Expertise
Engineering
- Fabrication
Material Science
- Silicon
- Nanocrystalline Material
- Lithography
- Silicon Nitride
- Devices
Chemistry
- Procedure
- Pyramidal Crystal
Organisations
Publications
2024
Residual Stress Analysis of Thin Film Materials for Fabricating Suspended Low Stress Si3N4 Waveguides on SapphireIn 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 (pp. 2086-2089). IEEE. Berenschot, E., Martinussen, S., Wang, K., García-Blanco, S., Tas, N. & Tiggelaar, R.https://ieeexplore.ieee.org/document/10516852Microfabricated Platform for Directional Neural Microcircuits in Silicon-GlassIn 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 (pp. 2169-2172). IEEE. De Boer, D., van Voorst, T. W., Berenschot, E. J. W., Cornelisse, L. N. & Tas, N. R.Electrochemical Sensing with Spatially Patterned Pt Octahedra Electrodes, Article 2300878. Jonker, D., Eyovge, C., Berenschot, E., Di Palma, V., Wasserberg, D., Michel-Souzy, S., Jonkheijm, P., Krol, S., Gardeniers, H., Creatore, M., Tas, N. & Susarrey-Arce, A.https://doi.org/10.1002/admt.202300878
2023
Self-Aligned Formation and Positioning of Nanogap TemplatesIn 2023 IEEE Nanotechnology Materials and Devices Conference (NMDC) (pp. 284-289). IEEE. Boer, D. D., Berenschot, E., Pordeli, Y. & Tas, N.https://doi.org/10.1109/NMDC57951.2023.10344109Exploring the surface-enhanced Raman scattering (SERS) activity of gold nanostructures embedded around nanogaps at wafer scale: Simulations and experiments, Article 101929. Lafuente, M., Muñoz, P., Berenschot, E. J. W., Tiggelaar, R. M., Susarrey-Arce, A., Rodrigo, S. G., Kooijman, L. J., García-Blanco, S. M., Mallada, R., Pina, M. P. & Tas, N. R.https://doi.org/10.1016/j.apmt.2023.101929Single-molecule super-resolution imaging of microfabricated 3D substrates for 3D cell culture (Conference Presentation). Cabriel, C., Córdova-Castro, M., Berenschot, E., Dávila-Lezema, A., Pondman, K., Gac, S. L., Tas, N., Susarrey-Arce, A. & Izeddin, I.https://doi.org/10.1117/12.26489893d Self-Aligned Fabrication of Suspended Nanowires by Crystallographic NanolithographyIn 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems, MEMS 2023 (pp. 639-642). IEEE. Berenschot, E. J. W., Pordeli, Y., Kooijman, L. J., Janssens, Y. L., Tiggelaar, R. M. & Tas, N. R.https://doi.org/10.1109/MEMS49605.2023.10052139Lateral Fractal Formation by Crystallographic Silicon Micromachining, Article 202. Kooijman, L. J., Pordeli, Y., Berenschot, J. W. & Tas, N. R.https://doi.org/10.3390/fractalfract7020202Retraction Note: Attomolar SERS detection of organophosphorous pesticides using silver mirrorālike micro-pyramids as active substrate, Article 38. Lafuente, M., Berenschot, E. J. W., Tiggelaar, R. M., Rodrigo, S. G., Mallada, R., Tas, N. R. & Pina, M. P.https://doi.org/10.1007/s00604-022-05620-y
2022
Method for Keyhole-Free High-Aspect-Ratio Trench Refill by LPCVD, Article 1908. Veltkamp, H.-W., Janssens, Y. L., de Boer, M. J., Zhao, Y., Wiegerink, R. J., Tas, N. R. & Lötters, J. C.https://doi.org/10.3390/mi13111908Self-Aligned Crystallographic Multiplication of Nanoscale Silicon Wedges for High-Density Fabrication of 3D Nanodevices, 15847-15854. Berenschot, E., Tiggelaar, R. M., Borgelink, B., Van Kampen, C., Deenen, C. S., Pordeli, Y., Witteveen, H., Gardeniers, H. J. G. E. & Tas, N. R.https://doi.org/10.1021/acsanm.2c04079Large Dense Periodic Arrays of Vertically Aligned Sharp Silicon Nanocones, Article 100. Jonker, D., Berenschot, E. J. W., Tas, N. R., Tiggelaar, R. M., van Houselt, A. & Gardeniers, H. J. G. E.https://doi.org/10.1186/s11671-022-03735-yLight source, mems optical switch, sensor and methods for manufacturing the same. Berenschot, J. W., Garcia Blanco, S. M., Martinussen, S., Tas, N. R. & Tiggelaar, R. M.Fabrication of microstructures in the bulk and on the surface of sapphire by anisotropic selective wet etching of laser-affected volumes, Article 125003. Capuano, L., Berenschot, J. W., Tiggelaar, R. M., Feinaeugle, M., Tas, N. R., Gardeniers, J. G. E. & Römer, G. R. B. E.https://doi.org/10.1088/1361-6439/ac9911Fabrication and characterization of microfluidic pedestal nozzles enabling geometric contact line pinning, Article 131943. Borgelink, B. T. H., Berenschot, E. J. W., Sanders, R. G. P., Schlautmann, S., Tas, N. R. & Gardeniers, H. J. G. E.https://doi.org/10.1016/j.snb.2022.131943Microfluidic concepts for electrospinning. University of Twente. Borgelink, B. T. H.https://doi.org/10.3990/1.9789036554015Fabrication and characterization of symmetric Au-nanostructures with SERS activity: (Student paper)In ECIO 2022: 23rd European Conference on Integrated Optics: 4th May - 6th May, Milan, Italy (pp. 54-56). Politecnico di Milano. Lafuente, M., Berenschot, E. J. W., Tiggelaar, R. M., Susarrey Arce, A., Mallada, R., Pina, M. P., García Blanco, S. M. & Tas, N. R.Low-stress Si3N4 waveguides on sapphire substrate: (Student paper)In ECIO 2022: 23rd European Conference on Integrated Optics: 4th May - 6th May, Milan, Italy (pp. 54-56). Politecnico di Milano. Wang, K., Berenschot, E. J. W., Dijkstra, M., Tiggelaar, R. M., Martinussen, S. M., Chang, L., Hendriks, W. A. P. M., Borgelink, B. T. H., Frentrop, R. N., García Blanco, S. M., Tas, N. R. & Tkachuk, V. V.Integration of Topological Insulator Josephson Junctions in Superconducting Qubit Circuits, 2595-2602. Schmitt, T. W., Connolly, M. R., Schleenvoigt, M., Liu, C., Kennedy, O., Chávez-Garcia, J. M., Jalil, A. R., Bennemann, B., Trellenkamp, S., Lentz, F., Neumann, E., Lindström, T., De Graaf, S. E., Berenschot, E., Tas, N., Mussler, G., Petersson, K. D., Grützmacher, D. & Schüffelgen, P.https://doi.org/10.1021/acs.nanolett.1c04055Fractals in tissue engineering. Arturo, S. A., Erwin, B., Niels, T. & Silke, K.Self-Aligned Fabrication and Contact Line Pinning Characterization of Pedestal NozzlesIn 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 (pp. 259-262). IEEE. Borgelink, B. T. H., Berenschot, E. J. W., Sanders, R. G. P., Schlautmann, S., Gardeniers, H. & Tas, N. R.https://doi.org/10.1109/MEMS51670.2022.9699536A Self-Aligned Wafer-Scale Gate-All-Around Aperture Definition Method for Silicon NanostructuresIn 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 (pp. 561-564). IEEE. Jonker, D., Berenschot, E. J. W., Tiggelaar, R. M., Tas, N. R., Van Houselt, A. & Gardeniers, H. J. G. E.https://doi.org/10.1109/MEMS51670.2022.9699565Fractals in tissue engineering. Susarrey Arce, A., Krol, S., Berenschot, E. & Tas, N.
2021
Complex tumor spheroid formation and oneāstep cancerā associated fibroblasts purification from hepatocellular carcinoma tissue promoted by inorganic surface topography, Article 3233. Dituri, F., Centonze, M., Berenschot, E. J. W., Tas, N. R., Susarrey-Arce, A. & Krol, S.https://doi.org/10.3390/nano11123233A wafer-scale fabrication method for three-dimensional plasmonic hollow nanopillars, 4926-4939. Jonker, D., Jafari, Z., Winczewski, J. P., Eyovge, C., Berenschot, J. W., Tas, N. R., Gardeniers, J. G. E., De Leon, I. & Susarrey-Arce, A.https://doi.org/10.1039/d1na00316j
Research profiles
Courses academic year 2023/2024
Courses in the current academic year are added at the moment they are finalised in the Osiris system. Therefore it is possible that the list is not yet complete for the whole academic year.
- 191211208 - Internship EE
- 191211219 - Master Thesis Project
- 191211300 - MEMS Design
- 191211650 - Multi-Disciplinary Design Project
- 193640999 - Internship BME
- 193780000 - C.S. Mesoscale Chemical Systems
- 201600017 - Final Project Preparation
- 201600044 - Nanotechnology Design Project
- 201600187 - Individual Project
- 201700174 - Internship & Job Orientation Project NT
- 201900200 - Final Project EMSYS
- 201900223 - Capita Selecta Electrical Engineering
- 201900246 - A first practical course in Electronics
- 202000665 - Micro Electro- Mechanical Systems Design
- 202001162 - Bachelor Thesis EE
- 202001434 - Internship EMSYS
- 202100303 - Advanced MEMS Design
- 202200253 - FEM theory and COMSOL SIM nanodevices
- 202200257 - Nano Master Thesis
- 202300070 - Final Project EMSYS
Courses academic year 2022/2023
- 191211208 - Internship EE
- 191211219 - Master Thesis Project
- 191211300 - MEMS Design
- 191211650 - Multi-Disciplinary Design Project
- 193640999 - Internship BME
- 193780000 - C.S. Mesoscale Chemical Systems
- 201600017 - Final Project Preparation
- 201600044 - Nanotechnology Design Project
- 201600187 - Individual Project
- 201700174 - Internship & Job Orientation Project NT
- 201900200 - Final Project EMSYS
- 201900223 - Capita Selecta Electrical Engineering
- 202000665 - Micro Electro- Mechanical Systems Design
- 202001434 - Internship EMSYS
- 202100303 - Advanced MEMS Design
- 202200253 - FEM theory and COMSOL SIM nanodevices
- 202200342 - Combined Final Project EE/I-Tech
- 202200401 - Combined Final Project I-Tech/BME
Address
University of Twente
Carré (building no. 15), room C1413
Hallenweg 23
7522 NH Enschede
Netherlands
University of Twente
Carré C1413
P.O. Box 217
7500 AE Enschede
Netherlands
Organisations
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