Expertise
Sensors
Fabrication
Silicon
Electrodes
Capacitance
Sensor Arrays
Membranes
Sensors
Organizations
Publications
Recent Articles
Zhao, Y., Veltkamp, H-W., de Boer, M. J., Zeng, Y., Groenesteijn, J., Wiegerink, R. J., & Lötters, J. C. (2017). Fabrication process for a large volume silicon nitride micro-combustor. 450. Abstract from 43rd International Conference on Micro and Nanoengineering, Braga, Portugal.
Veltkamp, H-W., Zhao, Y., de Boer, M. J., Wiegerink, R. J., & Lötters, J. C. (2017). Selective SiO2 etching in three dimensional structures using parylene-C as mask. 380. Abstract from 43rd International Conference on Micro and Nanoengineering, Braga, Portugal.
Zhao, Y., Veltkamp, H-W., de Boer, M. J., Zeng, Y., Groenesteijn, J., Wiegerink, R. J., & Lötters, J. C. (2017). Design principles and fabrication method for a miniaturized fuel gas combustion reactor. In Conference Proceedings: The 3rd Conference on MicroFluidic Handling Systems (Vol. 3, pp. 37-40). Enschede.
Alveringh, D., Schut, T., Wiegerink, R. J., & Lötters, J. C. (2017). Coriolis mass flow and density sensor actuation using a phase-locked loop. In Proceedings of the 3rd Conference on MicroFluidic Handling Systems, MFHS 2017 (pp. 102-105)
Veltkamp, H-W., Zhao, Y., de Boer, M. J., Groenesteijn, J., Wiegerink, R. J., & Lötters, J. C. (2017). Fabrication of large-volume rectangular channels using trench-sidewall technology and a SOI substrate. In Conference Proceedings: The 3rd Conference on MicroFluidic Handling Systems (Vol. 3, pp. 114-117). Enschede.
Alveringh, D., Sanders, R. G. P., Groenesteijn, J., Lammerink, T. S. J., Wiegerink, R. J., & Lötters, J. C. (2017). Universal modular fluidic and electronic interfacing platform for microfluidic devices. In Proceedings of the 3rd Conference on MicroFluidic Handling Systems, MFHS 2017 (pp. 106-109)
Alveringh, D., Schut, T., Wiegerink, R. J., Sparreboom, W., & Lötters, J. C. (2017). Resistive pressure sensors integrated with a Coriolis mass flow sensor. In 19th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2017 (pp. 1167-1170). IEEE. DOI: 10.1109/TRANSDUCERS.2017.7994261
Alveringh, D., Wiegerink, R. J., & Lötters, J. C. (2017). Integrated pressure sensing using capacitive Coriolis mass flow sensors. Journal of microelectromechanical systems, 26(3), 653-661. DOI: 10.1109/JMEMS.2017.2689162
Alveringh, D., Sanders, R. G. P., Wiegerink, R. J., & Lötters, J. C. (2017). Phase relation recovery for scanning laser Doppler vibrometry. Measurement science and technology, 28(2), 025208. DOI: 10.1088/1361-6501/aa53a3
Monge, R., Groenesteijn, J., Alveringh, D., Wiegerink, R. J., Lötters, J. C., & Fernandez, L. J. (2017). SU-8 micro Coriolis mass flow sensor. Sensors and actuators. B: Chemical, 241, 744-749. DOI: 10.1016/j.snb.2016.10.133
UT Research Information System
Courses
Contact Details
Visiting Address
University of Twente
Faculty of Electrical Engineering, Mathematics & Computer Science
Carré
(building no. 15), room 1409
Hallenweg 23
7522NH Enschede
The Netherlands
Mailing Address
University of Twente
Faculty of Electrical Engineering, Mathematics & Computer Science
Carré
1409
P.O. Box 217
7500 AE Enschede
The Netherlands