dr. M. Bayraktar (Muharrem)

Physics & Astronomy

# Lasers
# Lithography
# Mirrors
# Tin
# Ultraviolet Radiation
# Wavelengths

Engineering & Materials Science

# Computer Generated Holography
# Holograms

Faculty of Science and Technology (TNW), XUV Optics (XUV)

Behnke, L., Mostafa, Y. Y., Schupp, R., Bouza, Z., Lassise, A. , Bayraktar, M., Sheil, J., Hoekstra, R., Ubachs, W., & Versolato, O. O. (2022). Generation of 2-micrometer wavelength laser-light to drive euv-emitting plasmas. In Mid-Infrared Coherent Sources, MICS 2022 [JW5A.8] (Optics InfoBase Conference Papers). Optica Publishing Group.

Versolato, O. O., Schupp, R., Behnke, L., Mostafa, Y. Y., Bouza, Z., Lassise, A. , Bayraktar, M., Sheil, J., Hoekstra, R., & Ubachs, W. (2022). Solid-state-laser driven plasma produced from laser-preformed tin microdroplets for high-brightness EUV. In Compact EUV and X-ray Light Sources, EUVXRAY 2022 [ETh5A.7] (Optics InfoBase Conference Papers). Optica Publishing Group.

Lucke, P. , Nematollahi, M. , Bayraktar, M. , Yakshin, A. E. , Ten Elshof, J. E. , & Bijkerk, F. (2022). Influence of the Template Layer on the Structure and Ferroelectric Properties of PbZr_0.52Ti_0.48O₃Films. ACS Omega, 7(26), 22210-22220. https://doi.org/10.1021/acsomega.2c00815

Behnke, L., Schupp, R., Bouza, Z., Mostafa, Y., Lassise, A., Poirier, L., Sheil, J., Mazzotta, Z. , Bayraktar, M., Ubachs, W., Hoekstra, R., & Versolato, O. (2021). Characterization of tin plasma driven by high-energy, 2-μm-wavelength light. Poster session presented at EGAS 52.

Scheers, J., Ryabtsev, A., Schupp, R., Behnke, L., Shah, C., Sheil, J. , Bayraktar, M., Crespo Lopez-Urrutia, J., Ubachs, W., Hoekstra, R., & Versolato, O. (2021). Spectral investigation of tin ions in an electron beam ion trap and laser-produced plasmas in the EUV region. Poster session presented at EGAS 52.

Lucke, P. , Bayraktar, M. , Yakshin, A. , Rijnders, A. J. H. M. , Bijkerk, F. , & Houwman, E. P. (2021). Describing hysteresis for non-switching fields in epitaxial monoclinic PZT films using polarization rotation model. Poster session presented at EMRS Fall Meeting 2021.

Lucke, P. , Bayraktar, M. , Yakshin, A. , Rijnders, A. J. H. M. , Bijkerk, F. , & Houwman, E. P. (2021). Describing Hysteresis for Non-Switching Fields in Epitaxial Monoclinic PZT Films Using Polarization Rotation Model. Poster session presented at MRS Fall Meeting 2021, Boston, Massachusetts, United States.

Bouza, Z., Scheers, J., Ryabtsev, A., Schupp, R., Behnke, L., Shah, C., Sheil, J. , Bayraktar, M., Crespo Lopez-Urrutia, J., Ubachs, W., Hoekstra, R., & Versolato, O. (2021). EUV spectroscopy of Sn ions in an electron beam ion trap and laser-produced plasmas. Poster session presented at Physics@Veldhoven 2021, Online Event, Netherlands.

Lucke, P. , Polyakov, A. Y. , Bayraktar, M. , Schukkink, N. , Nematollahi, M. , Yakshin, A. , Rijnders, A. J. H. M. , & Bijkerk, F. (2021). Adaptive multilayer mirrors based on piezoelectric actuators. Poster session presented at Physics@Veldhoven 2021, Online Event, Netherlands.

