Expertise
Fabrication
Fabrication
Silicon
Microfluidics
Fabrication
Substrates
Wavelengths
Mems
Organizations
Publications
Recent
Groenesteijn, J., de Boer, M. J., Lötters, J. C., & Wiegerink, R. J. (2017). A versatile technology platform for microfluidic handling systems, part II: channel design and technology. Microfluidics and nanofluidics, 21(7), [126]. DOI: 10.1007/s10404-017-1962-z
Groenesteijn, J., de Boer, M. J., Lötters, J. C., & Wiegerink, R. J. (2017). A versatile technology platform for microfluidic handling systems, part I: fabrication and functionalization. Microfluidics and nanofluidics, 21(7), [127]. DOI: 10.1007/s10404-017-1961-0
Hulshof, F. F. B., Zhao, Y., Vasilevich, A., Beijer, N. R. M., de Boer, M., Papenburg, B. J., ... de Boer, J. (2017). NanoTopoChip: High-throughput nanotopographical cell instruction. Acta biomaterialia, 62, 188-198. DOI: 10.1016/j.actbio.2017.08.023
Hulshof, F. F. B., Papenburg, B., Vasilevich, A., Hulsman, M., Zhao, Y., Levers, M., ... De Boer, J. (2017). Mining for osteogenic surface topographies: In silico design to in vivo osseo-integration. Biomaterials, 137, 49-60. DOI: 10.1016/j.biomaterials.2017.05.020
Zhao, Y., Veltkamp, H-W., de Boer, M. J., Zeng, Y., Groenesteijn, J., Wiegerink, R. J., & Lötters, J. C. (2017). Design principles and fabrication method for a miniaturized fuel gas combustion reactor. In Conference Proceedings: The 3rd Conference on MicroFluidic Handling Systems (Vol. 3, pp. 37-40). Enschede.
Veltkamp, H-W., Zhao, Y., de Boer, M. J., Groenesteijn, J., Wiegerink, R. J., & Lötters, J. C. (2017). Fabrication of large-volume rectangular channels using trench-sidewall technology and a SOI substrate. In Conference Proceedings: The 3rd Conference on MicroFluidic Handling Systems (Vol. 3, pp. 114-117). Enschede.
Berenschot, J. W., Sun, X., The, H. L., Tiggelaar, R. M., de Boer, M. J., Eijkel, J. C. T., ... Sarajlic, E. (2017). Wafer-scale nanostructure formation inside vertical nano-pores. In IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2017) (IEEE International Conference on Nano/Micro Engineered and Molecular Systems). Piscataway, NJ: IEEE.
Huang, Q., Louis, E., Bijkerk, F., de Boer, M. J., & von Blanckenhagen, G. (2016). EUV multilayer mirror, optical system including a multilayer mirror and method of manufacturing a multilayer mirror (Patent No. WO2015EP52767 20150210.)
Droogendijk, H., de Boer, M. J., Sanders, R. G. P., & Krijnen, G. J. M. (2015). Advantages of electrostatic spring hardening in biomimetic hair flow sensors. Journal of microelectromechanical systems, 24(5), 1415-1425. DOI: 10.1109/JMEMS.2015.2409134
Bonnes, J. L., Thannhauser, J., Hermans, M. C., Hermans, M. C., Westra, S. W., Oostendorp, T. F., ... Smeets, J. L. R. M. (2015). Ventricular fibrillation waveform characteristics differ according to the presence of a previous myocardial infarction: A surface ECG study in ICD-patients. Resuscitation, 96, 239-245. DOI: 10.1016/j.resuscitation.2015.08.014
Brookhuis, R. A., Sanders, R. G. P., Ma, K., Lammerink, T. S. J., de Boer, M. J., Krijnen, G. J. M., & Wiegerink, R. J. (2015). Miniature large range multi-axis force-torque sensor for biomechanical applications. Journal of micromechanics and microengineering, 25(2), 025012. DOI: 10.1088/0960-1317/25/2/025012
Droogendijk, H., de Boer, M. J., Sanders, R. G. P., & Krijnen, G. J. M. (2015). Stochastic resonance in a voltage-controlled micromechanical slider. Journal of microelectromechanical systems, 24(3), 651-660. DOI: 10.1109/JMEMS.2014.2341590
