Yaxiang Zeng received his bachelor's degree in materials physics from Northeastern University, Shenyang, China, in 2014, and his master's degree in nanoscale engineering from INSA Lyon, Lyon, France, in 2016. He earned his Ph.D. degree from the University of Twente, Enschede, The Netherlands, in 2023. He is currently a postdoctoral fellow in the Integrated Optical Systems (IOS) group at the University of Twente. His work focuses on chip-to-chip and free-space optical interconnects.
Physics & Astronomy
# Actuation # Mass Flow # Piezoelectric Transducers # Sensors # Silicon Nitrides
Earth & Environmental Sciences
# Fuel Gas
Engineering & Materials Science
# Gas Fuels # Lead Zirconate Titanate
Zeng, Y. (2022). Surface channel based Coriolis flow sensors with integrated piezoelectric transducers. [PhD Thesis - Research UT, graduation UT, University of Twente]. University of Twente. https://doi.org/10.3990/1.9789036553636
Zeng, Y. , Groenesteijn, J. , Alveringh, D. , Wiegerink, R. J. , & Lötters, J. C. (2021). Design, Fabrication, and Characterization of a Micro Coriolis Mass Flow Sensor Driven by PZT Thin Film Actuators. Journal of microelectromechanical systems, 30(6), 885-896. Advance online publication. https://doi.org/10.1109/JMEMS.2021.3107744
Zhao, Y. , Veltkamp, H-W. , de Boer, M. J. , Zeng, Y. , Groenesteijn, J. , Wiegerink, R. J. , & Lötters, J. C. (2018). Design principles and fabrication method for a miniaturized fuel gas combustion reactor. In Proceedings of the 21st Semiconductor Advances for Future Electronics (SAFE) workshop (pp. 10). University of Twente.
Zeng, Y. , Groenesteijn, J. , Alveringh, D. , Steenwelle, R. J. A. , Ma, K. , Wiegerink, R. J. , & Lötters, J. C. (2018). Micro Coriolis mass flow sensor driven by integrated PZT thin film actuators. Paper presented at 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, Belfast, United Kingdom.