Welcome...

ir. K. Ma (Kechun)

Researcher

About Me

Expertise

Sensors
Silicon
Oxygen
Actuators
Reactive Ion Etching
Silicon Nitride
Species Richness
Misalignment
Self Alignment
Silicon Nitrides
Optical Waveguides
Electrostatics
Ridges
Chips
Modulators
Plateau
Actuation
Bronchiolo-Alveolar Adenocarcinoma

Research

Making piezoMEMS chips for the 'moving chips' and ENose projects.

Publications

Recent Articles
Zeng, Y., Groenesteijn, J., Alveringh, D., Steenwelle, R. J. A., Ma, K., Wiegerink, R. J., & Lötters, J. C. (2018). Micro Coriolis mass flow sensor driven by integrated PZT thin film actuators. Paper presented at 31st IEEE International Conference on Micro Electro Mechanical Systems 2018, Belfast, United Kingdom.
Brookhuis, R. A., Wiegerink, R. J., Lammerink, T. S. J., Ma, K., & Krijnen, G. J. M. (2013). Large range multi-axis fingertip force sensor. In 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) (pp. 2737-2740). USA: IEEE Electron Devices Society. DOI: 10.1109/Transducers.2013.6627372

UT Research Information System

Contact Details

Visiting Address

University of Twente
Faculty of Electrical Engineering, Mathematics & Computer Science
Carré (building no. 15)
Hallenweg 23
7522NH  Enschede
The Netherlands

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Mailing Address

University of Twente
Faculty of Electrical Engineering, Mathematics & Computer Science
Carré
P.O. Box 217
7500 AE Enschede
The Netherlands