Carré

dr.ir. R.J. Wiegerink (Remco)

Associate Professor
EEMCS-EE-IDS
Carré C1409
r.j.wiegerink@utwente.nl
+31534892718
Business card

Remco J. Wiegerink received the M.Sc. degree in electrical engineering from the University of Twente, Enschede, The Netherlands, in 1988, on the subject of a fully integrated ultra-low frequency low-pass filter for offset canceling in integrated audio amplifiers, and the Ph.D. degree in electrical engineering from the University of Twente in 1992 on the subject of MOS translinear circuits. Between 1992 and 1995, he was in the Applied Physics Department, University of Twente, where he was engaged in the design of a superconducting flash analog-to-digital converter with GHz sampling frequency. In 1995, he joined the Transducer Science and Technology Group. Since then, his research has focused on mechanical microsensors, electronic interfacing of sensors, and packaging. Highlights include a silicon load cell with distributed capacitive readout, distributed thermal flow sensors using resistor arrays, an RF power sensor based on sensing the electrical force between the signal line and a suspended electrode, flow sensors based on the flow sensing hairs of crickets, and a micro-Coriolis flow sensor. He is currently associate professor in the Integrated Devices and Systems group, MESA+ Institute for Nanotechnology. He is (co-)author of two books, several book chapters, and more than 250 journal and conference papers.

Expertise

  • Engineering

    • Flow Sensor
    • Mass Flow
    • Fabrication
    • Surfaces
    • Design
    • Capacitive

  • Chemistry

    • Sensor

  • Physics

    • Detection

Organisations

Publications

2025

Inline Microfluidic Thermal Conductivity Sensor Using A Suspended Silicon Heater (2025)In 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 169-172). IEEE. Bonnema, M. J. S., Harbers, J., Zeng, Y., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.1109/MEMS61431.2025.10917777Gas-compensated thermal flow sensor using an integrated velocity-independent gas properties meter (2025)Journal of micromechanics and microengineering, 35. Article 015003. Azadi Kenari, S., Wiegerink, R. J., Sanders, R. G. P. & Lötters, J. C.https://doi.org/10.1088/1361-6439/ad99e3Towards a gas independent thermal flow meter (2025)[Thesis › PhD Thesis - Research UT, graduation UT]. University of Twente. Azadi Kenari, S.https://doi.org/10.3990/1.9789036564243Micro coriolis mass flow sensor with large channel diameter by wet etching of silicon (2025)[Thesis › PhD Thesis - Research UT, graduation UT]. University of Twente. Yu, Q.https://doi.org/10.3990/1.9789036563598

2024

Micro Coriolis Mass Flow Sensor with Large Channel Diameter Realized by HNA Wet Etching (2024)Sensors (Switzerland), 24(24). Article 7952. Yu, Q., Bonnema, M. J. S., Yariesbouei, M., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.3390/s24247952Flow-through Microfluidic Relative Permittivity Sensor Using Highly-Doped Silicon Sidewall Electrodes (2024)Journal of micromechanics and microengineering, 34(11). Article 115002. Bonnema, M. J. S., Veltkamp, H.-W., Alveringh, D., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.1088/1361-6439/ad7ec6Fabrication of Buried Microchannels with Almost Circular Cross-Section Using HNA Wet Etching (2024)Micromachines, 15(10). Article 1230. Yu, Q., Veltkamp, H.-W., Wiegerink, R. J. & Lötters, J. C.https://doi.org/10.3390/mi15101230Method for determining a flow rate of a fluid independent of the thermal proprties of the fluid (2024)[Patent › Patent]. Azadi Kenari, S., Lötters, J. C., Sanders, R. G. P. & Wiegerink, R. J.Thermal Flow sensor for determining a flow rate of a fluid (2024)[Patent › Patent]. Azadi Kenari, S., Lötters, J. C., Sanders, R. G. P. & Wiegerink, R. J.Flow-Independent Thermal Conductivity and Volumetric Heat Capacity Measurement of Pure Gases and Binary Gas Mixtures Using a Single Heated Wire (2024)Micromachines, 15(6). Article 671. Azadi Kenari, S., Wiegerink, R. J., Sanders, R. G. P. & Lötters, J. C.https://doi.org/10.3390/mi15060671

Research profiles

Courses academic year 2025/2026

Courses in the current academic year are added at the moment they are finalised in the Osiris system. Therefore it is possible that the list is not yet complete for the whole academic year.

Courses academic year 2024/2025

Courses academic year 2023/2024

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