Expertise
Engineering & Materials Science
# Actuators
# Fluorocarbons
# Oxygen
# Plasmas
# Reactive Ion Etching
# Silicon
Mathematics
# Fabrication
Chemistry
# Etching
Organisations
Research
Making piezoMEMS chips for the 'moving chips' and ENose projects.
Publications
Recent
Uvarov, I. V., Shlepakov, P. S., Melenev, A. E.
, Ma, K.
, Svetovoy, V. B.
, & Krijnen, G. J. M. (2021).
A Peristaltic Micropump Based on the Fast Electrochemical Actuator: Design, Fabrication, and Preliminary Testing.
Actuators,
10(3), [62].
https://doi.org/10.3390/act10030062
Nguyen, V. T. H., Silvestre, C., Shi, P., Cork, R., Jensen, F., Hubner, J.
, Ma, K., Leussink, P.
, de Boer, M., & Jansen, H. (2020).
The core sequence: A nanoscale fluorocarbon-free silicon plasma etch process based on SF6/O2 cycles with excellent 3D profile control at room temperature.
ECS journal of solid state science and technology,
9(2), [024002].
https://doi.org/10.1149/2162-8777/ab61ed
Lötters, J. C.
, Groenesteijn, J.
, Steenwelle, R. J. A.
, Wiegerink, R. J.
, Alveringh, D.
, Ma, K.
, & Zeng, Y. (2019).
Coriolis flow sensor. (Patent No.
WO2019143239A8).
Löthman, P. A.
, Hageman, T., Hendrix, J., Keizer, H.
, van Wolferen, H.
, Ma, K.
, van de Loosdrecht, M. M.
, ten Haken, B.
, Bolhuis, T.
, & Abelmann, L. (2018).
Response of suspensions of microfabricated magnetic discs to time varying fields. Abstract from 8th International Workshop on Magnetic Particle Imaging, ISMPI 2018, Hamburg, Hamburg, Germany.
Zeng, Y.
, Groenesteijn, J.
, Alveringh, D.
, Steenwelle, R. J. A.
, Ma, K.
, Wiegerink, R. J.
, & Lötters, J. C. (2018).
Micro Coriolis mass flow sensor driven by integrated PZT thin film actuators. Paper presented at 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, Belfast, United Kingdom.
UT Research Information System
Contact Details
Visiting Address
University of Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Carré
(building no. 15)
Hallenweg 23
7522NH Enschede
The Netherlands
Mailing Address
University of Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Carré
P.O. Box 217
7500 AE Enschede
The Netherlands