Bouza, Z., Byers, J., Scheers, J., Schupp, R., Mostafa, Y., Behnke, L., Mazzotta, Z., Sheil, J., Ubachs, W., Hoekstra, R. , Bayraktar, M., & Versolato, O. O. (2021). The spectrum of a 1-μm-wavelength-driven tin microdroplet laser-produced plasma source in the 5.5-265.5 nm wavelength range. AIP advances, 11(12), [125003]. https://doi.org/10.1063/5.0073839

Lucke, P. , Bayraktar, M. , Schukkink, N. , Yakshin, A. E. , Rijnders, G. , Bijkerk, F. , & Houwman, E. P. (2021). Influence of DC Bias on the Hysteresis, Loss, and Nonlinearity of Epitaxial PbZr_0.55 Ti_0.45 O₃ Films. Advanced electronic materials, 7(8), [2100115]. https://doi.org/10.1002/aelm.202100115

Schupp, R., Behnke, L., Bouza, Z., Mazzotta, Z., Mostafa, Y., Lassise, A., Poirier, L., Sheil, J. , Bayraktar, M., Ubachs, W., Hoekstra, R., & Versolato, O. (2021). Characterization of angularly resolved EUV emission from 2-µm-wavelength laser-driven Sn plasmas using preformed liquid disk targets. Journal of physics D: applied physics, 54(36), [365103]. https://doi.org/10.1088/1361-6463/ac0b70

Schupp, R., Behnke, L., Sheil, J., Bouza, Z. , Bayraktar, M., Ubachs, W., Hoekstra, R., & Versolato, O. (2021). Characterization of 1- and 2−μm-wavelength laser-produced microdroplet-tin plasma for generating extreme-ultraviolet light. Physical Review Research, 3(1), [013294]. https://doi.org/10.1103/PhysRevResearch.3.013294

Lucke, P. (2021). Layer Growth And Hysteresis Modelling Of Epitaxial Lead Zirconate Titanate Thin films. [PhD Thesis - Research external, graduation UT, University of Twente]. University of Twente. https://doi.org/10.3990/1.9789036551526

Behnke, L., Schupp, R., Bouza, Z. , Bayraktar, M., Mazzotta, Z., Meijer, R. A., Sheil, J., Witte, S., Ubachs, W., Hoekstra, R., & Versolato, O. O. (2021). Extreme ultraviolet light from a tin plasma driven by a 2-μm-wavelength laser. Optics express, 29(3), 4475-4487. https://doi.org/10.1364/oe.411539

Lucke, P. , Bayraktar, M. , Birkhölzer, Y. A. , Nematollahi, M. , Yakshin, A. , Rijnders, A. J. H. M. , Bijkerk, F. , & Houwman, E. P. (2020). Hysteresis, loss and nonlinearity in epitaxial PbZr_0.55Ti_0.45O₃ films: A polarization rotation model. Advanced functional materials, 30(52), [2005397]. https://doi.org/10.1002/adfm.202005397

Versolato, O., Bayerle, A. , Bayraktar, M., Behnke, L., Bekker, H., Bouza, Z., Colgan, J., Crespo Lopez-Urrutia, J., Deuzeman, M. J., Hoekstra, R., Kurilovich, D., Poirier, L. , Liu, B., Meijer, R., Neukirch, A., Rai, S., Ryabtsev, A., Witte, S., Scheers, J., ... Ubachs, W. (2020). Spectroscopic investigations of YAG-laser-driven microdroplet-tin plasma sources of extreme ultraviolet radiation for nanolithography. In Journal of Physics: Conference Series: Plasmas & Particle acceleration (19 ed., Vol. 1412). (Journal of physics: Conference series). https://doi.org/10.1088/1742-6596/1412/19/192006

