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M.J. de Boer (Meint)

Process Technologist

Expertise

Silicon
Fabrication
Sensors
Mems
Membranes
Etching
Lithography
Temperature

Publications

Recent
Berenschot, J. W., Sun, X., The, H. L., Tiggelaar, R. M., de Boer, M. J., Eijkel, J. C. T., ... Sarajlic, E. (2017). Wafer-scale nanostructure formation inside vertical nano-pores. In IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2017) (IEEE International Conference on Nano/Micro Engineered and Molecular Systems). Piscataway, NJ: IEEE.
Bonnes, J. L., Thannhauser, J., Hermans, M. C., Hermans, M. C., Westra, S. W., Oostendorp, T. F., ... Smeets, J. L. R. M. (2015). Ventricular fibrillation waveform characteristics differ according to the presence of a previous myocardial infarction: A surface ECG study in ICD-patients. Resuscitation, 96, 239-245. DOI: 10.1016/j.resuscitation.2015.08.014
Droogendijk, H., de Boer, M. J., Sanders, R. G. P., & Krijnen, G. J. M. (2015). Bio-inspired hair-based inertial sensors. In Biomimetic Technologies: Principles and Applications (pp. 93-119). (Woodhead Publishing Series in Electronic and Optical Materials). Amsterdam: ELSEVIER. DOI: 10.1016/B978-0-08-100249-0.00005-7
Huang, Q., de Boer, M. J., Barreaux, J. L. P., Paardekooper, D. M., van den Boogaard, T., van de Kruijs, R. W. E., ... Bijkerk, F. (2014). Spectral purity enhancement for the EUV Lithography Systems by suppressing UV reflection from multilayers. In Wood, O.R., & Panning, E.M. (Eds.), Extreme Ultraviolet (EUV) Lithography V (pp. -). San Jose, CA: SPIE-INT Soc Ootical Engineering. DOI: 10.1117/12.2046415
Groenesteijn, J., Droogendijk, H., de Boer, M. J., Sanders, R. G. P., Wiegerink, R. J., & Krijnen, G. J. M. (2014). An angular acceleration sensor inspired by the vestibular system with a fully circular fluid-channel and thermal read-out. In Technical Digest of the 27th IEEE International Conference on Micro Electro Mechanical Systems (pp. 696-699). Los Alamitos, CA, USA: The Printing House, Inc..

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Contact Details

Visiting Address

University of Twente
Faculty of Electrical Engineering, Mathematics & Computer Science
Nanolab (building no. 16), room NL 1003
Hallenweg 23
7522NH  Enschede
The Netherlands

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Mailing Address

University of Twente
Faculty of Electrical Engineering, Mathematics & Computer Science
Nanolab  NL 1003
P.O. Box 217
7500 AE Enschede
The Netherlands