Expertise
Physics
- Oxygen
- Silicon
- Hydrogen
- Utilization
Engineering
- Actuators
- Flow Sensor
Material Science
- Actuator
- Temperature
Organisations
Making piezoMEMS chips for the 'moving chips' and ENose projects.
Publications
2023
MEMS-Based Microreactor for In Situ/Operando High-Resolution 3D X-Ray Microscopy of Single Catalyst Particles. Carnevale, L., Broccoli, A., Mayorga Gonzalez, R., van Swieten, T. P., Groenesteijn, J., Ma, K., Wiegerink, R. J., Weckhuysen, B. M., Meirer, F., Olthuis, W. & Odijk, M.
2021
A Peristaltic Micropump Based on the Fast Electrochemical Actuator: Design, Fabrication, and Preliminary Testing, Article 62. Uvarov, I. V., Shlepakov, P. S., Melenev, A. E., Ma, K., Svetovoy, V. B. & Krijnen, G. J. M.https://doi.org/10.3390/act10030062
2020
The core sequence: A nanoscale fluorocarbon-free silicon plasma etch process based on SF6/O2 cycles with excellent 3D profile control at room temperature, Article 024002. Nguyen, V. T. H., Silvestre, C., Shi, P., Cork, R., Jensen, F., Hubner, J., Ma, K., Leussink, P., de Boer, M. & Jansen, H.https://doi.org/10.1149/2162-8777/ab61ed
2019
Coriolis flow sensor. Lötters, J. C., Groenesteijn, J., Steenwelle, R. J. A., Wiegerink, R. J., Alveringh, D., Ma, K. & Zeng, Y.
Research profiles
Address
University of Twente
Carré (building no. 15)
Hallenweg 23
7522 NH Enschede
Netherlands
University of Twente
Carré
P.O. Box 217
7500 AE Enschede
Netherlands
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