Y. Zeng MSc (Yaxiang) | University of Twente

Physics & Astronomy

# Actuation
# Mass Flow
# Piezoelectric Transducers
# Sensors
# Silicon Nitrides

Earth & Environmental Sciences

# Fuel Gas

Engineering & Materials Science

# Gas Fuels
# Lead Zirconate Titanate

Zeng, Y. (2022). Surface channel based Coriolis flow sensors with integrated piezoelectric transducers. [PhD Thesis - Research UT, graduation UT, University of Twente]. University of Twente. https://doi.org/10.3990/1.9789036553636

Zeng, Y. , Groenesteijn, J. , Alveringh, D. , Wiegerink, R. J. , & Lötters, J. C. (2021). Design, Fabrication, and Characterization of a Micro Coriolis Mass Flow Sensor Driven by PZT Thin Film Actuators. Journal of microelectromechanical systems, 30(6), 885-896. https://doi.org/10.1109/JMEMS.2021.3107744

Zeng, Y. , Sanders, R. , Wiegerink, R. , & Lötters, J. (2020). A flow-through microfluidic relative permittivity sensor. Micromachines, 11(3), [325]. https://doi.org/10.3390/mi11030325

Lötters, J. C. , Groenesteijn, J. , Steenwelle, R. J. A. , Wiegerink, R. J. , Alveringh, D. , Ma, K. , & Zeng, Y. (2019). Coriolis flow sensor. (Patent No. WO2019143239A8).

Zhao, Y. , Veltkamp, H-W. , de Boer, M. J. , Zeng, Y. , Groenesteijn, J. , Wiegerink, R. J. , & Lötters, J. C. (2018). Design principles and fabrication method for a miniaturized fuel gas combustion reactor. In Proceedings of the 21st Semiconductor Advances for Future Electronics (SAFE) workshop (pp. 10). University of Twente.

Zhao, Y. , Veltkamp, H-W. , Zeng, Y. , Lötters, J. C. , & Wiegerink, R. J. (2018). Micro machined fuel gas combustion unit. (Patent No. WO2019054872A1). https://patents.google.com/patent/WO2019054872A1/en

Zhao, Y. , Veltkamp, H-W. , Zeng, Y. , Lötters, J. C. , & Wiegerink, R. J. (2018). Method of fabricating a micro machined channel. (Patent No. WO2019054873A1). https://patents.google.com/patent/WO2019054873A1/en

Zeng, Y. , Groenesteijn, J. , Alveringh, D. , Steenwelle, R. J. A. , Ma, K. , Wiegerink, R. J. , & Lötters, J. C. (2018). Micro Coriolis mass flow sensor driven by integrated PZT thin film actuators. Paper presented at 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, Belfast, United Kingdom.

+31534894373 (if no answer)

y.zeng-1@utwente.nl

Visiting Address

University of Twente
Drienerlolaan 5
7522 NB Enschede
The Netherlands

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Mailing Address

University of Twente
P.O. Box 217
7500 AE Enschede
The Netherlands

University of Twente Drienerlolaan 5
7522 NB Enschede

+31 (0)53 489 9111
info@utwente.nl
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