Main research focus: ALD-based thin films for XUV optics
2021-now, University of Twente, PhD candidate in project "X-tools"
Combined project from IDS (EEMCS) and XUV (TNW) group, under supervision of dr. Alexey Y. Kovalgin (IDS), dr. Robbert W. E. van de Kruijs (XUV), and prof. dr. Jurriaan Schmitz (IDS)
2018-2021, TCL CSOT, Process engineer in oxide-based thin film transistors.
2015-2018, Shanghai University and Ningbo Institute of Materials Technology & Engineering, Master degree on materials science.
2011-2015, Nanjing University of Science and Technology, Bachelor degree on polymer science and engineering.
Organisations
X-tools project aims to gain the knowledge on solving practical problems from present XUV machines and provide deeper understanding on how to apply it from multidisciplinary view of point. My work is focused on exploring oxide-based candidates by ALD as promising ultra-thin films to survive XUV condition.
Address
University of Twente
Carré (building no. 15), room C2732
Hallenweg 23
7522 NH Enschede
Netherlands
University of Twente
Carré C2732
P.O. Box 217
7500 AE Enschede
Netherlands
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