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R. Wolf (Rene)

Supervisor Plasma etching and Dicing equipment

Expertise

High Aspect Ratio
Plasma Etching
Plasma Etching
Silicon
Wafers
Masks
Aspect Ratio
Etching
Lithography
Plasma
Silicon
Lithography

UT Research Information System

Contact Details

Visiting Address

University of Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Nanolab (building no. 16), room 1011
Hallenweg 23
7522NH  Enschede
The Netherlands

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Mailing Address

University of Twente
Faculty of Electrical Engineering, Mathematics and Computer Science
Nanolab  1011
P.O. Box 217
7500 AE Enschede
The Netherlands