Expertise
Engineering & Materials Science
# Atomic Layer Deposition
# Characterization (Materials Science)
# Electric Field Effects
# Film Thickness
# Sheet Resistance
# Tungsten
Chemistry
# Electric Field Effect
# Tungsten
Publications
Recent
van der Zouw, K.
, Aarnink, A. A. I.
, Schmitz, J.
, & Kovalgin, A. Y. (2020).
Conduction and electric field effect in ultra-thin tungsten films.
IEEE Transactions on Semiconductor Manufacturing,
33(2), 202-209. [9016070].
https://doi.org/10.1109/TSM.2020.2976886
van der Zouw, K.
, Aarnink, A. A. I.
, Schmitz, J.
, & Kovalgin, A. Y. (2019).
Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films. In
2019 IEEE 32nd International Conference on Microelectronic Test Structures, ICMTS 2019 (pp. 48-53). [8730954] IEEE.
https://doi.org/10.1109/ICMTS.2019.8730954
Contact Details
Visiting Address
University of Twente
Drienerlolaan 5
7522 NB Enschede
The Netherlands
Mailing Address
University of Twente
P.O. Box 217
7500 AE Enschede
The Netherlands