Carré

dr. M. Bayraktar (Muharrem)

Assistant Professor
TNW-NEM-XUV
Carré C2021
m.bayraktar@utwente.nl
+31534893910
Business card

Expertise

  • Physics

    • Laser
    • Light
    • Tin
    • Piezoelectricity
    • Mirrors
    • Thin Films
    • Utilization

  • Earth and Planetary Sciences

    • Wavelength

Organisations

Publications

2023
Developments for broadband spectral and spatial characterization of tin plasma light sources for EUV lithography. ProefschriftMaken. Bouza, Z.https://ir.arcnl.nl/pub/351EUV Source MetrologyIn Photon Sources for Lithography and Metrology (pp. 509-535). Bayraktar, M., Liu, F., Versolato, O. & Bijkerk, F.https://doi.org/10.1117/3.2638242.ch13Extreme ultraviolet broadband imaging spectrometer using dispersion-matched zone plates, 4316-4319. Mostafa, Y., Bouza, Z., Byers, J., Babenko, I., Ubachs, W., Versolato, O. O. & Bayraktar, M.https://doi.org/10.1364/OL.496995Active Wafer Table Based on Piezoelectric Thin Films. Şimşek, E., Vries, S. E., Jansen, B., Steur, M., Bijkerk, F., Bayraktar, M. & Ackermann, M.Bottom Electrode Optimization for Piezoelectric Thin Film Based Active Wafer Tables. Şimşek, E., Jansen, B., Bayraktar, M. & Ackermann, M.
2022
Influence of the Template Layer on the Structure and Ferroelectric Properties of PbZr<sub>0.52</sub>Ti<sub>0.48</sub>O<sub>3</sub> Films, 22210-22220. Lucke, P., Nematollahi, M., Bayraktar, M., Yakshin, A. E., Elshof, J. E. t. & Bijkerk, F.https://doi.org/10.1021/acsomega.2c00815Solid-state-laser driven plasma produced from laser-preformed tin microdroplets for high-brightness EUVIn Compact EUV and X-ray Light Sources, EUVXRAY 2022, Article ETh5A.7. Optica Publishing Group (formerly OSA). Versolato, O. O., Schupp, R., Behnke, L., Mostafa, Y. Y., Bouza, Z., Lassise, A., Bayraktar, M., Sheil, J., Hoekstra, R. & Ubachs, W.Generation of 2-micrometer wavelength laser-light to drive euv-emitting plasmasIn Mid-Infrared Coherent Sources, MICS 2022, Article JW5A.8. Optica Publishing Group (formerly OSA). Behnke, L., Mostafa, Y. Y., Schupp, R., Bouza, Z., Lassise, A., Bayraktar, M., Sheil, J., Hoekstra, R., Ubachs, W. & Versolato, O. O.
2021
The spectrum of a 1-μm-wavelength-driven tin microdroplet laser-produced plasma source in the 5.5-265.5 nm wavelength range, Article 125003. Bouza, Z., Byers, J., Scheers, J., Schupp, R., Mostafa, Y., Behnke, L., Mazzotta, Z., Sheil, J., Ubachs, W., Hoekstra, R., Bayraktar, M. & Versolato, O. O.https://doi.org/10.1063/5.0073839Describing Hysteresis for Non-Switching Fields in Epitaxial Monoclinic PZT Films Using Polarization Rotation Model. Lucke, P., Bayraktar, M., Yakshin, A., Rijnders, A. J. H. M., Bijkerk, F. & Houwman, E. P.Describing hysteresis for non-switching fields in epitaxial monoclinic PZT films using polarization rotation model. Lucke, P., Bayraktar, M., Yakshin, A., Rijnders, A. J. H. M., Bijkerk, F. & Houwman, E. P.Influence of DC Bias on the Hysteresis, Loss, and Nonlinearity of Epitaxial PbZr0.55 Ti0.45 O3 Films, Article 2100115. Lucke, P., Bayraktar, M., Schukkink, N., Yakshin, A. E., Rijnders, G., Bijkerk, F. & Houwman, E. P.https://doi.org/10.1002/aelm.202100115Characterization of tin plasma driven by high-energy, 2-μm-wavelength light. Behnke, L., Schupp, R., Bouza, Z., Mostafa, Y., Lassise, A., Poirier, L., Sheil, J., Mazzotta, Z., Bayraktar, M., Ubachs, W., Hoekstra, R. & Versolato, O.Spectral investigation of tin ions in an electron beam ion trap and laser-produced plasmas in the EUV region. Scheers, J., Ryabtsev, A., Schupp, R., Behnke, L., Shah, C., Sheil, J., Bayraktar, M., Crespo Lopez-Urrutia, J., Ubachs, W., Hoekstra, R. & Versolato, O.Characterization