M.J. de Boer (Meint)

Engineering & Materials Science

# Fabrication
# Lithography
# Microfluidics
# Silicon

Chemistry

# Etching

Physics & Astronomy

# Fabrication
# Microelectromechanical Systems
# Silicon

Faculty of Electrical Engineering, Mathematics and Computer Science (EEMCS), Nanolab (NanoLab)

Veltkamp, H. W., Janssens, Y. L. , de Boer, M. J. , Zhao, Y. , Wiegerink, R. J. , Tas, N. R. , & Lötters, J. C. (2022). Method for Keyhole-Free High-Aspect-Ratio Trench Refill by LPCVD. Micromachines, 13(11), [1908]. https://doi.org/10.3390/mi13111908

Yariesbouei, M. , Sparreboom, W. , Groenesteijn, J. , van Putten, J. H. , de Boer, M. J. , Wiegerink, R. J. , Veltkamp, H-W., Yu, Q., Rodriguez Olguin, M. A. , & Lötters, J. C. (2021). Microelectromechanical system component or a microfluidic component comprising a free-hanging or free-standing microchannel. (Patent No. WO2021054829). https://patentscope.wipo.int/search/en/detail.jsf?docId=WO2021054829

Zhao, Y., Janssens, Y. L. , Veltkamp, H. W. , De Boer, M. J. , Groenesteijn, J. , Tas, N. R. , Wiegerink, R. J. , & Lötters, J. C. (2021). Sacrificial grid release technology: A versatile release concept for MEMS structures. Journal of micromechanics and microengineering, 31(4), [045013]. https://doi.org/10.1088/1361-6439/abe7da

Nguyen, V. T. H., Silvestre, C., Shi, P., Cork, R., Jensen, F., Hubner, J. , Ma, K., Leussink, P. , de Boer, M., & Jansen, H. (2020). The core sequence: A nanoscale fluorocarbon-free silicon plasma etch process based on SF₆/O₂ cycles with excellent 3D profile control at room temperature. ECS journal of solid state science and technology, 9(2), [024002]. https://doi.org/10.1149/2162-8777/ab61ed

Zhang, Z., Martinsen, T., Liu, G., Tayyib, M., Cui, D. , de Boer, M. J., Karlsen, F., Jakobsen, H., Xue, C., & Wang, K. (2020). Ultralow Broadband Reflectivity in Black Silicon via Synergy between Hierarchical Texture and Specific-Size Au Nanoparticles. Advanced Optical Materials, 8(19), [2000668]. https://doi.org/10.1002/adom.202000668

Zhao, Y. , Veltkamp, H. W., Schut, T. V. P. , Sanders, R. G. P., Breazu, B. , Groenesteijn, J. , de Boer, M. J. , Wiegerink, R. J. , & Lötters, J. C. (2020). Heavily-doped bulk silicon sidewall electrodes embedded between free-hanging microfluidic channels by modified surface channel technology. Micromachines, 11(6), [561]. https://doi.org/10.3390/MI11060561

Droogendijk, H. , Boer, M. J. D. , Sanders, R. G. P. , & Krijnen, G. J. M. (2020). Correction to ‘A biomimetic accelerometer inspired by the cricket's clavate hair’. Journal of The Royal Society Interface, 17(172), [20200890]. https://doi.org/10.1098/rsif.2020.0890

Jonker, D. , Kooijman, L., Pordeli, Y. , van der Wel, B. , Berenschot, E. , Borgelink, B. , Le-The, H. , de Boer, M. , Eijkel, J. , Hueting, R. , Tiggelaar, R. , van Houselt, A. , Gardeniers, H. , & Tas, N. (2020). Wafer-scale fabrication and modification of silicon nano-pillar arrays for nanoelectronics, nanofluidics and beyond. International Journal of Nanotechnology, 17(7-10), 583-606. https://doi.org/10.1504/IJNT.2020.111322

Ni, S. , Berenschot, E. J. W. , Westerik, P. J. , de Boer, M. J. , Wolf, R. , Le-The, H. , Gardeniers, H. J. G. E. , & Tas, N. R. (2020). Wafer-scale 3D shaping of high aspect ratio structures by multistep plasma etching and corner lithography. Microsystems and Nanoengineering, 6(1), [25]. https://doi.org/10.1038/s41378-020-0134-6

Pordeli, Y. , Borgelink, B. T. H. , Van Der Wel, B. Y. , Berenschot, E. J. W. , Dogan, T. , De Boer, M. J. , Bruinink, C. M. , Zandvliet, H. J. W. , Gardeniers, H. J. G. E. , & Tas, N. R. (2019). Wafer-Scale Self-Aligned Fabrication of Nanometric Curved Tunneling Junctions. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII (pp. 2376-2379). [8808559] IEEE. https://doi.org/10.1109/TRANSDUCERS.2019.8808559

