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dr.ir. R.W.E. van de Kruijs (Robbert)

Assistant Professor

Expertise

Multilayers
Wavelengths
Mirrors
X Rays
Reflectance
Optics
Damage
Mirrors

Publications

Recent Articles
Makhotkin, I. A., Sobierajski, R., Chalupský, J., Tiedtke, K., de Vries, G., Störmer, M., ... Enkisch, H. (2018). Experimental study of EUV mirror radiation damage resistance under long-term free-electron laser exposures below the single-shot damage threshold. Journal of synchrotron radiation, 25(1), 77-84. DOI: 10.1107/S1600577517017362
Makhotkin, I. A., Sobierajski, R., Chalupsky, J., Tiedtke, K., de Vries, G., Störmer, M., ... Enkisch, H. (2018). Experimental study of EUV-mirror radiation damage resistance under long term FEL exposures below the single shot damage threshold. Journal of synchrotron radiation, 25(1), 77-84. DOI: 10.1107/S1600577517017362
Nikolaev, K., Makhotkin, I. A., Yakunin, S. N., van de Kruijs, R. W. E., & Bijkerk, F. (2017). Crystal surface characterization. Poster session presented at ALTECH 2017, Berlin, Germany.
Nikolaev, K., Yakunin, S. N., Makhotkin, I. A., van de Kruijs, R. W. E., & Bijkerk, F. (2017). Advanced crystal surface characterization with asymmetrical X-ray diffraction. Poster session presented at Physics Veldhoven, Veldhoven, Netherlands, .
Reinink, J., van de Kruijs, R. W. E., & Bijkerk, F. (2017). Interface study of Mo/Si systems using LEIS and in-situ stress analysis. Poster session presented at 304. PTB-Seminar VUV and EUV Metrology, Berlin, Germany.
Sturm, J. M., Coloma Ribera, R., van de Kruijs, R. W. E., Yakshin, A., & Bijkerk, F. (2017). In vacuo low-energy ions scattering studies of ZrO2 growth by magnetron sputtering. In In vacuo low-energy ions scattering studies of ZrO2 growth by magnetron sputtering
Philipsen, V., Luong, K. V., Souriau, L., Hendrickx, E., Erdmann, A., Xu, D., ... Reuter, C. (2017). Reducing EUV mask 3D effects by alternative metal absorbers. In Extreme Ultraviolet (EUV) Lithography VIII (Vol. 10143). [1014310] SPIE. DOI: 10.1117/12.2257929

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Contact Details

Visiting Address

University of Twente
Faculty of Science and Technology
Carré (building no. 15), room 2017
Hallenweg 23
7522NH  Enschede
The Netherlands

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Mailing Address

University of Twente
Faculty of Science and Technology
Carré  2017
P.O. Box 217
7500 AE Enschede
The Netherlands