dr.ir. N.R. Tas (Niels)

Engineering & Materials Science

# Etching
# Fabrication
# Lithography
# Silicon

Chemistry

# Etching

Physics & Astronomy

# Fabrication
# Lithography
# Wafers

Faculty of Science and Technology (TNW), Mesoscale Chemical Systems (MCS)

Dituri, F., Centonze, M. , Berenschot, E. J. W. , Tas, N. R. , Susarrey-Arce, A., & Krol, S. (2021). Complex tumor spheroid formation and one‐step cancer‐ associated fibroblasts purification from hepatocellular carcinoma tissue promoted by inorganic surface topography. Nanomaterials, 11(12), [3233]. https://doi.org/10.3390/nano11123233

Jonker, D., Jafari, Z. , Winczewski, J. P. , Eyovge, C. , Berenschot, J. W. , Tas, N. R. , Gardeniers, J. G. E., De Leon, I. , & Susarrey-Arce, A. (2021). A wafer-scale fabrication method for three-dimensional plasmonic hollow nanopillars. Nanoscale Advances, 3(17), 4926-4939. https://doi.org/10.1039/d1na00316j

Zhao, Y. , Janssens, Y. L. , Veltkamp, H. W. , De Boer, M. J. , Groenesteijn, J. , Tas, N. R. , Wiegerink, R. J. , & Lötters, J. C. (2021). Sacrificial grid release technology: A versatile release concept for MEMS structures. Journal of micromechanics and microengineering, 31(4), [045013]. https://doi.org/10.1088/1361-6439/abe7da

Seyfert, C. , Berenschot, E. J. W. , Tas, N. R. , Susarrey-Arce, A. , & Marin, A. (2021). Evaporation-driven colloidal cluster assembly using droplets on superhydrophobic fractal-like structures. Soft matter, 17(3), 506-515. https://doi.org/10.1039/D0SM01346C

Jonker, D., Jafari, Z. , Winczewski, J. P. , Eyovge, C. , Berenschot, J. W. , Tas, N. R. , Gardeniers, J. G. E., De Leon, I. , & Susarrey-Arce, A. (2020). Wafer-scale fabrication of periodic Au-hollow nanopillars for SERS applications. In Novel Optical Materials and Applications, NOMA 2020 (Vol. Part F186-NOMA 2020). [143868] Optical Society of America. https://doi.org/10.1364/NOMA.2020.NoM3C.5

Lafuente, M. , Berenschot, E. J. W. , Tiggelaar, R. M., Rodrigo, S. G., Mallada, R. , Tas, N. R., & Pina, M. P. (2020). Attomolar SERS detection of organophosphorous pesticides using silver mirror–like micro-pyramids as active substrate. Microchimica acta, 187(4), [247]. https://doi.org/10.1007/s00604-020-4216-9

Van Kampen, C. P. , Berenschot, E. J. , Burger, G. J. , Tiggelaar, R. M. , Sanders, R. G. , Gardeniers, H. G. , & Tas, N. R. (2020). Massive Parallel NEMS Flow Restriction Fabricated Using Self-Aligned 3D-Crystallographic Nanolithography. In 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 (pp. 1106-1109). [9056175] (Proceedings IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2020). IEEE. https://doi.org/10.1109/MEMS46641.2020.9056175

Jonker, D. , Kooijman, L. , Pordeli, Y. , van der Wel, B. , Berenschot, E. , Borgelink, B. , Le-The, H. , de Boer, M. , Eijkel, J. , Hueting, R. , Tiggelaar, R. , van Houselt, A. , Gardeniers, H. , & Tas, N. (2020). Wafer-scale fabrication and modification of silicon nano-pillar arrays for nanoelectronics, nanofluidics and beyond. International Journal of Nanotechnology, 17(7-10), 583-606. https://doi.org/10.1504/IJNT.2020.111322

Ni, S. , Berenschot, E. J. W. , Westerik, P. J. , de Boer, M. J. , Wolf, R. , Le-The, H. , Gardeniers, H. J. G. E. , & Tas, N. R. (2020). Wafer-scale 3D shaping of high aspect ratio structures by multistep plasma etching and corner lithography. Microsystems and Nanoengineering, 6(1), [25]. https://doi.org/10.1038/s41378-020-0134-6

Kooijman, L. J. , Pordeli, Y. , van der Wel, B. Y. , Berenschot, J. W. , Eijkel, J. C. T. , & Tas, N. R. (2020). High-performance ceramic EOF pump realized by massively parallel sacrificial silicon nano-pillar moulding. In 23rd International Conference on Miniaturized Systems for Chemistry and Life Sicences: uTAS 2019 (pp. 1188-1189). The Chemical and Biological Microsystems Society.