Veltkamp, H. W. , Zhao, Y. , De Boer, M. J. , Sanders, R. G. P. , Wiegerink, R. J. , & Lotters, J. C. (2019). High Power Si Sidewall Heaters for Fluidic Applications Fabricated by Trench-Assisted Surface Channel Technology. In 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019 (pp. 648-651). [8870667] IEEE. https://doi.org/10.1109/MEMSYS.2019.8870667

Veltkamp, H-W. , Zhao, Y. , de Boer, M. J. , Wiegerink, R. J. , & Lötters, J. C. (2019). Towards a miniaturized Wobbe index meter, an essential piece of equipment in the future?. 30-31. Abstract from Combura Symposium 2019, Soesterberg, Netherlands.

Zhao, Y. , Veltkamp, H-W., Schut, T. V. P. , Groenesteijn, J. , de Boer, M. J. , Wiegerink, R. J. , & Lötters, J. C. (2019). Highly-doped bulk silicon microheaters and electrodes embedded between free-hanging microfluidic channels by surface channel technology. 116-119. Paper presented at 4th Conference on MicroFluidic Handling Systems, MFHS 2019, Enschede, Netherlands.

Yu, Q. , Veltkamp, H-W. , de Boer, M. J. , Wiegerink, R. J. , & Lötters, J. C. (2019). Fabrication method for microfluidic channels with circular cross section for micro-Coriolis mass flow sensor. 103-105. Paper presented at 4th Conference on MicroFluidic Handling Systems, MFHS 2019, Enschede, Netherlands.

Zhao, Y. , Veltkamp, H-W., Schut, T. V. P. , Groenesteijn, J. , de Boer, M. J. , Wiegerink, R. J. , & Lötters, J. C. (2019). Highly-doped in-plane Si electrodes embedded between free-hanging microfluidic channels. Abstract from 45th International Conference on Micro- and Nano-Engineering, MNE 2019, Rhodes, Greece.

Veltkamp, H-W. , Zhao, Y. , de Boer, M. J. , Wiegerink, R. J. , & Lötters, J. C. (2019). A short post-processing method for high aspect ratio trenches after Bosch etching. Abstract from 45th International Conference on Micro- and Nano-Engineering, MNE 2019, Rhodes, Greece.

Thannhauser, J., Nas, J., van Grunsven, P. M. , Meinsma, G. , Zwart, H. J. , de Boer, M. J., van Royen, N., Bonnes, J. L., & Brouwer, M. A. (2019). The ventricular fibrillation waveform in relation to shock success in early vs. late phases of out-of-hospital resuscitation. Resuscitation, 139, 99-105. https://doi.org/10.1016/j.resuscitation.2019.04.010

Veltkamp, H-W. , Zhao, Y. , de Boer, M. J. , Sanders, R. G. P. , Wiegerink, R. J. , & Lötters, J. C. (2019). High power Si sidewall heaters for fluidic application fabricated by trench-assisted surface channel technology. In 2019 IEEE 32nd Conference on Micro Electro Mechanical Systems (MEMS) (Vol. 32, pp. 648-651). IEEE.

Zhao, Y. , Veltkamp, H-W. , de Boer, M. J. , Zeng, Y. , Groenesteijn, J. , Wiegerink, R. J. , & Lötters, J. C. (2018). Design principles and fabrication method for a miniaturized fuel gas combustion reactor. In Proceedings of the 21st Semiconductor Advances for Future Electronics (SAFE) workshop (pp. 10). University of Twente.

Veltkamp, H-W. , Zhao, Y. , de Boer, M. J. , Groenesteijn, J. , Wiegerink, R. J. , & Lötters, J. C. (2018). Trench-assisted surface channel technology (TASCT) as platform for high-temperature physical parameter sensing. In Proceedings of the 21st Semiconductor Advances for Future Electronics (SAFE) workshop (pp. 9). University of Twente.

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m.j.deboer@utwente.nl

www.utwente.nl/mesaplus/nanolab/

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University of Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Nanolab (building no. 16), room 1003
Hallenweg 23
7522NH Enschede
The Netherlands

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University of Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Nanolab 1003
P.O. Box 217
7500 AE Enschede
The Netherlands

Faculty of Electrical Engineering, Mathematics and Computer Science (EEMCS), Nanolab (NanoLab)

University of Twente Drienerlolaan 5
7522 NB Enschede

+31 (0)53 489 9111
info@utwente.nl
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