Welcome...

ir. K. Ma (Kechun)

Supporting Staff

About Me

Expertise

Engineering & Materials Science
Actuators
Fluorocarbons
Oxygen
Plasmas
Reactive Ion Etching
Silicon
Mathematics
Fabrication
Chemistry
Etching

Research

Making piezoMEMS chips for the 'moving chips' and ENose projects.

Publications

Recent
Nguyen, V. T. H., Silvestre, C., Shi, P., Cork, R., Jensen, F., Hubner, J. , Ma, K., Leussink, P. , de Boer, M., & Jansen, H. (2020). The core sequence: A nanoscale fluorocarbon-free silicon plasma etch process based on SF6/O2 cycles with excellent 3D profile control at room temperature. ECS journal of solid state science and technology, 9(2), [024002]. https://doi.org/10.1149/2162-8777/ab61ed
Löthman, P. A. , Hageman, T., Hendrix, J., Keizer, H. , van Wolferen, H. , Ma, K. , van de Loosdrecht, M. M. , ten Haken, B. , Bolhuis, T. , & Abelmann, L. (2018). Response of suspensions of microfabricated magnetic discs to time varying fields. Abstract from 8th International Workshop on Magnetic Particle Imaging, ISMPI 2018, Hamburg, Hamburg, Germany.
Zeng, Y. , Groenesteijn, J. , Alveringh, D. , Steenwelle, R. J. A. , Ma, K. , Wiegerink, R. J. , & Lötters, J. C. (2018). Micro Coriolis mass flow sensor driven by integrated PZT thin film actuators. Paper presented at 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, Belfast, United Kingdom.

UT Research Information System

Contact Details

Visiting Address

University of Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Carré (building no. 15)
Hallenweg 23
7522NH  Enschede
The Netherlands

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Mailing Address

University of Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Carré
P.O. Box 217
7500 AE Enschede
The Netherlands