Welcome...

dr.ir. N.R. Tas (Niels)

Associate Professor

Expertise

Silicon
Fabrication
Lithography
Etching
Silicon
Fabrication
Lithography
Wafers

Publications

Recent
Jonker, D., Jafari, Z. , Winczewski, J. P. , Eyovge, C. , Berenschot, J. W. , Tas, N. R. , Gardeniers, J. G. E., De Leon, I. , & Susarrey-Arce, A. (2020). Wafer-scale fabrication of periodic Au-hollow nanopillars for SERS applications. In Novel Optical Materials and Applications, NOMA 2020 (Vol. Part F186-NOMA 2020). [143868] Optical Society of America. https://doi.org/10.1364/NOMA.2020.NoM3C.5
Van Kampen, C. P. , Berenschot, E. J. , Burger, G. J. , Tiggelaar, R. M. , Sanders, R. G. , Gardeniers, H. G. , & Tas, N. R. (2020). Massive Parallel NEMS Flow Restriction Fabricated Using Self-Aligned 3D-Crystallographic Nanolithography. In 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 (pp. 1106-1109). [9056175] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2020-January). IEEE. https://doi.org/10.1109/MEMS46641.2020.9056175
Kooijman, L. J. , Pordeli, Y. , van der Wel, B. Y. , Berenschot, J. W. , Eijkel, J. C. T. , & Tas, N. R. (2020). High-performance ceramic EOF pump realized by massively parallel sacrificial silicon nano-pillar moulding. In 23rd International Conference on Miniaturized Systems for Chemistry and Life Sicences: uTAS 2019 (pp. 1188-1189). The Chemical and Biological Microsystems Society.

UT Research Information System

Contact Details

Visiting Address

University of Twente
Faculty of Science and Technology
Carré (building no. 15), room C1413
Hallenweg 23
7522NH  Enschede
The Netherlands

Navigate to location

Mailing Address

University of Twente
Faculty of Science and Technology
Carré  C1413
P.O. Box 217
7500 AE Enschede
The Netherlands