About Me
Remco J. Wiegerink received the M.Sc. degree in electrical engineering from the University of Twente, Enschede, The Netherlands, in 1988, on the subject of a fully integrated ultra-low frequency low-pass filter for offset canceling in integrated audio amplifiers, and the Ph.D. degree in electrical engineering from the University of Twente in 1992 on the subject of MOS translinear circuits. Between 1992 and 1995, he was in the Applied Physics Department, University of Twente, where he was engaged in the design of a superconducting flash analog-to-digital converter with GHz sampling frequency. In 1995, he joined the Transducer Science and Technology Group. Since then, his research has focused on mechanical microsensors, electronic interfacing of sensors, and packaging. Highlights include a silicon load cell with distributed capacitive readout, distributed thermal flow sensors using resistor arrays, an RF power sensor based on sensing the electrical force between the signal line and a suspended electrode, flow sensors based on the flow sensing hairs of crickets, and a micro-Coriolis flow sensor. He is currently associate professor in the Integrated Devices and Systems group, MESA+ Institute for Nanotechnology. He is (co-)author of two books, several book chapters, and more than 250 journal and conference papers.
Expertise
Physics & Astronomy
# Chips
# Mass Flow
# Sensors
Engineering & Materials Science
# Fabrication
# Mems
# Microfluidics
# Sensors
# Silicon
Organisations
Publications
Recent
Yariesbouei, M. (2023).
Cylindrical tubes with large diameters and thin walls for application in microfluidic density and mass flow sensors. [PhD Thesis - Research UT, graduation UT, University of Twente]. University of Twente.
https://doi.org/10.3990/1.9789036556453
Azadi Kenari, S.
, Wiegerink, R. J.
, Lötters, J. C.
, & Sanders, R. G. P. (2023).
Towards a Gas Independent Thermal Flow Meter. In
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 767-770). (IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2023). IEEE.
https://doi.org/10.1109/MEMS49605.2023.10052491
Sundararajan, A., Pericàs, P. C.
, Wiegerink, R. J.
, & Lotters, J. C. (2022).
Silicon Rich Silicon Nitride Microchannels to Determine Fluid Composition by Near Infrared Absorbance. In
2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) (pp. 676-679). (IEEE Symposium on Mass Storage Systems and Technologies; Vol. 2022). IEEE.
https://doi.org/10.1109/MEMS51670.2022.9699647
Canyelles Pericàs, P., Sundararajan, A.
, Wiegerink, R.
, & Lötters, J. C. (2022).
Towards in-flow monitoring of fat content and fluid composition of dairy milk using microfluidic confocal Raman spectroscopy. In B. L. Gray, & H. Becker (Eds.),
Microfluidics, BioMEMS, and Medical Microsystems XX: 22–27 January 2022, San Francisco, California, United States [119550A] (Proceedings of SPIE; Vol. 11955). SPIE.
https://doi.org/10.1117/12.2610154
Veltkamp, H-W., Janssens, Y. L.
, de Boer, M. J.
, Zhao, Y.
, Wiegerink, R. J.
, Tas, N. R.
, & Lötters, J. C. (2022).
Method for Keyhole-Free High-Aspect-Ratio Trench Refill by LPCVD.
Micromachines,
13(11), [1908].
https://doi.org/10.3390/mi13111908
Alveringh, D., Bijsterveld, D. G., Berg, T. E. V. D.
, Veltkamp, H-W.
, Batenburg, K. M.
, Sanders, R. G. P.
, Lötters, J. C.
, & Wiegerink, R. J. (2022).
A miniature microclimate thermal flow sensor for horticultural applications. In
2022 IEEE Sensors [9967348] IEEE.
https://doi.org/10.1109/SENSORS52175.2022.9967348
Azadi Kenari, S.
, Wiegerink, R. J.
, & Lötters, J. C. (2022).
Bi-Directional MEMS Thermal Flow Sensor for Respiratory Applications. Paper presented at MNE-EUROSENSORS 2022, Leuven, Belgium.
Yariesbouei, M.
, Sanders, R. G. P.
, Wiegerink, R. J.
, & Lötters, J. C. (2022).
3D printed Coriolis mass flow sensor.
Zeng, Y. (2022).
Surface channel based Coriolis flow sensors with integrated piezoelectric transducers. [PhD Thesis - Research UT, graduation UT, University of Twente]. University of Twente.
https://doi.org/10.3990/1.9789036553636
Yariesbouei, M.
, Sanders, R. G. P., Moazzenzade, T.
, Wiegerink, R. J.
, & Lötters, J. C. (2022).
Free Suspended Thin-Walled Nickel Electroplated Tubes for Microfluidic Density and Mass Flow Sensors.
Journal of microelectromechanical systems,
31(3), 408-414.
https://doi.org/10.1109/JMEMS.2022.3149632
UT Research Information System
Google Scholar Link
Courses Academic Year 2023/2024
Courses in the current academic year are added at the moment they are finalised in the Osiris system. Therefore it is possible that the list is not yet complete for the whole academic year.
Courses Academic Year 2022/2023
Contact Details
Visiting Address
University of Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Carré
(building no. 15), room C1409
Hallenweg 23
7522NH Enschede
The Netherlands
Mailing Address
University of Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Carré
C1409
P.O. Box 217
7500 AE Enschede
The Netherlands