dr.ir. N.R. Tas (Niels) | University of Twente

Silicon

Silicon

Silicon

Fabrication

Fabrication

Lithography

Lithography

Lithography

Faculty of Science and Technology (TNW), Mesoscale Chemical Systems (MCS)

Zhao, Y. , Janssens, Y. L. , Veltkamp, H. W. , De Boer, M. J. , Groenesteijn, J. , Tas, N. R. , Wiegerink, R. J. , & Lötters, J. C. (2021). Sacrificial grid release technology: A versatile release concept for MEMS structures. Journal of micromechanics and microengineering, 31(4), [045013]. https://doi.org/10.1088/1361-6439/abe7da

Seyfert, C. , Berenschot, E. J. W. , Tas, N. R. , Susarrey-Arce, A. , & Marin, A. (2021). Evaporation-driven colloidal cluster assembly using droplets on superhydrophobic fractal-like structures. Soft matter, 17(3), 506-515. https://doi.org/10.1039/D0SM01346C

Lafuente, M. , Berenschot, E. J. W. , Tiggelaar, R. M., Rodrigo, S. G., Mallada, R. , Tas, N. R., & Pina, M. P. (2020). Attomolar SERS detection of organophosphorous pesticides using silver mirror–like micro-pyramids as active substrate. Microchimica acta, 187(4), [247]. https://doi.org/10.1007/s00604-020-4216-9

Van Kampen, C. P. , Berenschot, E. J. , Burger, G. J. , Tiggelaar, R. M. , Sanders, R. G. , Gardeniers, H. G. , & Tas, N. R. (2020). Massive Parallel NEMS Flow Restriction Fabricated Using Self-Aligned 3D-Crystallographic Nanolithography. In 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 (pp. 1106-1109). [9056175] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2020-January). IEEE. https://doi.org/10.1109/MEMS46641.2020.9056175

Jonker, D. , Kooijman, L. , Pordeli, Y. , van der Wel, B. , Berenschot, E. , Borgelink, B. , Le-The, H. , de Boer, M. , Eijkel, J. , Hueting, R. , Tiggelaar, R. , van Houselt, A. , Gardeniers, H. , & Tas, N. (2020). Wafer-scale fabrication and modification of silicon nano-pillar arrays for nanoelectronics, nanofluidics and beyond. International Journal of Nanotechnology, 17(7-10), 583-606. https://doi.org/10.1504/IJNT.2020.111322

Ni, S. , Berenschot, E. J. W. , Westerik, P. J. , de Boer, M. J. , Wolf, R. , Le-The, H. , Gardeniers, H. J. G. E. , & Tas, N. R. (2020). Wafer-scale 3D shaping of high aspect ratio structures by multistep plasma etching and corner lithography. Microsystems and Nanoengineering, 6(1), [25]. https://doi.org/10.1038/s41378-020-0134-6

Kooijman, L. J. , Pordeli, Y. , van der Wel, B. Y. , Berenschot, J. W. , Eijkel, J. C. T. , & Tas, N. R. (2020). High-performance ceramic EOF pump realized by massively parallel sacrificial silicon nano-pillar moulding. In 23rd International Conference on Miniaturized Systems for Chemistry and Life Sicences: uTAS 2019 (pp. 1188-1189). The Chemical and Biological Microsystems Society.

Pordeli, Y. , Borgelink, B. T. H. , Van Der Wel, B. Y. , Berenschot, E. J. W. , Dogan, T. , De Boer, M. J. , Bruinink, C. M. , Zandvliet, H. J. W. , Gardeniers, H. J. G. E. , & Tas, N. R. (2019). Wafer-Scale Self-Aligned Fabrication of Nanometric Curved Tunneling Junctions. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII (pp. 2376-2379). [8808559] IEEE. https://doi.org/10.1109/TRANSDUCERS.2019.8808559

Schüffelgen, P., Rosenbach, D. , Li, C., Schmitt, T. W., Schleenvoigt, M., Jalil, A. R., Schmitt, S., Kölzer, J., Wang, M., Bennemann, B., Parlak, U., Kibkalo, L., Trellenkamp, S., Grap, T., Meertens, D., Luysberg, M., Mussler, G. , Berenschot, E. , Tas, N., ... Grützmacher, D. (2019). Selective area growth and stencil lithography for in situ fabricated quantum devices. Nature nanotechnology, 14(9), 825-831. https://doi.org/10.1038/s41565-019-0506-y

Le-The, H. , Lozeman, J. J. A. , Lafuente, M. , Muñoz, P. , Bomer, J. G., Duy-Tong, H. , Berenschot, E. , Van Den Berg, A. , Tas, N. R. , Odijk, M. , & Eijkel, J. C. T. (2019). Wafer-scale fabrication of high-quality tunable gold nanogap arrays for surface-enhanced Raman scattering. Nanoscale, 11(25), 12152-12160. https://doi.org/10.1039/c9nr02215e

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University of Twente
Faculty of Science and Technology
Carré (building no. 15), room C1413
Hallenweg 23
7522NH Enschede
The Netherlands

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Mailing Address

University of Twente
Faculty of Science and Technology
Carré C1413
P.O. Box 217
7500 AE Enschede
The Netherlands

Faculty of Science and Technology (TNW), Mesoscale Chemical Systems (MCS)

University of Twente Drienerlolaan 5
7522 NB Enschede

+31 (0)53 489 9111
info@utwente.nl
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