Expertise
Engineering & Materials Science
# Actuators
# Fluorocarbons
# Oxygen
# Plasmas
# Reactive Ion Etching
# Silicon
Mathematics
# Fabrication
Chemistry
# Etching
Organisations
Research
Making piezoMEMS chips for the 'moving chips' and ENose projects.
Publications
Recent
Carnevale, L.
, Broccoli, A., Mayorga Gonzalez, R., van Swieten, T. P.
, Groenesteijn, J.
, Ma, K.
, Wiegerink, R. J., Weckhuysen, B. M., Meirer, F.
, Olthuis, W.
, & Odijk, M. (2023).
MEMS-Based Microreactor for In Situ/Operando High-Resolution 3D X-Ray Microscopy of Single Catalyst Particles. Abstract from 28th North American Catalysis Society Meeting, NAM 2023, Providence, Rhode Island, United States.
Uvarov, I. V., Shlepakov, P. S., Melenev, A. E.
, Ma, K.
, Svetovoy, V. B.
, & Krijnen, G. J. M. (2021).
A Peristaltic Micropump Based on the Fast Electrochemical Actuator: Design, Fabrication, and Preliminary Testing.
Actuators,
10(3), Article 62.
https://doi.org/10.3390/act10030062
Nguyen, V. T. H., Silvestre, C., Shi, P., Cork, R., Jensen, F., Hubner, J.
, Ma, K., Leussink, P.
, de Boer, M., & Jansen, H. (2020).
The core sequence: A nanoscale fluorocarbon-free silicon plasma etch process based on SF6/O2 cycles with excellent 3D profile control at room temperature.
ECS journal of solid state science and technology,
9(2), Article 024002.
https://doi.org/10.1149/2162-8777/ab61ed
Lötters, J. C.
, Groenesteijn, J.
, Steenwelle, R. J. A.
, Wiegerink, R. J.
, Alveringh, D.
, Ma, K.
, & Zeng, Y. (2019).
Coriolis flow sensor. (Patent No.
WO2019143239A8).
UT Research Information System
Contact Details
Visiting Address
University of Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Carré
(building no. 15)
Hallenweg 21
7522NH Enschede
The Netherlands
Mailing Address
University of Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Carré
P.O. Box 217
7500 AE Enschede
The Netherlands