Carré

dr.ir. R.J. Wiegerink (Remco)

Associate Professor
EEMCS-EE-IDS
Carré C1409
r.j.wiegerink@utwente.nl
+31534892718
Business card

Remco J. Wiegerink received the M.Sc. degree in electrical engineering from the University of Twente, Enschede, The Netherlands, in 1988, on the subject of a fully integrated ultra-low frequency low-pass filter for offset canceling in integrated audio amplifiers, and the Ph.D. degree in electrical engineering from the University of Twente in 1992 on the subject of MOS translinear circuits. Between 1992 and 1995, he was in the Applied Physics Department, University of Twente, where he was engaged in the design of a superconducting flash analog-to-digital converter with GHz sampling frequency. In 1995, he joined the Transducer Science and Technology Group. Since then, his research has focused on mechanical microsensors, electronic interfacing of sensors, and packaging. Highlights include a silicon load cell with distributed capacitive readout, distributed thermal flow sensors using resistor arrays, an RF power sensor based on sensing the electrical force between the signal line and a suspended electrode, flow sensors based on the flow sensing hairs of crickets, and a micro-Coriolis flow sensor. He is currently associate professor in the Integrated Devices and Systems group, MESA+ Institute for Nanotechnology. He is (co-)author of two books, several book chapters, and more than 250 journal and conference papers.

Expertise

  • Engineering

    • Flow Sensor
    • Mass Flow
    • Fabrication
    • Surfaces
    • Microelectromechanical System
    • Design

  • Chemistry

    • Sensor

  • Physics

    • Detection

Organisations

Publications

2025

Applying Machine Learning to a 1D CMOS-MEMS Anemometer for Angle Detection and Range Extension (2025)IEEE Sensors Letters, 9(10). Article 6010904. Holm, L., Hackett, T. L., Schmitz, J., Wiegerink, R. J., Lötters, J. C. & Alveringh, D.https://doi.org/10.1109/LSENS.2025.3605012Inline Microfluidic Thermal Conductivity Sensor Using a Suspended Highly-Doped Silicon Heater (2025)Journal of micromechanics and microengineering, 35(8). Article 085017. Bonnema, M. J. S., Harbers, J., Zeng, Y., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.1088/1361-6439/adfa2eMicrofluidic Thermal Flow Sensor with Extended Linear Range and Reduced Heat Dissipation Using a Shunt (2025)In 2025 23rd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) (pp. 586-589). Article 11109290. IEEE Advancing Technology for Humanity. Bonnema, M. J. S., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.1109/Transducers61432.2025.11109290Multi-Axis Large-Range Silicon-Micromachined Force Sensing System (2025)In 2025 23rd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) (pp. 1676-1679). IEEE. Holm, L., Wiegerink, R. J. & Alveringh, D.https://doi.org/10.1109/Transducers61432.2025.11111363Inline Microfluidic Thermal Conductivity Sensor Using A Suspended Silicon Heater (2025)In 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 169-172). IEEE. Bonnema, M. J. S., Harbers, J., Zeng, Y., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.1109/MEMS61431.2025.10917777Gas-compensated thermal flow sensor using an integrated velocity-independent gas properties meter (2025)Journal of micromechanics and microengineering, 35. Article 015003. Azadi Kenari, S., Wiegerink, R. J., Sanders, R. G. P. & Lötters, J. C.https://doi.org/10.1088/1361-6439/ad99e3Towards a gas independent thermal flow meter (2025)[Thesis › PhD Thesis - Research UT, graduation UT]. University of Twente. Azadi Kenari, S.https://doi.org/10.3990/1.9789036564243Micro coriolis mass flow sensor with large channel diameter by wet etching of silicon (2025)[Thesis › PhD Thesis - Research UT, graduation UT]. University of Twente. Yu, Q.https://doi.org/10.3990/1.9789036563598

2024

Micro Coriolis Mass Flow Sensor with Large Channel Diameter Realized by HNA Wet Etching (2024)Sensors (Switzerland), 24(24). Article 7952. Yu, Q., Bonnema, M. J. S., Yariesbouei, M., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.3390/s24247952Flow-through Microfluidic Relative Permittivity Sensor Using Highly-Doped Silicon Sidewall Electrodes (2024)Journal of micromechanics and microengineering, 34(11). Article 115002. Bonnema, M. J. S., Veltkamp, H.-W., Alveringh, D., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.1088/1361-6439/ad7ec6

Research profiles

Courses academic year 2025/2026

Courses in the current academic year are added at the moment they are finalised in the Osiris system. Therefore it is possible that the list is not yet complete for the whole academic year.

Courses academic year 2024/2025

Scan the QR code or
Download vCard