About Me
Remco J. Wiegerink received the M.Sc. degree in electrical engineering from the University of Twente, Enschede, The Netherlands, in 1988, on the subject of a fully integrated ultra-low frequency low-pass filter for offset canceling in integrated audio amplifiers, and the Ph.D. degree in electrical engineering from the University of Twente in 1992 on the subject of MOS translinear circuits. Between 1992 and 1995, he was in the Applied Physics Department, University of Twente, where he was engaged in the design of a superconducting flash analog-to-digital converter with GHz sampling frequency. In 1995, he joined the Transducer Science and Technology Group. Since then, his research has focused on mechanical microsensors, electronic interfacing of sensors, and packaging. Highlights include a silicon load cell with distributed capacitive readout, distributed thermal flow sensors using resistor arrays, an RF power sensor based on sensing the electrical force between the signal line and a suspended electrode, flow sensors based on the flow sensing hairs of crickets, and a micro-Coriolis flow sensor. He is currently associate professor in the Integrated Devices and Systems group, MESA+ Institute for Nanotechnology. He is (co-)author of two books, several book chapters, and more than 250 journal and conference papers.
Expertise
Sensors
Fabrication
Silicon
Electrodes
Capacitance
Sensors
Membranes
Sensor Arrays
Organizations
Publications
Recent Articles
Zeng, Y., Groenesteijn, J., Alveringh, D., Steenwelle, R. J. A., Ma, K., Wiegerink, R. J., & Lötters, J. C. (2018). Micro Coriolis mass flow sensor driven by integrated PZT thin film actuators. Paper presented at 31st IEEE International Conference on Micro Electro Mechanical Systems 2018, Belfast, United Kingdom.
Alveringh, D., Wiegerink, R. J., Groenesteijn, J., Sanders, R. G. P., & Lötters, J. C. (2018). Experimental analysis of thermomechanical noise in micro Coriolis mass flow sensors. Sensors and actuators. A: Physical, 271, 212-216. DOI: 10.1016/j.sna.2018.01.024
Groenesteijn, J., de Boer, M. J., Lötters, J. C., & Wiegerink, R. J. (2017). A versatile technology platform for microfluidic handling systems, part II: channel design and technology. Microfluidics and nanofluidics, 21(7), [126]. DOI: 10.1007/s10404-017-1962-z
Groenesteijn, J., de Boer, M. J., Lötters, J. C., & Wiegerink, R. J. (2017). A versatile technology platform for microfluidic handling systems, part I: fabrication and functionalization. Microfluidics and nanofluidics, 21(7), [127]. DOI: 10.1007/s10404-017-1961-0
Boom, B. A., Bertolini, A., Hennes, E., Brookhuis, R. A., Wiegerink, R. J., Brand, van den, J. F. J., ... Wees, van, D. (2017). Nano-G accelerometer using geometric anti-springs. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 33-36). IEEE. DOI: 10.1109/MEMSYS.2017.7863332
Zeng, Y., Groenesteijn, J., Alveringh, D., Wiegerink, R. J., & Lötters, J. C. (2017). Micro Coriolis mass flow sensor driven by external piezo ceramic. 45-48. Paper presented at 3rd Conference on MicroFluidic Handling Systems, MFHS 2017, Enschede, Netherlands.
Groenesteijn, J., Alveringh, D., Schut, T., Wiegerink, R. J., Sparreboom, W., & Lötters, J. C. (2017). Micro Coriolis mass flow sensor with integrated resistive pressure sensors. 16-19. Paper presented at 3rd Conference on MicroFluidic Handling Systems, MFHS 2017, Enschede, Netherlands.
Zhao, Y., Veltkamp, H-W., de Boer, M. J., Zeng, Y., Groenesteijn, J., Wiegerink, R. J., & Lötters, J. C. (2017). Design principles and fabrication method for a miniaturized fuel gas combustion reactor. In Conference Proceedings: The 3rd Conference on MicroFluidic Handling Systems (Vol. 3, pp. 37-40). Enschede.
UT Research Information System
Courses
Contact Details
Visiting Address
University of Twente
Faculty of Electrical Engineering, Mathematics & Computer Science
Carré
(building no. 15), room 1409
Hallenweg 23
7522NH Enschede
The Netherlands
Mailing Address
University of Twente
Faculty of Electrical Engineering, Mathematics & Computer Science
Carré
1409
P.O. Box 217
7500 AE Enschede
The Netherlands