Bouza, Z., Scheers, J., Ryabtsev, A., Schupp, R., Behnke, L., Shah, C., Sheil, J. , Bayraktar, M., Crespo Lopez-Urrutia, J., Ubachs, W., Hoekstra, R., & Versolato, O. O. (2020). EUV spectroscopy of Sn⁵⁺–Sn¹⁰⁺ ions in an electron beam ion trap and laser-produced plasmas. Journal of physics B: atomic, molecular and optical physics, 53(19), [195001]. https://doi.org/10.1088/1361-6455/aba3a8

van de Kerkhof, M., Liu, F., Meeuwissen, M., Zhang, X. , Bayraktar, M., de Kruif, R., & Davydova, N. (2020). High-power EUV lithography: spectral purity and imaging performance. Journal of micro/nanolithography, MEMS, and MOEMS, 19(3), [033801]. https://doi.org/10.1117/1.JMM.19.3.033801

van de Kerkhof, M., Liu, F., Meeuwissen, M., Zhang, X., de Kruif, R., Davydova, N., Schiffelers, G., Wählish, F. , van Setten, E., Varenkamp, W., Ricken, K., de Winter, L., McNamara, J. , & Bayraktar, M. (2020). Spectral purity performance of high-power EUV systems. In N. M. Felix, & A. Lio (Eds.), Extreme Ultraviolet (EUV) Lithography XI (Vol. 11323). [1132321] (SPIE Conference Proceedings; Vol. 1323). SPIE. https://doi.org/10.1117/12.2551021

Bayraktar, M. , Lucke, P. , Nematollahi, M. , Houwman, E. P. , Birkhölzer, Y. A. , Yakshin, A. , Rijnders, A. J. H. M. , & Bijkerk, F. (2020). Hysteresis and nonlinearity in epitaxial rhombohedral PZT piezoelectric thin films. Poster session presented at Physics@Veldhoven 2020, veldhoven, Netherlands.

Torretti, F., Sheil, J., Schupp, R., Basko, M. M. , Bayraktar, M., Meijer, R., Witte, S., Ubachs, W., Hoekstra, R., Versolato, O., Neukirch, A., & Colgan, J. (2020). Prominent radiative contributions from multiply-excited states in laser-produced tin plasma for nanolithography. Nature communications, 11(1), [2334]. https://doi.org/10.1038/s41467-020-15678-y

Behnke, L., Schupp, R., Bouza, Z., Scheers, J., Sheil, J., Torretti, F. , Bayraktar, M., Shah, C., Crespo Lopez-Urrutia, J. R., Ubachs, W., Hoekstra, R., & Versolato, O. O. (2019). Spectroscopic Measurements of Sn Laser-Produced Plasmas. Poster session presented at EUV Source Workshop 2019, Amsterdam, Netherlands. http://www.euvlitho.com/2019/S84.pdf

Bouza, Z., Scheers, J., Sheil, J., Schupp, R., Torretti, F. , Bayraktar, M. , Bijkerk, F., Shah, C., Bekker, H., Crespo Lopez-Urrutia, J., Ubachs, W., Hoekstra, R., & Versolato, O. (2019). Spectral investigation of Sn laser-produced plasmas in the extreme ultraviolet range. Poster session presented at 43rd Annual Meeting NNV AMO 2019, Lunteren, Netherlands.

Bayraktar, M. , Bijkerk, F. , Bastiaens, H. M. J., & Bruineman, C. (2019). Method, apparatus and computer program for measuring and processing a spectrum of an xuv light source from soft x-rays to infrared wavelengths. (Patent No. 17817219.3 - 1020). European Patent Office.

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+31534893910

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m.bayraktar@utwente.nl

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University of Twente
Faculty of Science and Technology
Carré (building no. 15), room C2021
Hallenweg 23
7522NH Enschede
The Netherlands

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University of Twente
Faculty of Science and Technology
Carré C2021
P.O. Box 217
7500 AE Enschede
The Netherlands

Faculty of Science and Technology (TNW), XUV Optics (XUV)

University of Twente Drienerlolaan 5
7522 NB Enschede

+31 (0)53 489 9111
info@utwente.nl
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