Expertise
Engineering
- High Aspect Ratio
- Lithography
- Side Wall
- Dimensional Control
Material Science
- Plasma Etching
- Density
- Silicon
- Silicon Wafer
Organisations
- Nanolab (NANO)
- MESA+ Institute
Research profiles
Address

University of Twente
Nanolab (building no. 16), room 1011
Hallenweg 23
7522 NH Enschede
Netherlands
University of Twente
Nanolab 1011
P.O. Box 217
7500 AE Enschede
Netherlands
Organisations
- Nanolab (NANO)
- MESA+ Institute