of angularly resolved EUV emission from 2-µm-wavelength laser-driven Sn plasmas using preformed liquid disk targets, Article 365103. Schupp, R., Behnke, L., Bouza, Z., Mazzotta, Z., Mostafa, Y., Lassise, A., Poirier, L., Sheil, J., Bayraktar, M., Ubachs, W., Hoekstra, R. & Versolato, O.https://doi.org/10.1088/1361-6463/ac0b70Layer Growth And Hysteresis Modelling Of Epitaxial Lead Zirconate Titanate Thin films. University of Twente. Lucke, P.https://doi.org/10.3990/1.9789036551526Characterization of 1- and 2−μm-wavelength laser-produced microdroplet-tin plasma for generating extreme-ultraviolet light, Article 013294. Schupp, R., Behnke, L., Sheil, J., Bouza, Z., Bayraktar, M., Ubachs, W., Hoekstra, R. & Versolato, O.https://doi.org/10.1103/PhysRevResearch.3.013294Extreme ultraviolet light from a tin plasma driven by a 2-μm-wavelength laser, 4475-4487. Behnke, L., Schupp, R., Bouza, Z., Bayraktar, M., Mazzotta, Z., Meijer, R. A., Sheil, J., Witte, S., Ubachs, W., Hoekstra, R. & Versolato, O. O.https://doi.org/10.1364/oe.411539Adaptive multilayer mirrors based on piezoelectric actuators. Lucke, P., Polyakov, A. Y., Bayraktar, M., Schukkink, N., Nematollahi, M., Yakshin, A., Rijnders, A. J. H. M. & Bijkerk, F.EUV spectroscopy of Sn ions in an electron beam ion trap and laser-produced plasmas. Bouza, Z., Scheers, J., Ryabtsev, A., Schupp, R., Behnke, L., Shah, C., Sheil, J., Bayraktar, M., Crespo Lopez-Urrutia, J., Ubachs, W., Hoekstra, R. & Versolato, O.
2020
Hysteresis, loss and nonlinearity in epitaxial PbZr0.55Ti0.45O3 films: A polarization rotation model, Article 2005397. Lucke, P., Bayraktar, M., Birkhölzer, Y. A., Nematollahi, M., Yakshin, A., Rijnders, A. J. H. M., Bijkerk, F. & Houwman, E. P.https://doi.org/10.1002/adfm.202005397Prominent radiative contributions from multiply-excited states in laser-produced tin plasma for nanolithography, Article 2334. Torretti, F., Sheil, J., Schupp, R., Basko, M. M., Bayraktar, M., Meijer, R., Witte, S., Ubachs, W., Hoekstra, R., Versolato, O., Neukirch, A. & Colgan, J.https://doi.org/10.1038/s41467-020-15678-yHigh-power EUV lithography: spectral purity and imaging performance, Article 033801. van de Kerkhof, M., Liu, F., Meeuwissen, M., Zhang, X., Bayraktar, M., de Kruif, R. & Davydova, N.https://doi.org/10.1117/1.JMM.19.3.033801EUV spectroscopy of Sn5+–Sn10+ ions in an electron beam ion trap and laser-produced plasmas, Article 195001. Bouza, Z., Scheers, J., Ryabtsev, A., Schupp, R., Behnke, L., Shah, C., Sheil, J., Bayraktar, M., Crespo Lopez-Urrutia, J., Ubachs, W., Hoekstra, R. & Versolato, O. O.https://doi.org/10.1088/1361-6455/aba3a8Spectroscopic investigations of YAG-laser-driven microdroplet-tin plasma sources of extreme ultraviolet radiation for nanolithographyIn Journal of Physics: Conference Series: Plasmas & Particle acceleration. Versolato, O., Bayerle, A., Bayraktar, M., Behnke, L., Bekker, H., Bouza, Z., Colgan, J., Crespo Lopez-Urrutia, J., Deuzeman, M. J., Hoekstra, R., Kurilovich, D., Poirier, L., Liu, B., Meijer, R., Neukirch, A., Rai, S., Ryabtsev, A., Witte, S., Scheers, J., … Ubachs, W.https://doi.org/10.1088/1742-6596/1412/19/192006

Research profiles

Affiliated study programs

Courses academic year 2023/2024

Courses in the current academic year are added at the moment they are finalised in the Osiris system. Therefore it is possible that the list is not yet complete for the whole academic year.

Courses academic year 2022/2023

Address

University of Twente

Carré (building no. 15), room C2021
Hallenweg 23
7522 NH Enschede
Netherlands

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