dr.ir. N.R. Tas (Niels)

Engineering & Materials Science

# Etching
# Fabrication
# Lithography
# Silicon

Chemistry

# Etching

Physics & Astronomy

# Fabrication
# Lithography
# Wafers

Faculty of Science and Technology (TNW), Mesoscale Chemical Systems (MCS)

Schmitt, T. W., Connolly, M. R., Schleenvoigt, M., Liu, C., Kennedy, O., Chávez-Garcia, J. M., Jalil, A. R., Bennemann, B., Trellenkamp, S., Lentz, F., Neumann, E., Lindström, T., De Graaf, S. E. , Berenschot, E. , Tas, N., Mussler, G., Petersson, K. D., Grützmacher, D., & Schüffelgen, P. (2022). Integration of Topological Insulator Josephson Junctions in Superconducting Qubit Circuits. Nano letters, 22(7), 2595-2602. https://doi.org/10.1021/acs.nanolett.1c04055

Jonker, D. , Berenschot, E. J. W. , Tiggelaar, R. M. , Tas, N. R. , Van Houselt, A. , & Gardeniers, H. J. G. E. (2022). A Self-Aligned Wafer-Scale Gate-All-Around Aperture Definition Method for Silicon Nanostructures. In 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 (pp. 561-564). (IEEE Symposium on Mass Storage Systems and Technologies; Vol. 2022-January). IEEE Computer Society. https://doi.org/10.1109/MEMS51670.2022.9699565

Borgelink, B. T. H. , Berenschot, E. J. W. , Sanders, R. G. P. , Schlautmann, S. , Gardeniers, H. , & Tas, N. R. (2022). Self-Aligned Fabrication and Contact Line Pinning Characterization of Pedestal Nozzles. In 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 (pp. 259-262). (IEEE Symposium on Mass Storage Systems and Technologies; Vol. 2022-January). IEEE Computer Society. https://doi.org/10.1109/MEMS51670.2022.9699536

Borgelink, B. T. H. , Berenschot, E. J. W. , Sanders, R. G. P. , Schlautmann, S. , Tas, N. R. , & Gardeniers, H. J. G. E. (2022). Fabrication and characterization of microfluidic pedestal nozzles enabling geometric contact line pinning. Sensors and Actuators B: Chemical, 365, [131943]. https://doi.org/10.1016/j.snb.2022.131943

Jonker, D. , Berenschot, E. J. W. , Tas, N. R. , Tiggelaar, R. M. , van Houselt, A. , & Gardeniers, H. J. G. E. (2022). Large Dense Periodic Arrays of Vertically Aligned Sharp Silicon Nanocones. Nanoscale research letters, 17(1), [100]. https://doi.org/10.1186/s11671-022-03735-y

Berenschot, E. , Tiggelaar, R. M. , Borgelink, B., Van Kampen, C., Deenen, C. S., Pordeli, Y. , Witteveen, H. , Gardeniers, H. J. G. E. , & Tas, N. R. (2022). Self-Aligned Crystallographic Multiplication of Nanoscale Silicon Wedges for High-Density Fabrication of 3D Nanodevices. ACS Applied Nano Materials, 5(10), 15847-15854. https://doi.org/10.1021/acsanm.2c04079

Capuano, L. , Berenschot, J. W. , Tiggelaar, R. M. , Feinaeugle, M. , Tas, N. R. , Gardeniers, J. G. E. , & Römer, G. R. B. E. (2022). Fabrication of microstructures in the bulk and on the surface of sapphire by anisotropic selective wet etching of laser-affected volumes. Journal of micromechanics and microengineering, 32(12), [125003]. https://doi.org/10.1088/1361-6439/ac9911

Veltkamp, H. W., Janssens, Y. L. , de Boer, M. J. , Zhao, Y. , Wiegerink, R. J. , Tas, N. R. , & Lötters, J. C. (2022). Method for Keyhole-Free High-Aspect-Ratio Trench Refill by LPCVD. Micromachines, 13(11), [1908]. https://doi.org/10.3390/mi13111908

Borgelink, B. T. H. (2022). Microfluidic concepts for electrospinning. [PhD Thesis - Research UT, graduation UT, University of Twente]. University of Twente. https://doi.org/10.3990/1.9789036554015

Dituri, F., Centonze, M. , Berenschot, E. J. W. , Tas, N. R. , Susarrey-Arce, A., & Krol, S. (2021). Complex tumor spheroid formation and one‐step cancer‐ associated fibroblasts purification from hepatocellular carcinoma tissue promoted by inorganic surface topography. Nanomaterials, 11(12), [3233]. https://doi.org/10.3390/nano11123233

Jonker, D., Jafari, Z., Winczewski, J. P. , Eyovge, C. , Berenschot, J. W. , Tas, N. R. , Gardeniers, J. G. E., De Leon, I. , & Susarrey-Arce, A. (2021). A wafer-scale fabrication method for three-dimensional plasmonic hollow nanopillars. Nanoscale Advances, 3(17), 4926-4939. https://doi.org/10.1039/d1na00316j

Zhao, Y., Janssens, Y. L. , Veltkamp, H. W. , De Boer, M. J. , Groenesteijn, J. , Tas, N. R. , Wiegerink, R. J. , & Lötters, J. C. (2021). Sacrificial grid release technology: A versatile release concept for MEMS structures. Journal of micromechanics and microengineering, 31(4), [045013]. https://doi.org/10.1088/1361-6439/abe7da

Seyfert, C. , Berenschot, E. J. W. , Tas, N. R. , Susarrey-Arce, A. , & Marin, A. (2021). Evaporation-driven colloidal cluster assembly using droplets on superhydrophobic fractal-like structures. Soft matter, 17(3), 506-515. https://doi.org/10.1039/D0SM01346C

