Expertise
Engineering & Materials Science
# Etching
# Fabrication
# Lithography
# Silicon
Chemistry
# Etching
Physics & Astronomy
# Fabrication
# Lithography
# Wafers
Organisations
Publications
Recent
Dituri, F., Centonze, M.
, Berenschot, E. J. W.
, Tas, N. R.
, Susarrey-Arce, A., & Krol, S. (2021).
Complex tumor spheroid formation and one‐step cancer‐ associated fibroblasts purification from hepatocellular carcinoma tissue promoted by inorganic surface topography.
Nanomaterials,
11(12), [3233].
https://doi.org/10.3390/nano11123233
Jonker, D., Jafari, Z.
, Winczewski, J. P.
, Eyovge, C.
, Berenschot, J. W.
, Tas, N. R.
, Gardeniers, J. G. E., De Leon, I.
, & Susarrey-Arce, A. (2021).
A wafer-scale fabrication method for three-dimensional plasmonic hollow nanopillars.
Nanoscale Advances,
3(17), 4926-4939.
https://doi.org/10.1039/d1na00316j
Zhao, Y.
, Janssens, Y. L.
, Veltkamp, H. W.
, De Boer, M. J.
, Groenesteijn, J.
, Tas, N. R.
, Wiegerink, R. J.
, & Lötters, J. C. (2021).
Sacrificial grid release technology: A versatile release concept for MEMS structures.
Journal of micromechanics and microengineering,
31(4), [045013].
https://doi.org/10.1088/1361-6439/abe7da
Jonker, D., Jafari, Z.
, Winczewski, J. P.
, Eyovge, C.
, Berenschot, J. W.
, Tas, N. R.
, Gardeniers, J. G. E., De Leon, I.
, & Susarrey-Arce, A. (2020).
Wafer-scale fabrication of periodic Au-hollow nanopillars for SERS applications. In
Novel Optical Materials and Applications, NOMA 2020 (Vol. Part F186-NOMA 2020). [143868] Optical Society of America.
https://doi.org/10.1364/NOMA.2020.NoM3C.5
Lafuente, M.
, Berenschot, E. J. W.
, Tiggelaar, R. M., Rodrigo, S. G., Mallada, R.
, Tas, N. R., & Pina, M. P. (2020).
Attomolar SERS detection of organophosphorous pesticides using silver mirror–like micro-pyramids as active substrate.
Microchimica acta,
187(4), [247].
https://doi.org/10.1007/s00604-020-4216-9
Van Kampen, C. P.
, Berenschot, E. J.
, Burger, G. J.
, Tiggelaar, R. M.
, Sanders, R. G.
, Gardeniers, H. G.
, & Tas, N. R. (2020).
Massive Parallel NEMS Flow Restriction Fabricated Using Self-Aligned 3D-Crystallographic Nanolithography. In
33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 (pp. 1106-1109). [9056175] (Proceedings IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2020). IEEE.
https://doi.org/10.1109/MEMS46641.2020.9056175
Jonker, D.
, Kooijman, L.
, Pordeli, Y.
, van der Wel, B.
, Berenschot, E.
, Borgelink, B.
, Le-The, H.
, de Boer, M.
, Eijkel, J.
, Hueting, R.
, Tiggelaar, R.
, van Houselt, A.
, Gardeniers, H.
, & Tas, N. (2020).
Wafer-scale fabrication and modification of silicon nano-pillar arrays for nanoelectronics, nanofluidics and beyond.
International Journal of Nanotechnology,
17(7-10), 583-606.
https://doi.org/10.1504/IJNT.2020.111322
Ni, S.
, Berenschot, E. J. W.
, Westerik, P. J.
, de Boer, M. J.
, Wolf, R.
, Le-The, H.
, Gardeniers, H. J. G. E.
, & Tas, N. R. (2020).
Wafer-scale 3D shaping of high aspect ratio structures by multistep plasma etching and corner lithography.
Microsystems and Nanoengineering,
6(1), [25].
https://doi.org/10.1038/s41378-020-0134-6
Kooijman, L. J.
, Pordeli, Y.
, van der Wel, B. Y.
, Berenschot, J. W.
, Eijkel, J. C. T.
, & Tas, N. R. (2020).
High-performance ceramic EOF pump realized by massively parallel sacrificial silicon nano-pillar moulding. In
23rd International Conference on Miniaturized Systems for Chemistry and Life Sicences: uTAS 2019 (pp. 1188-1189). The Chemical and Biological Microsystems Society.
Vermeer, R.
, Berenschot, E.
, Sarajlic, E.
, & Tas, N. (2019).
Ultrasharp high-aspect-ratio tetrahedral molded tips.
Sensors and materials,
31(9), 2811-2823.
https://doi.org/10.18494/SAM.2019.2255
Pordeli, Y.
, Borgelink, B. T. H.
, Van Der Wel, B. Y.
, Berenschot, E. J. W.
, Dogan, T.
, De Boer, M. J.
, Bruinink, C. M.
, Zandvliet, H. J. W.
, Gardeniers, H. J. G. E.
, & Tas, N. R. (2019).
