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dr. M. Bayraktar (Muharrem)

Assistant Professor

Expertise

Physics & Astronomy
Lasers
Lithography
Mirrors
Tin
Ultraviolet Radiation
Wavelengths
Engineering & Materials Science
Computer Generated Holography
Holograms

Publications

Recent
Behnke, L., Schupp, R., Bouza, Z., Mostafa, Y., Lassise, A., Poirier, L., Sheil, J., Mazzotta, Z. , Bayraktar, M., Ubachs, W., Hoekstra, R., & Versolato, O. (2021). Characterization of tin plasma driven by high-energy, 2-μm-wavelength light. Poster session presented at EGAS 52.
Scheers, J., Ryabtsev, A., Schupp, R., Behnke, L., Shah, C., Sheil, J. , Bayraktar, M., Crespo Lopez-Urrutia, J., Ubachs, W., Hoekstra, R., & Versolato, O. (2021). Spectral investigation of tin ions in an electron beam ion trap and laser-produced plasmas in the EUV region. Poster session presented at EGAS 52.
Bouza, Z., Scheers, J., Ryabtsev, A., Schupp, R., Behnke, L., Shah, C., Sheil, J. , Bayraktar, M., Crespo Lopez-Urrutia, J., Ubachs, W., Hoekstra, R., & Versolato, O. (2021). EUV spectroscopy of Sn ions in an electron beam ion trap and laser-produced plasmas. Poster session presented at Physics@Veldhoven 2021, Online Event, Netherlands.
Bouza, Z. , Byers, J., Scheers, J., Schupp, R., Mostafa, Y., Behnke, L., Mazzotta, Z., Sheil, J., Ubachs, W., Hoekstra, R. , Bayraktar, M., & Versolato, O. O. (2021). The spectrum of a 1-μm-wavelength-driven tin microdroplet laser-produced plasma source in the 5.5-265.5 nm wavelength range. AIP advances, 11(12), [125003]. https://doi.org/10.1063/5.0073839
Schupp, R., Behnke, L., Bouza, Z., Mazzotta, Z., Mostafa, Y., Lassise, A., Poirier, L., Sheil, J. , Bayraktar, M., Ubachs, W., Hoekstra, R., & Versolato, O. (2021). Characterization of angularly resolved EUV emission from 2-µm-wavelength laser-driven Sn plasmas using preformed liquid disk targets. Journal of physics D: applied physics, 54(36), [365103]. https://doi.org/10.1088/1361-6463/ac0b70
Schupp, R., Behnke, L., Sheil, J., Bouza, Z. , Bayraktar, M., Ubachs, W., Hoekstra, R., & Versolato, O. (2021). Characterization of 1- and 2−μm-wavelength laser-produced microdroplet-tin plasma for generating extreme-ultraviolet light. Physical Review Research, 3(1), [013294]. https://doi.org/10.1103/PhysRevResearch.3.013294
Behnke, L., Schupp, R., Bouza, Z. , Bayraktar, M., Mazzotta, Z., Meijer, R. A., Sheil, J., Witte, S., Ubachs, W., Hoekstra, R., & Versolato, O. O. (2021). Extreme ultraviolet light from a tin plasma driven by a 2-μm-wavelength laser. Optics express, 29(3), 4475-4487. https://doi.org/10.1364/oe.411539
Versolato, O., Bayerle, A. , Bayraktar, M., Behnke, L., Bekker, H., Bouza, Z., Colgan, J., Crespo Lopez-Urrutia, J., Deuzeman, M. J., Hoekstra, R., Kurilovich, D., Poirier, L. , Liu, B., Meijer, R., Neukirch, A., Rai, S., Ryabtsev, A., Witte, S., Scheers, J., ... Ubachs, W. (2020). Spectroscopic investigations of YAG-laser-driven microdroplet-tin plasma sources of extreme ultraviolet radiation for nanolithography. In Journal of Physics: Conference Series: Plasmas & Particle acceleration (19 ed., Vol. 1412). (Journal of physics: Conference series). https://doi.org/10.1088/1742-6596/1412/19/192006
Bouza, Z., Scheers, J., Ryabtsev, A., Schupp, R., Behnke, L., Shah, C., Sheil, J. , Bayraktar, M., Crespo Lopez-Urrutia, J., Ubachs, W., Hoekstra, R., & Versolato, O. O. (2020). EUV spectroscopy of Sn5+–Sn10+ ions in an electron beam ion trap and laser-produced plasmas. Journal of physics B: atomic, molecular and optical physics, 53(19), [195001]. https://doi.org/10.1088/1361-6455/aba3a8
