostructures (2022)In 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 (pp. 561-564) (IEEE Symposium on Mass Storage Systems and Technologies; Vol. 2022-January). IEEE. Jonker, D., Berenschot, E. J. W., Tiggelaar, R. M., Tas, N. R., Van Houselt, A. & Gardeniers, H. J. G. E.https://doi.org/10.1109/MEMS51670.2022.9699565

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University of Twente

Carré (building no. 15), room C1405
Hallenweg 23
7522 NH Enschede
Netherlands

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