Expertise
Physics & Astronomy
# Actuation
# Mass Flow
# Piezoelectric Transducers
# Sensors
# Silicon Nitrides
Earth & Environmental Sciences
# Fuel Gas
Engineering & Materials Science
# Gas Fuels
# Lead Zirconate Titanate
Publications
Recent
Zeng, Y. (2022).
Surface channel based Coriolis flow sensors with integrated piezoelectric transducers. [PhD Thesis - Research UT, graduation UT, University of Twente]. University of Twente.
https://doi.org/10.3990/1.9789036553636
Zeng, Y.
, Groenesteijn, J.
, Alveringh, D.
, Wiegerink, R. J.
, & Lötters, J. C. (2021).
Design, Fabrication, and Characterization of a Micro Coriolis Mass Flow Sensor Driven by PZT Thin Film Actuators.
Journal of microelectromechanical systems,
30(6), 885-896.
https://doi.org/10.1109/JMEMS.2021.3107744
Zeng, Y.
, Sanders, R.
, Wiegerink, R.
, & Lötters, J. (2020).
A flow-through microfluidic relative permittivity sensor.
Micromachines,
11(3), [325].
https://doi.org/10.3390/mi11030325
Lötters, J. C.
, Groenesteijn, J.
, Steenwelle, R. J. A.
, Wiegerink, R. J.
, Alveringh, D.
, Ma, K.
, & Zeng, Y. (2019).
Coriolis flow sensor. (Patent No.
WO2019143239A8).
Zhao, Y.
, Veltkamp, H-W.
, de Boer, M. J.
, Zeng, Y.
, Groenesteijn, J.
, Wiegerink, R. J.
, & Lötters, J. C. (2018).
Design principles and fabrication method for a miniaturized fuel gas combustion reactor. In
Proceedings of the 21st Semiconductor Advances for Future Electronics (SAFE) workshop (pp. 10). University of Twente.
Zhao, Y.
, Veltkamp, H-W.
, Zeng, Y.
, Lötters, J. C.
, & Wiegerink, R. J. (2018).
Micro machined fuel gas combustion unit. (Patent No.
WO2019054872A1).
https://patents.google.com/patent/WO2019054872A1/en
Zhao, Y.
, Veltkamp, H-W.
, Zeng, Y.
, Lötters, J. C.
, & Wiegerink, R. J. (2018).
Method of fabricating a micro machined channel. (Patent No.
WO2019054873A1).
https://patents.google.com/patent/WO2019054873A1/en
Zeng, Y.
, Groenesteijn, J.
, Alveringh, D.
, Steenwelle, R. J. A.
, Ma, K.
, Wiegerink, R. J.
, & Lötters, J. C. (2018).
Micro Coriolis mass flow sensor driven by integrated PZT thin film actuators. Paper presented at 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, Belfast, United Kingdom.
Contact Details
+31534894373
(if no answer)
Visiting Address
University of Twente
Drienerlolaan 5
7522 NB Enschede
The Netherlands
Mailing Address
University of Twente
P.O. Box 217
7500 AE Enschede
The Netherlands