Jonker, D., Jafari, Z., Winczewski, J. P. , Eyovge, C. , Berenschot, J. W. , Tas, N. R. , Gardeniers, J. G. E., De Leon, I. , & Susarrey-Arce, A. (2020). Wafer-scale fabrication of periodic Au-hollow nanopillars for SERS applications. In Novel Optical Materials and Applications, NOMA 2020 (Vol. Part F186-NOMA 2020). [143868] Optical Society of America. https://doi.org/10.1364/NOMA.2020.NoM3C.5

Lafuente, M. , Berenschot, E. J. W. , Tiggelaar, R. M., Rodrigo, S. G., Mallada, R. , Tas, N. R., & Pina, M. P. (2020). Attomolar SERS detection of organophosphorous pesticides using silver mirror–like micro-pyramids as active substrate. Microchimica acta, 187(4), [247]. https://doi.org/10.1007/s00604-020-4216-9

Van Kampen, C. P. , Berenschot, E. J. , Burger, G. J. , Tiggelaar, R. M. , Sanders, R. G. , Gardeniers, H. G. , & Tas, N. R. (2020). Massive Parallel NEMS Flow Restriction Fabricated Using Self-Aligned 3D-Crystallographic Nanolithography. In 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 (pp. 1106-1109). [9056175] (Proceedings IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2020). IEEE. https://doi.org/10.1109/MEMS46641.2020.9056175

Jonker, D. , Kooijman, L., Pordeli, Y. , van der Wel, B. , Berenschot, E. , Borgelink, B. , Le-The, H. , de Boer, M. , Eijkel, J. , Hueting, R. , Tiggelaar, R. , van Houselt, A. , Gardeniers, H. , & Tas, N. (2020). Wafer-scale fabrication and modification of silicon nano-pillar arrays for nanoelectronics, nanofluidics and beyond. International Journal of Nanotechnology, 17(7-10), 583-606. https://doi.org/10.1504/IJNT.2020.111322

Ni, S. , Berenschot, E. J. W. , Westerik, P. J. , de Boer, M. J. , Wolf, R. , Le-The, H. , Gardeniers, H. J. G. E. , & Tas, N. R. (2020). Wafer-scale 3D shaping of high aspect ratio structures by multistep plasma etching and corner lithography. Microsystems and Nanoengineering, 6(1), [25]. https://doi.org/10.1038/s41378-020-0134-6

Kooijman, L. J., Pordeli, Y. , van der Wel, B. Y. , Berenschot, J. W. , Eijkel, J. C. T. , & Tas, N. R. (2020). High-performance ceramic EOF pump realized by massively parallel sacrificial silicon nano-pillar moulding. In 23rd International Conference on Miniaturized Systems for Chemistry and Life Sicences: uTAS 2019 (pp. 1188-1189). The Chemical and Biological Microsystems Society.

Vermeer, R. , Berenschot, E. , Sarajlic, E. , & Tas, N. (2019). Ultrasharp high-aspect-ratio tetrahedral molded tips. Sensors and materials, 31(9), 2811-2823. https://doi.org/10.18494/SAM.2019.2255

Pordeli, Y. , Borgelink, B. T. H. , Van Der Wel, B. Y. , Berenschot, E. J. W. , Dogan, T. , De Boer, M. J. , Bruinink, C. M. , Zandvliet, H. J. W. , Gardeniers, H. J. G. E. , & Tas, N. R. (2019). Wafer-Scale Self-Aligned Fabrication of Nanometric Curved Tunneling Junctions. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII (pp. 2376-2379). [8808559] IEEE. https://doi.org/10.1109/TRANSDUCERS.2019.8808559

Schüffelgen, P., Rosenbach, D. , Li, C., Schmitt, T. W., Schleenvoigt, M., Jalil, A. R., Schmitt, S., Kölzer, J., Wang, M., Bennemann, B., Parlak, U., Kibkalo, L., Trellenkamp, S., Grap, T., Meertens, D., Luysberg, M., Mussler, G. , Berenschot, E. , Tas, N., ... Grützmacher, D. (2019). Selective area growth and stencil lithography for in situ fabricated quantum devices. Nature nanotechnology, 14(9), 825-831. https://doi.org/10.1038/s41565-019-0506-y

Le-The, H. , Lozeman, J. J. A., Lafuente, M. , Muñoz, P. , Bomer, J. G., Duy-Tong, H. , Berenschot, E. , van den Berg, A. , Tas, N. R. , Odijk, M. , & Eijkel, J. C. T. (2019). Wafer-scale fabrication of high-quality tunable gold nanogap arrays for surface-enhanced Raman scattering. Nanoscale, 11(25), 12152-12160. https://doi.org/10.1039/c9nr02215e

Le-The, H. , Tiggelaar, R. M. , Berenschot, E. , Van Den Berg, A. , Tas, N. , & Eijkel, J. C. T. (2019). Postdeposition UV-Ozone Treatment: An Enabling Technique to Enhance the Direct Adhesion of Gold Thin Films to Oxidized Silicon. ACS nano, 13, 6782-6789. https://doi.org/10.1021/acsnano.9b01403

Lafuente, M. , Berenschot, E. J. W. , Tiggelaar, R. M., Mallada, R. , Tas, N. R., & Pina, M. P. (2018). 3D fractals as SERS active platforms: Preparation and evaluation for gas phase detection of G-nerve agents. Micromachines, 9(2), [60]. https://doi.org/10.3390/mi9020060

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Courses in the current academic year are added at the moment they are finalised in the Osiris system. Therefore it is possible that the list is not yet complete for the whole academic year.