About Me
Remco J. Wiegerink received the M.Sc. degree in electrical engineering from the University of Twente, Enschede, The Netherlands, in 1988, on the subject of a fully integrated ultra-low frequency low-pass filter for offset canceling in integrated audio amplifiers, and the Ph.D. degree in electrical engineering from the University of Twente in 1992 on the subject of MOS translinear circuits. Between 1992 and 1995, he was in the Applied Physics Department, University of Twente, where he was engaged in the design of a superconducting flash analog-to-digital converter with GHz sampling frequency. In 1995, he joined the Transducer Science and Technology Group. Since then, his research has focused on mechanical microsensors, electronic interfacing of sensors, and packaging. Highlights include a silicon load cell with distributed capacitive readout, distributed thermal flow sensors using resistor arrays, an RF power sensor based on sensing the electrical force between the signal line and a suspended electrode, flow sensors based on the flow sensing hairs of crickets, and a micro-Coriolis flow sensor. He is currently associate professor in the Integrated Devices and Systems group, MESA+ Institute for Nanotechnology. He is (co-)author of two books, several book chapters, and more than 250 journal and conference papers.
Expertise
Physics & Astronomy
# Chips
# Mass Flow
# Sensors
Engineering & Materials Science
# Fabrication
# Mems
# Microfluidics
# Sensors
# Silicon
Organisations
Publications
Recent
Zeng, Y. (2022).
Surface channel based Coriolis flow sensors with integrated piezoelectric transducers. University of Twente.
https://doi.org/10.3990/1.9789036553636
Yariesbouei, M.
, Sanders, R. G. P.
, Moazzenzade, T.
, Wiegerink, R. J.
, & Lötters, J. C. (2022).
Free Suspended Thin-Walled Nickel Electroplated Tubes for Microfluidic Density and Mass Flow Sensors.
Journal of microelectromechanical systems.
https://doi.org/10.1109/JMEMS.2022.3149632
Alveringh, D.
, van der Ven, D. L.
, Veltkamp, H-W.
, Batenburg, K. M.
, Sanders, R. G. P.
, Fernandez Rivas, D.
, & Wiegerink, R. J. (2022).
Miniature robust high-bandwidth force sensor with mechanically amplified piezoresistive readout. In
2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) (pp. 684-687). IEEE.
https://doi.org/10.1109/MEMS51670.2022.9699639
Yariesbouei, M.
, Sparreboom, W.
, Groenesteijn, J.
, van Putten, J. H.
, de Boer, M. J.
, Wiegerink, R. J.
, Veltkamp, H-W.
, Yu, Q.
, Rodriguez Olguin, M. A.
, & Lötters, J. C. (2021).
Microelectromechanical system component or a microfluidic component comprising a free-hanging or free-standing microchannel. (Patent No.
WO2021054829).
https://patentscope.wipo.int/search/en/detail.jsf?docId=WO2021054829
De Oliveira, A. C.
, Groenesteijn, J.
, Wiegerink, R. J., & Makinwa, K. A. A. (2021).
5.7 A MEMS Coriolis Mass Flow Sensor with 300 μ g/h/√Hz Resolution and ± 0.8mg/h Zero Stability. In
2021 IEEE International Solid-State Circuits Conference, ISSCC 2021 - Digest of Technical Papers (pp. 84-86). [9365946] (IEEE International Solid-State Circuits Conference (ISSCC); Vol. 2021). IEEE.
https://doi.org/10.1109/ISSCC42613.2021.9365946
Zhao, Y.
, Janssens, Y. L.
, Veltkamp, H. W.
, De Boer, M. J.
, Groenesteijn, J.
, Tas, N. R.
, Wiegerink, R. J.
, & Lötters, J. C. (2021).
Sacrificial grid release technology: A versatile release concept for MEMS structures.
Journal of micromechanics and microengineering,
31(4), [045013].
https://doi.org/10.1088/1361-6439/abe7da
Zeng, Y.
, Groenesteijn, J.
, Alveringh, D.
, Wiegerink, R. J.
, & Lötters, J. C. (2021).
Design, Fabrication, and Characterization of a Micro Coriolis Mass Flow Sensor Driven by PZT Thin Film Actuators.
Journal of microelectromechanical systems,
30(6), 885-896.
https://doi.org/10.1109/JMEMS.2021.3107744
Schut, T. V. P. (2021).
Towards a thermal noise limited micro-coriolis mass flow sensor. University of Twente.
https://doi.org/10.3990/1.9789083180410
Yariesbouei, M.
, Wiegerink, R. J.
, Sanders, R. G. P.
, & Lötters, J. C. (2021).
Thin-Walled Cylindrical Nickel Electroplated Tubes for Application in Microfluidic Density and Mass Flow Sensors. In
2021 IEEE 34th International Conference on Micro Electro Mechanical Systems, MEMS (pp. 685-688). [9375238] (IEEE International Conference on Micro Electro Mechanical Systems, MEMS; Vol. 2021). IEEE.
https://doi.org/10.1109/MEMS51782.2021.9375238
Schut, T. V. P.
, Wiegerink, R. J.
, & Lötters, J. C. (2021).
μ-Coriolis Mass Flow Sensor With Differential Capacitive Readout.
IEEE sensors journal,
21(5), 5886-5894. [9277606].
https://doi.org/10.1109/JSEN.2020.3042078
UT Research Information System
Google Scholar Link
Courses Academic Year 2021/2022
Courses in the current academic year are added at the moment they are finalised in the Osiris system. Therefore it is possible that the list is not yet complete for the whole academic year.
Courses Academic Year 2020/2021
Contact Details
Visiting Address
University of Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Carré
(building no. 15), room C1409
Hallenweg 23
7522NH Enschede
The Netherlands
Mailing Address
University of Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Carré
C1409
P.O. Box 217
7500 AE Enschede
The Netherlands