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dr.ir. R.W.E. van de Kruijs (Robbert)

Assistant Professor

Expertise

Reflectance
X Rays
Mirrors
Thin Films
Wavelengths
Laminates
Retarding
Multilayers

Publications

Recent
Makhotkin, I. A., Sobierajski, R., Chalupsky, J., Tiedtke, K., de Vries, G., Störmer, M., ... Enkisch, H. (2018). Experimental study of EUV-mirror radiation damage resistance under long term FEL exposures below the single shot damage threshold. Journal of synchrotron radiation, 25(1), 77-84. DOI: 10.1107/S1600577517017362
Philipsen, V., Luong, K. V., Souriau, L., Erdmann, A., Xu, D., Evanschitzky, P., ... Hendrickx, E. (2017). Reducing extreme ultraviolet mask three-dimensional effects by alternative metal absorbers. Journal of micro/nanolithography, MEMS, and MOEMS, 16(4), [041002]. DOI: 10.1117/1.JMM.16.4.041002
van Zwol, P. J., Nasalevich, M., Voorthuijzen, W. P., Kurganova, E., Notenboom, A., Vles, D. F., ... Zande, W. J. (2017). Pellicle films supporting the ramp to HVM with EUV. In Photomask Technology 2017 (Vol. 10451). [104510O] SPIE. DOI: 10.1117/12.2280560

UT Research Information System

Contact Details

Visiting Address

University of Twente
Faculty of Science and Technology
Carré (building no. 15), room C2017
Hallenweg 23
7522NH  Enschede
The Netherlands

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Mailing Address

University of Twente
Faculty of Science and Technology
Carré  C2017
P.O. Box 217
7500 AE Enschede
The Netherlands