Expertise
Chemistry
# Dimension
# Etching
Engineering & Materials Science
# Dry Etching
# Etching
# Reactive Ion Etching
# Silicon
# Wet Etching
# Xenon
Organisations
Publications
Recent
Zhao, Y.
, Janssens, Y. L.
, Veltkamp, H. W.
, De Boer, M. J.
, Groenesteijn, J.
, Tas, N. R.
, Wiegerink, R. J.
, & Lötters, J. C. (2021).
Sacrificial grid release technology: A versatile release concept for MEMS structures.
Journal of micromechanics and microengineering,
31(4), [045013].
https://doi.org/10.1088/1361-6439/abe7da
Contact Details
Visiting Address
University of Twente
Drienerlolaan 5
7522 NB Enschede
The Netherlands
Mailing Address
University of Twente
P.O. Box 217
7500 AE Enschede
The Netherlands