V. Fransen (Vito)

Enhancing micro-coriolis mass flow sensor performance for small gas flows

There are different ways to measure gas flows. One is to guide the gas through a suspended tube that can vibrate. When this tube is excited in one direction, it will also vibrate about the perpendicular axis. This vibration depends on how much gas is flowing through. Hence, it can be used to measure flows. The two main advantages of this method compared to others are that it does not heat up the gas, and that it does not require slow calibration. This sensor is functional and commercialised for liquids and large gas flows, but not yet for small gas flows (of about 5 sccm). My job is to improve the signal strength compared to the measured noise, and preventing sensor measurement drift. These improvements would allow for helium and hydrogen sensing with these techniques for industrial applications.

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