dr.ir. R.J. Wiegerink (Remco)

Remco J. Wiegerink received the M.Sc. degree in electrical engineering from the University of Twente, Enschede, The Netherlands, in 1988, on the subject of a fully integrated ultra-low frequency low-pass filter for offset canceling in integrated audio amplifiers, and the Ph.D. degree in electrical engineering from the University of Twente in 1992 on the subject of MOS translinear circuits. Between 1992 and 1995, he was in the Applied Physics Department, University of Twente, where he was engaged in the design of a superconducting flash analog-to-digital converter with GHz sampling frequency. In 1995, he joined the Transducer Science and Technology Group. Since then, his research has focused on mechanical microsensors, electronic interfacing of sensors, and packaging. Highlights include a silicon load cell with distributed capacitive readout, distributed thermal flow sensors using resistor arrays, an RF power sensor based on sensing the electrical force between the signal line and a suspended electrode, flow sensors based on the flow sensing hairs of crickets, and a micro-Coriolis flow sensor. He is currently associate professor in the Integrated Devices and Systems group, MESA+ Institute for Nanotechnology. He is (co-)author of two books, several book chapters, and more than 250 journal and conference papers.

Physics & Astronomy

# Chips
# Mass Flow
# Sensors

Engineering & Materials Science

# Fabrication
# Mems
# Microfluidics
# Sensors
# Silicon

Faculty of Electrical Engineering, Mathematics and Computer Science (EEMCS), Integrated Devices and Systems (IDS)

Veltkamp, H. W., Janssens, Y. L. , de Boer, M. J. , Zhao, Y. , Wiegerink, R. J. , Tas, N. R. , & Lötters, J. C. (2022). Method for Keyhole-Free High-Aspect-Ratio Trench Refill by LPCVD. Micromachines, 13(11), [1908]. https://doi.org/10.3390/mi13111908

Alveringh, D., Bijsterveld, D. G., Berg, T. E. V. D. , Veltkamp, H-W. , Batenburg, K. M. , Sanders, R. G. P. , Lötters, J. C. , & Wiegerink, R. J. (2022). A miniature microclimate thermal flow sensor for horticultural applications. In 2022 IEEE Sensors [9967348] IEEE/EUCA. https://doi.org/10.1109/SENSORS52175.2022.9967348

Azadi Kenari, S. , Wiegerink, R. J. , & Lötters, J. C. (2022). Bi-Directional MEMS Thermal Flow Sensor for Respiratory Applications. Paper presented at MNE-EUROSENSORS 2022, Leuven, Belgium.

Yariesbouei, M. , Sanders, R. G. P. , Wiegerink, R. J. , & Lötters, J. C. (2022). 3D printed Coriolis mass flow sensor.

Zeng, Y. (2022). Surface channel based Coriolis flow sensors with integrated piezoelectric transducers. [PhD Thesis - Research UT, graduation UT, University of Twente]. University of Twente. https://doi.org/10.3990/1.9789036553636

Yariesbouei, M. , Sanders, R. G. P., Moazzenzade, T. , Wiegerink, R. J. , & Lötters, J. C. (2022). Free Suspended Thin-Walled Nickel Electroplated Tubes for Microfluidic Density and Mass Flow Sensors. Journal of microelectromechanical systems, 31(3), 408-414. https://doi.org/10.1109/JMEMS.2022.3149632

Alveringh, D. , van der Ven, D. L. , Veltkamp, H-W. , Batenburg, K. M. , Sanders, R. G. P. , Fernandez Rivas, D. , & Wiegerink, R. J. (2022). Miniature robust high-bandwidth force sensor with mechanically amplified piezoresistive readout. In 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) (pp. 684-687). IEEE. https://doi.org/10.1109/MEMS51670.2022.9699639

Yariesbouei, M. , Sparreboom, W. , Groenesteijn, J. , van Putten, J. H. , de Boer, M. J. , Wiegerink, R. J. , Veltkamp, H-W., Yu, Q., Rodriguez Olguin, M. A. , & Lötters, J. C. (2021). Microelectromechanical system component or a microfluidic component comprising a free-hanging or free-standing microchannel. (Patent No. WO2021054829). https://patentscope.wipo.int/search/en/detail.jsf?docId=WO2021054829

De Oliveira, A. C. , Groenesteijn, J. , Wiegerink, R. J., & Makinwa, K. A. A. (2021). 5.7 A MEMS Coriolis Mass Flow Sensor with 300 μ g/h/√Hz Resolution and ± 0.8mg/h Zero Stability. In 2021 IEEE International Solid-State Circuits Conference, ISSCC 2021 - Digest of Technical Papers (pp. 84-86). [9365946] (IEEE International Solid-State Circuits Conference (ISSCC); Vol. 2021). IEEE. https://doi.org/10.1109/ISSCC42613.2021.9365946

Zhao, Y., Janssens, Y. L. , Veltkamp, H. W. , De Boer, M. J. , Groenesteijn, J. , Tas, N. R. , Wiegerink, R. J. , & Lötters, J. C. (2021). Sacrificial grid release technology: A versatile release concept for MEMS structures. Journal of micromechanics and microengineering, 31(4), [045013]. https://doi.org/10.1088/1361-6439/abe7da

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r.j.wiegerink@utwente.nl

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University of Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Carré (building no. 15), room C1409
Hallenweg 23
7522NH Enschede
The Netherlands

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University of Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Carré C1409
P.O. Box 217
7500 AE Enschede
The Netherlands

Faculty of Electrical Engineering, Mathematics and Computer Science (EEMCS), Integrated Devices and Systems (IDS)

University of Twente Drienerlolaan 5
7522 NB Enschede

+31 (0)53 489 9111
info@utwente.nl
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