Expertise
Physics
- Oxygen
- Hydrogen
- Utilization
Engineering
- Flow Sensor
- Internal Combustion
Material Science
- Actuator
- Silicon
- Temperature
Organisations
Making piezoMEMS chips for the 'moving chips' and ENose projects.
Publications
2023
MEMS-Based Microreactor for In Situ/Operando High-Resolution 3D X-Ray Microscopy of Single Catalyst Particles (2023)[Contribution to conference › Abstract] 28th North American Catalysis Society Meeting, NAM 2023. Carnevale, L., Broccoli, A., Mayorga Gonzalez, R., van Swieten, T. P., Groenesteijn, J., Ma, K., Wiegerink, R. J., Weckhuysen, B. M., Meirer, F., Olthuis, W. & Odijk, M.
2021
Cr and CrOxetching using SF6and O2plasma (2021)Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics, 39(3). Article 032201. Nguyen, V. T. H., Jensen, F., Hübner, J., Shkondin, E., Cork, R., Ma, K., Leussink, P. J., De Malsche, W. & Jansen, H.https://doi.org/10.1116/6.0000922A Peristaltic Micropump Based on the Fast Electrochemical Actuator: Design, Fabrication, and Preliminary Testing (2021)Actuators, 10(3). Article 62. Uvarov, I. V., Shlepakov, P. S., Melenev, A. E., Ma, K., Svetovoy, V. B. & Krijnen, G. J. M.https://doi.org/10.3390/act10030062
Research profiles
Address
University of Twente
Carré (building no. 15)
Hallenweg 23
7522 NH Enschede
Netherlands
University of Twente
Carré
P.O. Box 217
7500 AE Enschede
Netherlands
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