Wafer-Scale Self-Aligned Fabrication of Nanometric Curved Tunneling Junctions. In
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII (pp. 2376-2379). [8808559] IEEE.
https://doi.org/10.1109/TRANSDUCERS.2019.8808559
Schüffelgen, P., Rosenbach, D.
, Li, C., Schmitt, T. W., Schleenvoigt, M., Jalil, A. R., Schmitt, S., Kölzer, J., Wang, M., Bennemann, B., Parlak, U., Kibkalo, L., Trellenkamp, S., Grap, T., Meertens, D., Luysberg, M., Mussler, G.
, Berenschot, E.
, Tas, N., ... Grützmacher, D. (2019).
Selective area growth and stencil lithography for in situ fabricated quantum devices.
Nature nanotechnology,
14(9), 825-831.
https://doi.org/10.1038/s41565-019-0506-y
Le-The, H.
, Lozeman, J. J. A.
, Lafuente, M.
, Muñoz, P.
, Bomer, J. G., Duy-Tong, H.
, Berenschot, E.
, Van Den Berg, A.
, Tas, N. R.
, Odijk, M.
, & Eijkel, J. C. T. (2019).
Wafer-scale fabrication of high-quality tunable gold nanogap arrays for surface-enhanced Raman scattering.
Nanoscale,
11(25), 12152-12160.
https://doi.org/10.1039/c9nr02215e
Lafuente, M.
, Berenschot, E. J. W.
, Tiggelaar, R. M., Mallada, R.
, Tas, N. R., & Pina, M. P. (2018).
3D fractals as SERS active platforms: Preparation and evaluation for gas phase detection of G-nerve agents.
Micromachines,
9(2), [60].
https://doi.org/10.3390/mi9020060
Gill, T. M., Zhao, J.
, Berenschot, E. J. W.
, Tas, N., & Zheng, X. (2018).
Conformal Electroless Nickel Plating on Silicon Wafers, Convex and Concave Pyramids, and Ultralong Nanowires.
ACS Applied Materials and Interfaces,
10(26), 22834-22840.
https://doi.org/10.1021/acsami.8b06002
Le-The, H.
, Berenschot, E.
, Tiggelaar, R. M.
, Tas, N. R.
, van den Berg, A.
, & Eijkel, J. C. T. (2018).
Large-scale fabrication of highly ordered sub-20 nm noble metal nanoparticles on silica substrates without metallic adhesion layers.
Microsystems & nanoengineering,
4, [4].
https://doi.org/10.1038/s41378-017-0001-2
Vijselaar, W.
, Westerik, P.
, Veerbeek, J.
, Tiggelaar, R. M.
, Berenschot, E.
, Tas, N. R.
, Gardeniers, H.
, & Huskens, J. (2018).
Spatial decoupling of light absorption and catalytic activity of Ni–Mo-loaded high-aspect-ratio silicon microwire photocathodes.
Nature energy,
3(3), 185-192.
https://doi.org/10.1038/s41560-017-0068-x
Malankowska, M.
, Schlautmann, S.
, Berenschot, E. J. W.
, Tiggelaar, R. M., Pina, M. P., Mallada, R.
, Tas, N. R.
, & Gardeniers, H. (2018).
Three-dimensional fractal geometry for gas permeation in microchannels.
Micromachines,
9(2), [45].
https://doi.org/10.3390/mi9020045
Wilbers, J. G. E.
, Berenschot, J. W.
, Tiggelaar, R. M.
, Dogan, T., Sugimura, K.
, Van Der Wiel, W. G.
, Gardeniers, J. G. E.
, & Tas, N. R. (2018).
3D-fabrication of tunable and high-density arrays of crystalline silicon nanostructures.
Journal of micromechanics and microengineering,
28(4), [044003].
https://doi.org/10.1088/1361-6439/aaab2d
Westerik, P. J.
, Vijselaar, W. J. C.
, Berenschot, J. W.
, Tas, N. R.
, Huskens, J.
, & Gardeniers, J. G. E. (2018).
Sidewall patterning - A new wafer-scale method for accurate patterning of vertical silicon structures.
Journal of micromechanics and microengineering,
28(1), [015008].
https://doi.org/10.1088/1361-6439/aa9c20
Prokaznikov, A.
, Tas, N.
, & Svetovoy, V. (2017).
Surface assisted combustion of hydrogen-oxygen mixture in nanobubbles produced by electrolysis.
Energies,
10(2), [178].
https://doi.org/10.3390/en10020178
Baum, M., Rebiscoul, D., Tardif, S.
, Tas, N., Mercury, L., & Rieutord, F. (2017).
X-Ray Reflectivity analysis of SiO2 nanochannels filled with water and ions: a new method for the determination of the spatial distribution of ions inside confined media.
Procedia earth and planetary science,
17, 682-685.
https://doi.org/10.1016/j.proeps.2016.12.146
UT Research Information System
Courses Academic Year 2021/2022
Courses in the current academic year are added at the moment they are finalised in the Osiris system. Therefore it is possible that the list is not yet complete for the whole academic year.
Courses Academic Year 2020/2021
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7522NH Enschede
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Mailing Address
University of Twente
Faculty of Science and Technology
Carré
C1413
P.O. Box 217
7500 AE Enschede
The Netherlands