Ir. M.J.S. Bonnema | People Pages: Find employees & contact details | University of Twente

Expertise

Engineering
- Flow Sensor
- Side Wall
- Microchannel
- Thermal Conductivity
- Conductivity Sensor
- Nitrogen
Material Science
- Silicon
- Permittivity

Organisations

Publications

2026

Microfluidic thermal flow sensor with extended range via silicon sidewall heaters and a thermal shunt (2026)Sensors and Actuators A: Physical, 404. Article 117770. Bonnema, M. J. S., Winnen, V., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.1016/j.sna.2026.117770Simultaneous measurement of flow and volumetric heat capacity using a microfluidic sensor (2026)Sensors and Actuators A: Physical, 409. Article 118110 (E-pub ahead of print/First online). Bonnema, M. J. S., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.1016/j.sna.2026.118110Self-Aligned Sidewall Heaters Applied in a Microfluidic Thermal Flow Sensor (2026)In 2026 IEEE 39th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 139-142). Article 11419397. IEEE Advancing Technology for Humanity. Bonnema, M. J. S., Džemaili, N., Veltkamp, H.-W., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.1109/MEMS64181.2026.11419397

2025

Inline Microfluidic Thermal Conductivity Sensor Using a Suspended Highly-Doped Silicon Heater (2025)Journal of micromechanics and microengineering, 35(8). Article 085017. Bonnema, M. J. S., Harbers, J., Zeng, Y., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.1088/1361-6439/adfa2eMicrofluidic Thermal Flow Sensor with Extended Linear Range and Reduced Heat Dissipation Using a Shunt (2025)In 2025 23rd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) (pp. 586-589). Article 11109290. IEEE Advancing Technology for Humanity. Bonnema, M. J. S., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.1109/Transducers61432.2025.11109290Inline Microfluidic Thermal Conductivity Sensor Using A Suspended Silicon Heater (2025)In 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 169-172). IEEE. Bonnema, M. J. S., Harbers, J., Zeng, Y., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.1109/MEMS61431.2025.10917777

2024

Micro Coriolis Mass Flow Sensor with Large Channel Diameter Realized by HNA Wet Etching (2024)Sensors (Switzerland), 24(24). Article 7952. Yu, Q., Bonnema, M. J. S., Yariesbouei, M., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.3390/s24247952Flow-through Microfluidic Relative Permittivity Sensor Using Highly-Doped Silicon Sidewall Electrodes (2024)Journal of micromechanics and microengineering, 34(11). Article 115002. Bonnema, M. J. S., Veltkamp, H.-W., Alveringh, D., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.1088/1361-6439/ad7ec6Inline and Real-Time Microfluidic Relative Permittivity Sensor Using Highly Doped Silicon Sidewall Electrodes (2024)In 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 805-808). Bonnema, M. J. S., Veltkamp, H.-W., Alveringh, D., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.1109/mems58180.2024.10439445Microfabrication Technology for Isolated Silicon Sidewall Electrodes and Heaters (2024)In The 5th Conference on MicroFluidic Handling Systems (pp. 53-56). Bonnema, M. J. S., Veltkamp, H.-W., Wiegerink, R. J. & Lötters, J. C.

Research profiles

Address

University of Twente

Carré (building no. 15), room C1528
Hallenweg 23
7522 NH Enschede
Netherlands

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Organisations