Expertise
Engineering
- Side Wall
- Sensor
- Microchannel
- Microfluidics
- Using Sensor
- Full Scale
Chemical Engineering
- Microfabrication
- Silicon
Organisations
Publications
2024
Inline and Real-Time Microfluidic Relative Permittivity Sensor Using Highly Doped Silicon Sidewall ElectrodesIn 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 805-808). Bonnema, M. J. S., Veltkamp, H.-W., Alveringh, D., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.1109/mems58180.2024.10439445Microfabrication Technology for Isolated Silicon Sidewall Electrodes and HeatersIn The 5th Conference on MicroFluidic Handling Systems (pp. 53-56). Bonnema, M. J. S., Veltkamp, H.-W., Wiegerink, R. J. & Lötters, J. C.
Research profiles
Address
![](https://1348661504.rsc.cdn77.org/.uc/ia3848a2a0103e7e5110085e4f403ff94cdef11c068080801e3bc0268018041/carre.png)
University of Twente
Carré (building no. 15), room C1528
Hallenweg 23
7522 NH Enschede
Netherlands
University of Twente
Carré C1528
P.O. Box 217
7500 AE Enschede
Netherlands