L. Gerlach MSc (Léon)

I started my PhD in August 2023 at the University of Twente (UT). At UT I work in the project called FONDRu. My research focus is on the interaction of plasma with materials, especially Ru thin films. 

Our goal is to develop new methods for in-situ TEM observations to understand plasma - thin film interaction on the atomic scale.

The project team consists of:

prof. dr. ir. M.D. Ackermann (supervisor)

dr. ir. J. M. Sturm (daily supervisor)

dr. A. Shafikov (post doctoral researcher)

Expertise

• Material Science

  • Thin Films
  • Transmission Electron Microscopy
  • Film
  • Ruthenium
  • Silicon Nitride
  • Heating Load

• Engineering

  • Emissivity
  • Plasma Interaction

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Address

University of Twente

Carré (building no. 15), room 2031
Hallenweg 23
7522 NH Enschede
Netherlands

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