Droogendijk, H., de Boer, M. J., Sanders, R. G. P., & Krijnen, G. J. M. (2015). Bio-inspired hair-based inertial sensors. In Biomimetic Technologies: Principles and Applications (pp. 93-119). (Woodhead Publishing Series in Electronic and Optical Materials). Amsterdam: ELSEVIER. DOI: 10.1016/B978-0-08-100249-0.00005-7
Huang, Q., de Boer, M. J., Barreaux, J. L. P., van der Meer, R., Louis, E., & Bijkerk, F. (2014). High efficiency structures EUV multilayer mirror for spectral filtering of long wavelengths. Optics express, 22(16), 19365-19374. DOI: 10.1364/OE.22.019365
Brookhuis, R. A., Droogendijk, H., de Boer, M. J., Sanders, R. G. P., Lammerink, T. S. J., Wiegerink, R. J., & Krijnen, G. J. M. (2014). Six-axis force-torque sensor with a large range for biomechanical applications. Journal of micromechanics and microengineering, 24(3), 1-10. DOI: 10.1088/0960-1317/24/3/035015
Dijkstra, M., Lammerink, T. S. J., de Boer, M. J., Berenschot, J. W., Wiegerink, R. J., & Elwenspoek, M. C. (2014). Thermal flow-sensor drift reduction by thermopile voltage cancellation via power feedback control. Journal of microelectromechanical systems, 23(4), 908-917. DOI: 10.1109/JMEMS.2014.2300179
Droogendijk, H., de Boer, M. J., Sanders, R. G. P., & Krijnen, G. J. M. (2014). A biomimetic accelerometer inspired by the cricket's clavate hair. Journal of the Royal Society. Interface, 11(97), [20140438]. DOI: 10.1098/rsif.2014.0438
Droogendijk, H., Brookhuis, R. A., de Boer, M. J., Sanders, R. G. P., & Krijnen, G. J. M. (2014). Towards a biomimetic gyroscope inspired by the fly's haltere using microelectromechanical systems technology. Journal of the Royal Society. Interface, 11(99), 20140573. DOI: 10.1098/rsif.2014.0573
Dijkstra, M., Lammerink, T. S. J., Pjetri, O., de Boer, M. J., Berenschot, J. W., Wiegerink, R. J., & Elwenspoek, M. C. (2014). Thermal-wave balancing flow sensor with low-drift power feedback. Journal of micromechanics and microengineering, 24(5), 055016. DOI: 10.1088/0960-1317/24/5/055016
Huang, Q., de Boer, M. J., Barreaux, J. L. P., Paardekooper, D. M., van den Boogaard, T., van de Kruijs, R. W. E., ... Bijkerk, F. (2014). Spectral purity enhancement for the EUV Lithography Systems by suppressing UV reflection from multilayers. In Wood, O.R., & Panning, E.M. (Eds.), Extreme Ultraviolet (EUV) Lithography V (pp. -). San Jose, CA: SPIE-INT Soc Ootical Engineering. DOI: 10.1117/12.2046415
Dijkstra, M., Ma, K., de Boer, M. J., Groenesteijn, J., Lötters, J. C., & Wiegerink, R. J. (2014). Miniaturised Prandtl tube with integrated pressure sensors for micro-thruster plume characterisation. In MIEEE 27th International Conference on Micro Electro Mechanical Systems, MEMS 2014 (pp. 999-1002). USA: IEEE. DOI: 10.1109/MEMSYS.2014.6765812
Groenesteijn, J., Droogendijk, H., de Boer, M. J., Sanders, R. G. P., Wiegerink, R. J., & Krijnen, G. J. M. (2014). An angular acceleration sensor inspired by the vestibular system with a fully circular fluid-channel and thermal read-out. In Technical Digest of the 27th IEEE International Conference on Micro Electro Mechanical Systems (pp. 696-699). Los Alamitos, CA, USA: The Printing House, Inc..
Google Scholar Link
Contact Details
Visiting Address
University of Twente
Faculty of Electrical Engineering, Mathematics & Computer Science
Nanolab
(building no. 16), room NL 1003
Hallenweg 23
7522NH Enschede
The Netherlands
Mailing Address
University of Twente
Faculty of Electrical Engineering, Mathematics & Computer Science
Nanolab
NL 1003
P.O. Box 217
7500 AE Enschede
The Netherlands