van de Kerkhof, M., Liu, F., Meeuwissen, M., Zhang, X. , Bayraktar, M., de Kruif, R., & Davydova, N. (2020). High-power EUV lithography: spectral purity and imaging performance. Journal of micro/nanolithography, MEMS, and MOEMS, 19(3), [033801]. https://doi.org/10.1117/1.JMM.19.3.033801
van de Kerkhof, M., Liu, F., Meeuwissen, M., Zhang, X., de Kruif, R., Davydova, N., Schiffelers, G., Wählish, F. , van Setten, E., Varenkamp, W., Ricken, K., de Winter, L., McNamara, J. , & Bayraktar, M. (2020). Spectral purity performance of high-power EUV systems. In N. M. Felix, & A. Lio (Eds.), Extreme Ultraviolet (EUV) Lithography XI (Vol. 11323). [1132321] (SPIE Conference Proceedings; Vol. 1323). SPIE. https://doi.org/10.1117/12.2551021
Torretti, F., Sheil, J., Schupp, R., Basko, M. M. , Bayraktar, M., Meijer, R., Witte, S., Ubachs, W., Hoekstra, R., Versolato, O., Neukirch, A., & Colgan, J. (2020). Prominent radiative contributions from multiply-excited states in laser-produced tin plasma for nanolithography. Nature communications, 11(1), [2334]. https://doi.org/10.1038/s41467-020-15678-y
Behnke, L., Schupp, R., Bouza, Z., Scheers, J., Sheil, J., Torretti, F. , Bayraktar, M., Shah, C., Crespo Lopez-Urrutia, J. R., Ubachs, W., Hoekstra, R., & Versolato, O. O. (2019). Spectroscopic Measurements of Sn Laser-Produced Plasmas. Poster session presented at EUV Source Workshop 2019, Amsterdam, Netherlands. http://www.euvlitho.com/2019/S84.pdf
Bouza, Z., Scheers, J., Sheil, J., Schupp, R., Torretti, F. , Bayraktar, M. , Bijkerk, F., Shah, C., Bekker, H., Crespo Lopez-Urrutia, J., Ubachs, W., Hoekstra, R., & Versolato, O. (2019). Spectral investigation of Sn laser-produced plasmas in the extreme ultraviolet range. Poster session presented at 43rd Annual Meeting NNV AMO 2019, Lunteren, Netherlands.
Bouza, Z., Scheers, J., Sheil, J., Schupp, R. , Bayraktar, M. , Bijkerk, F., Shah, C., Bekker, H., Ubachs, W., Hoekstra, R., & Versolato, O. (2019). Spectral Unraveling of EUV Lithography Light Sources. Poster session presented at Joint ICTP-IAEA School on Atomic and Molecular Spectroscopy in Plasmas, Trieste, Italy.
Versolato, O., Bayerle, A. , Bayraktar, M., Behnke, L., Bekker, H., Bouza, Z., Colgan, J., Crespo Lopez-Urrutia, J., Deuzeman, M. J., Hoekstra, R., Kurilovich, D., Poirier, L. , Liu, B., Meijer, R., Neukirch, A., Rai, S., Ryabtsev, A., Witte, S., Scheers, J., ... Ubachs, W. (2019). Spectroscopic investigations of YAG-laser-driven microdroplet-tin plasma sources of extreme ultraviolet radiation for nanolithography. Poster session presented at XXXIst International Conference on Photonic, Electronic, and Atomic Collisions 2019, Deauville, France.

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Affiliated Study Programmes

Bachelor

Courses Academic Year  2022/2023

Courses in the current academic year are added at the moment they are finalised in the Osiris system. Therefore it is possible that the list is not yet complete for the whole academic year.
 

Courses Academic Year  2021/2022

Contact Details

Visiting Address

University of Twente
Faculty of Science and Technology
Carré (building no. 15), room C2021
Hallenweg 23
7522NH  Enschede
The Netherlands

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Mailing Address

University of Twente
Faculty of Science and Technology
Carré  C2021
P.O. Box 217
7500 AE Enschede
The Netherlands