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dr.ir. R.J. Wiegerink (Remco)

Associate Professor

Expertise

Sensors
Fabrication
Silicon
Electrodes
Capacitance
Sensors
Membranes
Sensor Arrays

Publications

Recent Articles
Zeng, Y., Groenesteijn, J., Alveringh, D., Steenwelle, R. J. A., Ma, K., Wiegerink, R. J., & Lötters, J. C. (2018). Micro Coriolis mass flow sensor driven by integrated PZT thin film actuators. Paper presented at The 31st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2018), Belfast, United Kingdom.
Boom, B. A., Bertolini, A., Hennes, E., Brookhuis, R. A., Wiegerink, R. J., Brand, van den, J. F. J., ... Wees, van, D. (2017). Nano-G accelerometer using geometric anti-springs. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 33-36). IEEE. DOI: 10.1109/MEMSYS.2017.7863332
Zeng, Y., Groenesteijn, J., Alveringh, D., Wiegerink, R. J., & Lötters, J. C. (2017). Micro Coriolis mass flow sensor driven by external piezo ceramic. 45-48. Paper presented at 3rd Conference on MicroFluidic Handling Systems, MFHS 2017, Enschede, Netherlands.
Groenesteijn, J., Alveringh, D., Schut, T., Wiegerink, R. J., Sparreboom, W., & Lötters, J. C. (2017). Micro Coriolis mass flow sensor with integrated resistive pressure sensors. 16-19. Paper presented at 3rd Conference on MicroFluidic Handling Systems, MFHS 2017, Enschede, Netherlands.
Veltkamp, H-W., Zhao, Y., de Boer, M. J., Wiegerink, R. J., & Lötters, J. C. (2017). Selective SiO2 etching in three dimensional structures using parylene-C as mask. 380. Abstract from 43rd International Conference on Micro and Nanoengineering, Braga, Portugal.
Alveringh, D., Schut, T., Wiegerink, R. J., & Lötters, J. C. (2017). Coriolis mass flow and density sensor actuation using a phase-locked loop. In Proceedings of the 3rd Conference on MicroFluidic Handling Systems, MFHS 2017 (pp. 102-105)

UT Research Information System

Contact Details

Visiting Address

University of Twente
Faculty of Electrical Engineering, Mathematics & Computer Science
Carré (building no. 15), room 1409
Hallenweg 23
7522NH  Enschede
The Netherlands

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Mailing Address

University of Twente
Faculty of Electrical Engineering, Mathematics & Computer Science
Carré  1409
P.O. Box 217
7500 AE Enschede
The Netherlands