dr.ir. R.W.E. van de Kruijs (Robbert)

Physics & Astronomy

# Grazing Incidence
# Laminates
# Mirrors
# Reflectance
# Thin Films
# X Rays

Engineering & Materials Science

# Multilayers

Chemistry

# Multilayer

Faculty of Science and Technology (TNW), XUV Optics (XUV)

Chen, J. , Louis, E., Harmsen, R. , Tsarfati, T. , Wormeester, H., van Kampen, M., van Schaik, W. , van de Kruijs, R. , & Bijkerk, F. (2022). Corrigendum to “In situ ellipsometry study of atomic hydrogen etching of extreme ultraviolet induced carbon layers” [Appl. Surf. Sci. 258(1) (2011) 7–12, (S0169433211011883), (10.1016/j.apsusc.2011.07.121)]. Applied surface science, [155765]. https://doi.org/10.1016/j.apsusc.2022.155765

Chandrasekaran, A. (2022). Surface and interface diffusion processes in nanoscale thin films. [PhD Thesis - Research UT, graduation UT, University of Twente]. University of Twente. https://doi.org/10.3990/1.9789036554763

Shafikov, A. (2022). Fracture behavior and characterization of free-standing metal silicide thin films. [PhD Thesis - Research UT, graduation UT, University of Twente]. University of Twente. https://doi.org/10.3990/1.9789036554251

Sturm, J. M. , van de Kruijs, R. W. E. , Phadke, P. , & Ackermann, M. (2022). LEIS analysis of thin Cu films on Ru: an unexpected result on sputter intermixing. Poster session presented at LEIS Workshop 2022, Brno.

Schurink, B. , van den Beld, W. , Tiggelaar, R. M. , van de Kruijs, R. W. E. , & Bijkerk, F. (2022). Synthesis and Characterization of Boron Thin Films Using Chemical and Physical Vapor Depositions. Coatings, 12 (5), [685]. https://doi.org/10.3390/coatings12050685

Phadke, P. , Zameshin, A. A. , Sturm, J. M. , van de Kruijs, R. W. E. , & Bijkerk, F. (2022). Sputter yields of monoatomic solids by Ar and Ne ions near the threshold: A Bayesian analysis of the Yamamura Model. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 520, 29-39. https://doi.org/10.1016/j.nimb.2022.03.016

Shafikov, A. , van de Kruijs, R. W. E. , Benschop, J. P. H. , Schurink, B. , van den Beld, W. T. E. , Houweling, Z. S. , Kooi, B. J. , Ahmadi, M., de Graaf, S. , & Bijkerk, F. (2022). Relation between composition and fracture strength in off-stoichiometric metal silicide free-standing membranes. Intermetallics, 144, [107531]. https://doi.org/10.1016/j.intermet.2022.107531

Shafikov, A. , van de Kruijs, R. W. E. , Benschop, J. P. H. , van den Beld, W. , Houweling, S. , & Bijkerk, F. (2022). Fracture Toughness of Free-Standing ZrSiₓ Thin Films Measured Using Crack-on-a-Chip Method. Journal of microelectromechanical systems, 31(1), 63-73. https://doi.org/10.1109/JMEMS.2021.3128760

Shavikof, A. , Bijkerk, F. , Schurink, B. , Sturm, J. M. , & van de Kruijs, R. W. E. (2021). PELLICLE FOR EUV LITHOGRAPHY. (Patent No. CN113646697).

Kizir, S. , van den Beld, W. T. E. , Verbakel, J. D. , Pushkarev, R. , Houweling, Z. S. , van de Kruijs, R. W. E. , Benschop, J. P. H. , & Bijkerk, F. (2021). Hydrogen etch resistance of aluminium oxide passivated graphitic layers. Journal of physics D: applied physics, 54(50), [505304]. https://doi.org/10.1088/1361-6463/ac2200

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+31534894415

r.w.e.vandekruijs@utwente.nl

Visiting Address

University of Twente
Drienerlolaan 5
7522 NB Enschede
The Netherlands

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University of Twente
P.O. Box 217
7500 AE Enschede
The Netherlands

Faculty of Science and Technology (TNW), XUV Optics (XUV)

University of Twente Drienerlolaan 5
7522 NB Enschede

+31 (0)53 489 9111
info@utwente.nl
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dr.ir. R.W.E. van de Kruijs (Robbert)

Assistant Professor

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Courses Academic Year 2022/2023

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