Vermeer, R. , Berenschot, E. , Sarajlic, E. , & Tas, N. (2019). Ultrasharp high-aspect-ratio tetrahedral molded tips. Sensors and materials, 31(9), 2811-2823. https://doi.org/10.18494/SAM.2019.2255

Pordeli, Y. , Borgelink, B. T. H. , Van Der Wel, B. Y. , Berenschot, E. J. W. , Dogan, T. , De Boer, M. J. , Bruinink, C. M. , Zandvliet, H. J. W. , Gardeniers, H. J. G. E. , & Tas, N. R. (2019). Wafer-Scale Self-Aligned Fabrication of Nanometric Curved Tunneling Junctions. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII (pp. 2376-2379). [8808559] IEEE. https://doi.org/10.1109/TRANSDUCERS.2019.8808559

Schüffelgen, P., Rosenbach, D. , Li, C., Schmitt, T. W., Schleenvoigt, M., Jalil, A. R., Schmitt, S., Kölzer, J., Wang, M., Bennemann, B., Parlak, U., Kibkalo, L., Trellenkamp, S., Grap, T., Meertens, D., Luysberg, M., Mussler, G. , Berenschot, E. , Tas, N., ... Grützmacher, D. (2019). Selective area growth and stencil lithography for in situ fabricated quantum devices. Nature nanotechnology, 14(9), 825-831. https://doi.org/10.1038/s41565-019-0506-y

Le-The, H. , Lozeman, J. J. A. , Lafuente, M. , Muñoz, P. , Bomer, J. G., Duy-Tong, H. , Berenschot, E. , Van Den Berg, A. , Tas, N. R. , Odijk, M. , & Eijkel, J. C. T. (2019). Wafer-scale fabrication of high-quality tunable gold nanogap arrays for surface-enhanced Raman scattering. Nanoscale, 11(25), 12152-12160. https://doi.org/10.1039/c9nr02215e

Le-The, H. , Tiggelaar, R. M. , Berenschot, E. , Van Den Berg, A. , Tas, N. , & Eijkel, J. C. T. (2019). Postdeposition UV-Ozone Treatment: An Enabling Technique to Enhance the Direct Adhesion of Gold Thin Films to Oxidized Silicon. ACS nano, 13, 6782-6789. https://doi.org/10.1021/acsnano.9b01403

Lafuente, M. , Berenschot, E. J. W. , Tiggelaar, R. M., Mallada, R. , Tas, N. R., & Pina, M. P. (2018). 3D fractals as SERS active platforms: Preparation and evaluation for gas phase detection of G-nerve agents. Micromachines, 9(2), [60]. https://doi.org/10.3390/mi9020060

Gill, T. M., Zhao, J. , Berenschot, E. J. W. , Tas, N., & Zheng, X. (2018). Conformal Electroless Nickel Plating on Silicon Wafers, Convex and Concave Pyramids, and Ultralong Nanowires. ACS Applied Materials and Interfaces, 10(26), 22834-22840. https://doi.org/10.1021/acsami.8b06002

Le-The, H. , Berenschot, E. , Tiggelaar, R. M. , Tas, N. R. , van den Berg, A. , & Eijkel, J. C. T. (2018). Large-scale fabrication of highly ordered sub-20 nm noble metal nanoparticles on silica substrates without metallic adhesion layers. Microsystems & nanoengineering, 4, [4]. https://doi.org/10.1038/s41378-017-0001-2

Sun, X. , Berenschot, E. J. W. , Veltkamp, H-W. , Gardeniers, H. J. G. E. , & Tas, N. R. (2018). Scalable 3D Nanoparticle Trap for Electron Microscopy Analysis. Small, 14(48), [1803283]. https://doi.org/10.1002/smll.201803283

Vijselaar, W. , Westerik, P. , Veerbeek, J. , Tiggelaar, R. M. , Berenschot, E. , Tas, N. R. , Gardeniers, H. , & Huskens, J. (2018). Spatial decoupling of light absorption and catalytic activity of Ni–Mo-loaded high-aspect-ratio silicon microwire photocathodes. Nature energy, 3(3), 185-192. https://doi.org/10.1038/s41560-017-0068-x

Malankowska, M. , Schlautmann, S. , Berenschot, E. J. W. , Tiggelaar, R. M., Pina, M. P., Mallada, R. , Tas, N. R. , & Gardeniers, H. (2018). Three-dimensional fractal geometry for gas permeation in microchannels. Micromachines, 9(2), [45]. https://doi.org/10.3390/mi9020045

Wilbers, J. G. E. , Berenschot, J. W. , Tiggelaar, R. M. , Dogan, T., Sugimura, K. , Van Der Wiel, W. G. , Gardeniers, J. G. E. , & Tas, N. R. (2018). 3D-fabrication of tunable and high-density arrays of crystalline silicon nanostructures. Journal of micromechanics and microengineering, 28(4), [044003]. https://doi.org/10.1088/1361-6439/aaab2d

Westerik, P. J. , Vijselaar, W. J. C. , Berenschot, J. W. , Tas, N. R. , Huskens, J. , & Gardeniers, J. G. E. (2018). Sidewall patterning - A new wafer-scale method for accurate patterning of vertical silicon structures. Journal of micromechanics and microengineering, 28(1), [015008]. https://doi.org/10.1088/1361-6439/aa9c20

Prokaznikov, A. , Tas, N. , & Svetovoy, V. (2017). Surface assisted combustion of hydrogen-oxygen mixture in nanobubbles produced by electrolysis. Energies, 10(2), [178]. https://doi.org/10.3390/en10020178

Baum, M., Rebiscoul, D., Tardif, S. , Tas, N., Mercury, L., & Rieutord, F. (2017). X-Ray Reflectivity analysis of SiO2 nanochannels filled with water and ions: a new method for the determination of the spatial distribution of ions inside confined media. Procedia earth and planetary science, 17, 682-685. https://doi.org/10.1016/j.proeps.2016.12.146

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