Carré

dr.ir. R.W.E. van de Kruijs (Robbert)

Assistant Professor
TNW-NEM-XUV
Carré C2017
r.w.e.vandekruijs@utwente.nl
+31534894415
Business card

Expertise

  • Material Science

    • Thin Films
    • Reflectivity
    • Surface
    • Temperature

  • Chemistry

    • Liquid Film

  • Physics

    • Growth
    • Mirrors
    • Diffusivity

Organisations

Publications

2026

Chemical etch resistance of sputter-deposited metal oxide thin film coatings in atomic hydrogen at 700 °C (2026)Materials chemistry and physics, 354. Article 132143. Pushkarev, R., Houweling, Z. S., van de Kruijs, R. W. E., Van den Beld, W. T. E., Sturm, J. M., Ackermann, M. D. & Bijkerk, F.https://doi.org/10.1016/j.matchemphys.2026.132143Sensing of Hydrogen Diffusion through Protective Caps: An Ellipsometric Approach to Estimate Hydrogen Content in Pd/Hf Stacks with an Al2O3Cap (2026)The Journal of physical chemistry C, 130(7), 2591-2604. Wu, W., van de Kruijs, R. W. E., Gravesteijn, D. J., Houweling, Z. S., Colombi, G. & Kovalgin, A. Y.https://doi.org/10.1021/acs.jpcc.5c06383Using Monte Carlo-based Uncertainty Quantification for Free-Form XRR (2026)[Contribution to conference › Poster] NWO Physics 2026. Lokhorst, H. W., van de Kruijs, R. W. E., Makhotkin, I. A., Schlottbom, M. & Ackermann, M.

2025

Hume-Rothery driven oxidation resilience of binary alloy thin films (2025)Journal of Applied Physics, 138(23). Article 235301. Homsma, M. D., Van den Beld, W. T. E., Van de Kruijs, R. W. E. & Ackermann, M. D.https://doi.org/10.1063/5.0293334EUV spectrum of high power LPP source (2025)In International Conference on Extreme Ultraviolet Lithography 2025. Article 1368611 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 13686). SPIE. van de Kerkhof, M., van der Horst, R., Bayraktar, M., van de Kruijs, R., Osorio, E. & Ackermann, M.https://doi.org/10.1117/12.3072173Using Monte Carlo-based Uncertainty Quantification for Free-Form XRR (2025)[Contribution to conference › Poster] 8th PTB-Seminar on VUV and EUV Metrology 2025. Lokhorst, H. W., van de Kruijs, R. W. E., Makhotkin, I. A., Schlottbom, M. & Ackermann, M.Film thickness non-uniformity and crucial role of water dosage for atomic layer deposition of yttrium oxide from yttrium cyclopentadienyl precursor (2025)[Contribution to conference › Poster] 24th EUROCVD & ALD 2025. Wu, W., van de Kruijs, R. W. E. & Kovalgin, A. Y.Using Monte Carlo-based methods for Uncertainty Quantification for XRR (2025)[Contribution to conference › Poster] International Workshop on X-Ray and Neutron Multilayer Structures, PXRNMS 2025. Lokhorst, H. W., van de Kruijs, R. W. E., Makhotkin, I. A., Schlottbom, M. & Ackermann, M.A Universal Model for Hydrogen−Induced Reduction of Transition Metal Compounds (2025)[Thesis › PhD Thesis - Research UT, graduation UT]. University of Twente. Rehman, A.https://doi.org/10.3990/1.9789036565288Engineering Work Function to Stabilize Metal Oxides in Reactive Hydrogen (2025)The journal of physical chemistry letters, 16(10), 2592-2598. Rehman, A., van de Kruijs, R. W. E., van den Beld, W. T. E., Sturm, J. M. & Ackermann, M.https://doi.org/10.1021/acs.jpclett.4c03404

Research profiles

Courses academic year 2026/2027

Courses in the current academic year are added at the moment they are finalised in the Osiris system. Therefore it is possible that the list is not yet complete for the whole academic year.

Courses academic year 2025/2026

Courses academic year 2024/2025

Address

University of Twente

Carré (building no. 15), room C2017
Hallenweg 23
7522 NH Enschede
Netherlands

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